TABLE OF CONTENTS
Table of contents
1. Introduction .......................................................... 1-1
1.1
Scope of the manual ................................................................. 1-1
1.2
Furnace models ........................................................................ 1-1
2. Description ........................................................... 2-1
2.1
Diffusion system........................................................................ 2-1
2.2
Components of the furnace....................................................... 2-3
2.3
Furnace cabinet ........................................................................ 2-4
2.4
Scavenger................................................................................. 2-4
2.4.1
Available models........................................................ 2-4
2.4.2
Description of the Scavenger..................................... 2-4
2.5
Cooling unit............................................................................... 2-5
2.6
Fast Cooldown.......................................................................... 2-6
2.7
Heating elements (disposacore) ............................................... 2-7
2.7.1
Tube heating module ................................................. 2-7
2.7.2
Heating elements, tube adapters, isolation collars .... 2-8
2.8
Support and sealing ................................................................ 2-10
2.9
Furnace temperature control................................................... 2-11
3. Installation ............................................................ 3-1
3.1
Introduction ............................................................................... 3-1
3.2
Unpacking................................................................................. 3-1
3.3
Installation................................................................................. 3-2
3.4
The furnace............................................................................... 3-2
3.5
The scavenger .......................................................................... 3-3
3.6
Inspection ................................................................................. 3-3
4. Start-up ................................................................. 4-1
4.1
Introduction ............................................................................... 4-1
4.2
Start-up ..................................................................................... 4-1
4.3
Fast Cooldown.......................................................................... 4-3
4.4
Burn-in and Oxidation of an Heating element ........................... 4-3
F
URNACE
R
EFERENCE
M
ANUAL
I
