INSTALLATION
CAUTION
Do not turn on any of the services which are
connected. This may only be done in the presence of a
qualified engineer from Amtech/Tempress Systems,
unless prior permission gained from
Amtech/Tempress systems, in writing.
•
Final alignment and facility functionality will be checked by the Amtech/Tempress
Systems-engineer.
•
The Amtech/Tempress Systems engineer will do purging of all toxic gas lines.
3.5 The
scavenger
•
Scavenger
exhaust
(standard) duct has a 108 mm O.D. outlet (check for the right
O.D. the outline drawing). Therefore, install the stainless steel exhaust lines to the
exhaust system. They must meet the state and local regulations for treatment and
exhausting of the toxic, corrosive and pyrophoric gasses.
•
The exhaust rate should be around 100 l/min. (per tube level).
3.6 Inspection
•
Check for any parts that may have loosened or become free during transit (especially
the electrical connections and power leads), and check all components for damage.
•
Check if the tube switches on the furnace are "OFF".
•
Check for the correct voltage, on main power connection/label, attached close to the
main power terminals.
•
Check if the cabling is correctly connected.
DANGER OF LIFE
High voltage may cause serious injury or may be fatal. It is
essential that all safety guidelines will be followed when
working with high voltage equipment.
F
URNACE
R
EFERENCE
M
ANUAL
3-3
