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Table of Contents

Ⅳ

ULVAC CRYOGENICS INCORPORATED

8-3

CRYO-U

8H, U

8HSP, U

8H-U, U

8HL Consumables

･････

8-3

8-4

CRYO-U

10PU, U

10H, U

10HL Consumables

････････････

8-3

A-1

Cryopump Fault Diagnosis

････････････････････････････････

A-2

Operating Log

････････････････････････････････････････････

A-7

F-1

Dew-Point Temperature

･･･････････････････････････････････

F-2

Содержание CRYO-U Series

Страница 1: ...der row 2 35 of appended table 1 of Japan s Export Trade Control Order which is based on international export control regimes Also when applying a refrigerator system to a cryocooler for optical senso...

Страница 2: ......

Страница 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Страница 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Страница 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Страница 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Страница 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

Страница 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 9: ...Equipments Required 4 1 4 2 Mounting the Cryopump to the Vacuum System 4 3 4 3 Connecting Roughing Pump 4 5 4 4 Connecting Purge Gas Line 4 5 4 5 Connecting Exhaust Pipe 4 6 4 6 Connecting Cooling Wa...

Страница 10: ...nd Storage 7 1 Disconnecting Flexible Hose 7 1 7 2 Storage 7 2 SECTION 8 Maintenance 8 1 Scheduled and Unscheduled Maintenance 8 1 8 2 Consumables 8 3 8 3 Cleaning the Cryopump 8 4 8 4 Charging Helium...

Страница 11: ...harging Adapter 8 9 8 4 Cryopump Decontamination Procedures 1 8 10 8 5 Cryopump Decontamination Procedures 2 8 12 8 6 Connecting Flexible Hoses 8 13 D 1 Vapor Pressure of Various Kinds of Gas D 2 E 1...

Страница 12: ...nts ULVAC CRYOGENICS INCORPORATED 8 3 CRYO U 8H U 8HSP U 8H U U 8HL Consumables 8 3 8 4 CRYO U 10PU U 10H U 10HL Consumables 8 3 A 1 Cryopump Fault Diagnosis A 2 A 2 Operating Log A 7 F 1 Dew Point Te...

Страница 13: ...ing of the pressure relief valve is set to 10 20kPaG and the valve opens when the internal pressure exceeds this Therefore please do not close the outlet of the pressure relief valve not strengthen th...

Страница 14: ...e or the substrate dissociates into hydrogen and oxygen in plasma Those gases may be also discharged in large amounts from some evaporants or sputtering targets Oxygen is one of the gases which increa...

Страница 15: ...H6 2 NH3 CH4 C2H6 C3H8 C H 2 016 28 01 34 08 32 14 77 94 34 00 27 67 17 03 16 04 30 07 44 10 28 05 0 070 0 970 1 190 1 107 2 692 1 146 0 955 0 590 0 555 1 040 1 550 0 978 20 3 81 7 213 6 161 2 210 7 1...

Страница 16: ...the inner kits might occur depending on the kind or amount of the process gases and note that when the part s needs to be exchanged due to corrosion part replacement is considered as fare paying serv...

Страница 17: ...xture of oxygen and flammable gas into the cryopump In particular the mixture of oxygen and hydrogen which has a broad range of combustion detonation is extremely dangerous The mixes gas with hydrogen...

Страница 18: ...or combustion enhancing gas When regenerating the cryopump after pumping flammable explosive or combustion enhancing gas those gases must be safely vaporized again and exhausted Following safety measu...

Страница 19: ...lease fix up the purge flow rate the dilution flow rate and regeneration time period which related with the pumping capacity of flammable gas and take measures required before starting the cryopump op...

Страница 20: ...p the cryopump without inspecting the state of the pump just after power failure As mentioned in the above reduce the concentration of hazardous gases in the pump and exhaust line by adding inert gas...

Страница 21: ...may rupture at weak portion If the cryopump is used to pump corrosive gases periodic pressure proof test is recommended ULVAC CRYOGENICS INC executes the pressure proof test of the cylinder by increa...

Страница 22: ...to R50 series the required torque is 6 9N m 70kgf cm On the other hand as for cylinder bolts M6 6pcs used in the refrigerators of R80 series it is 11 6N m 118kgf cm 3 Fill the refrigerator with the h...

Страница 23: ...ssure gas might cause another trouble that the system would stop by hitting the high pressure switch in the compressor unit Do not charge the refrigerator with helium gas exceeding the regulated value...

Страница 24: ...This page intentionally left blank S 12 ULVAC CRYOGENICS INCORPORATED...

Страница 25: ...onal and local laws and regulations We provide Safety Data Sheet SDS of our products upon your request Please contact us if necessary WARNING The cryopumps or cryocoolers may contain residue of hazard...

Страница 26: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 27: ...ogenic temperature surface Because the cryopump has a big pumping speed in the large pressure range to almost all gas it can make a pure high ultra high vacuum easily The system has adopted a two stag...

Страница 28: ...nit for multiple connections 3 C30MVR C30MVRT C40R Helium gas supply and return connectors 1 2 self sealing couplings Mounting orientation Can be installed in any orientation 4 1 Shows the cool down t...

Страница 29: ...gas Depending on the ambient temperature and humidity dew condensation may form on an operating cryopump as the surface of the pump case becomes cooler than the dew point Refer to Appendix F Dew Poin...

Страница 30: ...act the nearest Customer Support Center rts such as a thermometer and an accessory flange may be st UVG flange is equivalent to VG of JIS st UFC203 and UFC253 flanges are f CRYO U 6H UVG 150 UFC203 an...

Страница 31: ...INCORPORATED 1 5 Unit mm Figure 1 2 External Drawing of CRYO U Cryopump Continued CRYO U 8HSP CRYO U 8H U UVG 200 6B ANSI 337 8 337 8 523 7 523 7 300 279 203 2 203 2 UVG 200 6B ANSI UFC253 300 279 25...

Страница 32: ...300 279 253 2 203 2 203 2 216 3 U10H U10PU UVG 250 UFC306 ICF305 ICF305 UVG 250 UFC306 214 214 4 214 21 200 200 600 600 600 600 600 600 350 306 5 0 305 30 35 306 267 4 267 4 4 267 4 267 267 4 267 4 F...

Страница 33: ...CRYO U Cryopump Instruction Manual ULVAC CRYOGENICS INCORPORATED 1 7 Unit mm CRYO U 10HL G UV 250 200 644 6 350 267 4 Figure 1 2 External Drawing of CRYO U Cryopump Continued 125 328 450 77 77 Option...

Страница 34: ...RYO U 6H Inner kits 80K shield Pump case Pressure relief valve 80K baffle Refrigerator unit Helium gas return connector 15K cryopanel 1 1st stage Helium gas supply connector C 15K cryopanel 2 MBS C CR...

Страница 35: ...d Pump case Pressure relief valve connector 15 el 1 a nector n panel ctor ry YO METER 80K baffle Refrigerator unit Helium gas return K cryopan 1st st ge Helium gas supply con Condensatio 2nd stage Ref...

Страница 36: ...Cryopump Description 1 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 37: ...is instruction manual Instruction manual of optional devices for cryopump 3 Instruction manual of compressor unit Instruction manual of optional devices for control system 1 each 1 Input Power Cable R...

Страница 38: ...gain until the time of installation 3 Notice to Hydrogen Vapor Pressure Gauge users Make sure that the charge pressure shows 0 35 0 02 MPaG at room temperature The pressure depends on the room tempera...

Страница 39: ...the vacuum system Connect the roughing system regeneration gas purge unit and exhaust duct line to the cryopump Connect the cooling water piping to the compressor unit Connect the cryopump to the comp...

Страница 40: ...lowings a Filling pressure in the compressor unit b Temperature and flow rate of cooling water c Flow rates of purge gas and dilution gas if supply lines for those gases are required for regeneration...

Страница 41: ...opump to 1Pa or less is recommended Roughing valve Used to isolate the cryopump from the roughing pump during cryopump operation Vacuum gauge for rough pumping Used to measure the pressure during roug...

Страница 42: ...thermometer according to the model of your cryopump PiG1 CRYOPUMP PIRANI GAUGE IG1 CRYOPUMP IONIZATION GAUGE PiG2 VACUUM CHAMBER PIRANI GAUGE IG2 VACUUM CHAMBER IONIZATION GAUGE PiG3 ROUGHING PUMP PI...

Страница 43: ...n the mounting position see Table 1 1 in Section 1 2 If the chamber has any heat source install cryopump not to face directly to the heat source Refer to Figure 4 2 for the recommended mounting locati...

Страница 44: ...Installation 4 4 ULVAC CRYOGENICS INCORPORATED 360 68 250 R250 This shows the minimal maintenance space required for a refrigerator unit Figure 4 3 Maintenance Space...

Страница 45: ...cryopump Please design and construct the flow pathway of the purge gas carefully to ensure the required flow rate In case of using our optional Regeneration Gas Purge PR Unit 2 3 not applicable for a...

Страница 46: ...Connecting Exhaust Pipe Toxic corrosive flammable or explosive gases has to be vented to a safe place through exhaust pipe Be sure to connect an exhaust pipe to the cryopump pressure relief valve als...

Страница 47: ...Read the handling notes in appendix B about the connection of the flexible hoses When connecting flexible hoses always use two single open end spanners with width across flat 26mm and 30mm Do not for...

Страница 48: ...ting Remote Wiring For remote operation a remote wiring is necessary Please read the compressor unit instruction manual for the electric machine design specification concerning the remote operation 4...

Страница 49: ...coupling by hand Tighten the self sealing coupling using two wrenches until the fittings are firmly sealed When using torque wrench the recommended torque value is 20N m Figure 4 5 Connecting Flexible...

Страница 50: ...Installation 4 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 51: ...roughing valves RV1 RV2 are closed The helium gas pressure gauge on the compressor unit shows the specified value It is recommended to carry out daily check and keep an operating log to notice the fir...

Страница 52: ...he stable state the rubbed sound becomes small Oppositely the inhalation sound and the exhalation sound of helium gas like choo choo become loud When the 15K cryopanel is cooled to 20K or lower and th...

Страница 53: ...table of the thermocouple electromotive force If a cryopump is cooled down at higher vacuum pressure for a long time the cryopump case may dew It may cause short circuit if an electrical device is pu...

Страница 54: ...and surrounding safety 5 6 Crossover Crossover pressure refers to the roug ssure of a vacuum chamber immediately before opening the main valve to switch to cryopump after roughing the vacuum chamber...

Страница 55: ...ryopanel tem CRYO U6H 13300 CRYO SP U8H U U8HL U8H U8H 20000 CRYO U U10HL 10PU U10H 26600 Example W ed and the vacuum chamber volume is 100L the maximum allowa ed as follows For Your Informati stored...

Страница 56: ...e After stopping the cryopump operation proceed with warm up and rough pumping which are parts of regeneration process in order to maintain the cryopump in a clean vacuum Refer to Clause 3 Proceed wit...

Страница 57: ...he cryopump in a clean vacuum Refer to Clause 3 Proceed with regeneration right after the cryopump stops in the Safety section Do not block the pressure relief valve Be careful of a burn when using a...

Страница 58: ...shown in Table 1 1 When the cryopump can not maintain the original performance Note For and above temperature indicator s is are required 6 3 Warm up Method There are three methods for warm up Unassi...

Страница 59: ...ON OFF by its thermostat setting Please refer to the instruction manual of each heater that you use for more information When using an inner heater make sure to control the temperature with our CRYO...

Страница 60: ...p If the pressure buildup value stayed less than 6 5Pa for five minutes the check is completed If it increased 6 5Pa or more in five minutes repeat the rough pumping procedures to 40 Pa and the pressu...

Страница 61: ...ed refer to Paragraph 6 Regeneration after pumping flammable explosive or combustion enhancing gas in the Safety section The amount of gas captured in the cryopump depends on your process Set up the t...

Страница 62: ...e the regeneration process is completed When the main valve is not a reverse pressure compatible valve start regeneration of the cryopump after returning the vacuum chamber to atmospheric pressure so...

Страница 63: ...gas is amassed by the cryopump the inner pressure of the cryopump may become higher than atmospheric pressure during warm up process in the regeneration because most captured gas evaporates for a sho...

Страница 64: ...Regeneration 6 8 ULVAC CRYOGENICS INCORPORATED This page intentioanlly left blank...

Страница 65: ...een w om temperature disconnect the flexible hoses armed up to ro If removing the flexible hoses before the refrigerator reaches room temperature helium gas shut up into the refrigerator increases pre...

Страница 66: ...sorb moisture in the atmosphere and result in performance degradation Loosen the nut with a spanner Hold with a spanner CAUTION If the cryopump is stored in the state attached to your vacuum system th...

Страница 67: ...ing base to the floor not to move around 6 Cryopumps should be kept away from direct sun light high temperature humidity dust vibration radiation wind and rain Shipment of the cryopump Put all covers...

Страница 68: ...Disconnection and Storage 7 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 69: ...Replacement of the compressor adsorber Unscheduled Maintenance Cleaning the cryopump Adding helium gas Decontamination of the helium gas line Calibration of cryometer Following items and helium gas a...

Страница 70: ...xhaust gas U Calibration of cryometer MBS C Cryometer At fault Use the paid calibration service Refrigerator unit R10 R10R R10RT RM10 RM10T S S S S Seal kit replacement Driver assembly Replacement Mot...

Страница 71: ...S568 172 Gasket UFC253G Accessory flange C type O ring AS568 020 Accessory flange UFC034 Gasket UFC034G Refrigerator flange O ring V100 Metal O ring Pressure relief valve O ring N5 Roughing port U 8HL...

Страница 72: ...shield and the 80K baffle at the same time ormance of the Cleaning of Inner kit Especially the 80K baffle tends to get contaminated most Perform the 80K baffle cleaning as follows 1 Remove the cryopu...

Страница 73: ...artridge type have a possibility of deterioration of nonconductivity with age Be sure to install a ground fault circuit interrupter and conduct periodic inspections of the nonconductivity to prevent a...

Страница 74: ...nel of the compressor unit WARNIN Connect the helium charging hose as follows Connect the charging hose to the regulator Loosely connect the charging hose to the charge inlet on the compressor unit so...

Страница 75: ...more than the prescribed pressure of 1 9MPaG or more the pressure relief valve on the refrigerator may be going to work Therefore charge helium gas slowly so that the pressure relief valve should not...

Страница 76: ...Turn on the cryopump system refrigerator unit and keep running for three to four hours NOTE Since all impurities in the helium gas are condensed and solidified within the refrigerator during operation...

Страница 77: ...m cryostatic temperature gradually and the inner pressure rises at the same time The unit has a pressure relief valve which opens at the inner pressure of 1 9MpaG and more If once the pressure relief...

Страница 78: ...orten the warm up time Before proceeding to next make sure that the 15K cryopanel has reached room temperature Connect the helium bottle and the regulator Replace the air remained between the helium b...

Страница 79: ...drypump is 0 01MPaG CAUTION Make sure to open the valve slowly when exhausting the gas beyond the atmospheric pressure in order to maintain the pressure of the pump head below an allowable value If yo...

Страница 80: ...refrigerator unit and the flexible hose up to the static charge pressure of the compressor unit Remove both SUPPLY and RETURN flexible hoses from the charging adopter Make sure that the flat rubber g...

Страница 81: ...it indicates the specified pressure indicated on the front panel If not charge helium gas to the charging port of a compressor unit or adjust the pressure by releasing helium gas Restart the cryopump...

Страница 82: ...Maintenance 8 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 83: ...wn of the refrigerator the rise in temperature or pressure will rapidly occur in minutes or hours 2 80K shield and 15K cryopanel contaminated Thermal load increases Temperature rises Pressure rises In...

Страница 84: ...lean the inner kit or replace it with a new one 4 There is a leakage in the cryopump or the vacuum system Find and stop the leak Neither the compressor unit nor the cryopump start Consult the instruct...

Страница 85: ...asured values with S N of the refrigerator unit The cryopump fails to cool down to 20K or lower at the time of startup 1 Helium Supply Return line incorrectly connected Self sealing coupling is not fu...

Страница 86: ...Purge helium with dry nitrogen gas to reduce the partial pressure of helium 4 Leakage Air to vacuum leakage at attaching parts or ports on the cryopump Helium leakage caused by the slack of helium ga...

Страница 87: ...he nearest CS center 7 Performance of 15K cryopanel is deteriorated Excessive water vapor adsorption Since the roughing valve was accidentally opened in the cold condition of the cryopump the panel ha...

Страница 88: ...confirm that the pressure buildup speed from 40Pa is 1 3Pa min or less 2 Leakage in vacuum system Detect and stop the leakage Refrigerator drive motor is making irregular or intermittent motion 1 Hel...

Страница 89: ...SOR S N REFRIGERATOR S N Measuring condition Compressor unit Cryopump Remarks Temperature Pressure Date Time Measurer Room temp Humidity ETM High pressure helium gas MPaG Current Cooling water flow ra...

Страница 90: ...Troubleshooting A 8 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 91: ...ecting 20N m It is fastened and crowded until self seal coupling stops turning Connection 1 2B self sealing coupling Precaution in Handling When carrying the flexible hose hold the braid support of th...

Страница 92: ...Flexible Hose B 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 93: ...Manual MA0C001E 2010 01 ULVAC CRYOGENICS INCORPORATED C 1 Appendix C CONVERSION OF THERMOMETER READINGS K CA Thermocouple Electromotive Force Temperature K E M F mV 300 250 200 150 100 50 1 0 1 2 3 4...

Страница 94: ...dicated value of the hydrogen vapor pressure gauge changes depending on the atmospheric pressure of the altitude A true temperature can be read by applying the vapor pressure calculated by the followi...

Страница 95: ...lled on the cryo surface Since the cryopump evacuates gas as stated above by condensing or absorbing the gas on the cryo surface evacuated gas is accumulated on the cryo surface In the case of condens...

Страница 96: ...INCORPORATED Temperature K R E Honing and H O Hook RCA Review Sept 1960 Figure D 1 Vapor Pressure of Various Kinds of Gas 10 11 0 20 50 100 130 150 200 Vapor Pressure Pa He H2 Ne N2 CO O2 Ar CH4 CO2 C...

Страница 97: ...igh pressure helium gas in the expansion chamber is exhaled toward the low pressure part of the compressor unit with the differential pressure During this process the pressure and temperature of the h...

Страница 98: ...ure valve is closed and the high pressure valve is opened a The compressed helium is introduced into the warm end and the cold end the expansion chamber of the cylinder Pressure inside the cylinder in...

Страница 99: ...ure with two stages is adopted in order to gain cryogenic temperature of 15K or less as shown in Figure E 3 In order to simplify structure the regenerator is built into the inside of the displacer and...

Страница 100: ...re E 3 Two stage Refrigerator Compressor Low pressure High pressure Valve close Room temp a b Open Regenerator Cylinder Displacer Expansion chamber low temp 1 cycle c d High pressure Low pressure Seal...

Страница 101: ...Table on the next page 2 Residual moisture inside is frozen due to insufficient regeneration Perform the regeneration work again confirm that the cryopump passes the pressure buildup check and start c...

Страница 102: ...7 3 3 6 5 9 2 11 5 13 5 14 3 15 3 18 5 3 0 2 4 2 7 4 10 1 12 4 14 5 15 2 16 3 19 4 5 1 0 5 1 8 4 11 1 13 4 15 5 16 3 17 3 20 3 6 1 9 6 0 9 3 12 0 14 4 16 4 17 2 18 3 21 2 8 2 8 6 9 10 2 12 9 15 3 17...

Страница 103: ...397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA I...

Страница 104: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 105: ...ised Figure 1 3 Major Components The figure for CRYO U 8HL U10HL has been revised Section 5 3 Pressure Buildup Test has been revised SERVICE NETWORK has been revised Safety Instructions P S 7 1 Safety...

Страница 106: ...8H U 8HSP U 8H U U 8HL Consumables O ring for U 8HL roughing port has been added Table A 1 CRYOPUMP Fault Diagnosis has been revised Yokkaichi CS contact information has been changed Cover Export con...

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