LIST OF FIGURES
List of figures
Figure 2-1 Outline drawing of a Furnace System, model TS6804.......... 2-2
Figure 2-2 Round scavenger box layout (Diffusion) ............................... 2-5
Figure 2-3 Cooling unit ........................................................................... 2-5
Figure 2-4 Fast Cooldown principle........................................................ 2-6
Figure 2-5 Heating element for diffusion furnaces.................................. 2-8
Figure 2-6 Tube adaptors, support and radiation heat shield ............... 2-10
Figure 2-7 Zone paddle profiling thermocouple.................................... 2-11
Figure 2-8 Double spike thermocouple................................................. 2-11
Figure 4-1
:
Spike thermocouple .............................................................. 4-2
Figure 4-2
:
Tube adapter......................................................................... 4-2
Figure 4-3
: P
osition of the thermocouple ................................................. 4-5
Figure 5-1 The heating element adjustment............................................ 5-2
F
URNACE
R
EFERENCE
M
ANUAL
III