Ulvac C15T, Инструкция по эксплуатации

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Installation
3-8
ULVAC CRYOGENICS INCORPORATED
◆
REMOTE WIRING :Set the REMOTE/LOCAL switch to
｢
REMOTE
｣
position.
Make the REMOTE wiring according to the circuit diagram shown in
Appendix B. Always use the momentary switch (contact) for setting
START/STOP push button switch (PB1, PB2) in remote operation.
◆
RESPONSE WIRING :Be sure to make wiring for RESPONSE signals. The relay
specification of response signals is shown in Appendix B.
2. Connect the refrigerator power cable from the compressor to the cryopump.
3. Connect the ground.
4. Connect the connector side of the input power cable to the compressor.
Connect the other side of the input power cable to the power source.
Note : If customer-supplied input power cable is used, be sure that it is equivalent to
UCI-supplied cable.
Table 3-2 Input Power Cable Specifications
Item Symbol
Specifications
Input power cable
INPUT
POWER
Copper wire / 600VAC, 3 conductors with ground
(*1)
1.25mm
2
(*1)
The color of the ground wire is green.
CRYOPUMP
FLEXIBLE HOSE(SUPPLY)
FLEXIBLE HOSE(RETURN)
REMOTE/RESPONSE
INPUT POWER
CABLE
COLD HEAD
POWER CABLE
Cooling water Inlet
Outlet
Figure 3-5 Compressor Installation