Ulvac C15T, Инструкция по эксплуатации

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Installation
3-4
ULVAC CRYOGENICS INCORPORATED
(*1) Water pressure drop (
Δ
P) refers to the differential pressure between cooling water
inlet and outlet.
(*2) Water flow rate should be below 6.0L/min to prevent corrosion of heat exchanger.
Figure 3-2 Cooling Water Requirement
A dashed arrow (
→
) in the above graph shows the water flow rate and pressure
(
Δ
P) required when the water temperature is 30°C. Water flow rate is 4.5L/min
and water pressure (
Δ
P) is 0.1MPa.
EXAMPLE
配管圧力
損失
水圧△
Ｐ（
*
1)
（ＭＰ
ａ）
温度
（℃）
0.17
0.2
0.1
0.04
0.11
0 1 2 3 4 5 6 7 8
0 1 2 3 4 5 6 7 8
冷却水
許容範囲
35
30
25
20
15
10
5
0
32
4.5
(*2)
冷却水流量 ( Ｌ／ min)
Allowable
operating range
P
res
s
ur
e dr
op
Δ
P
（
*1
）
（
M
Pa
）
T
emper
at
ur
e
(
°C
)
Flow rate (L/min)