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4.5 Installation of the Quartz Tube
Follow the procedure as described below for installing a Quartz Tube:
•
Unpack the quartz tube and inspect for any type of damage. If any damage is visible,
then... (for further information, see item 3.2).
•
Clean the quartz tube in a diluted solution of HF and de-ionized water concentration
(1% till 5% HF).
•
Place tube support in the heating element.
•
Place tube adapters at both sides of the furnace.
Figure 4-3
: P
osition of the thermocouple
•
Disconnect the clamp spring of the thermocouple. Withdraw the thermocouple.
Check at the inside of the heating element that when the process tube will be
installed, it won't touch any thermocouple at all.
•
Don't withdraw the thermocouples too far, so that the wires are bending too sharp.
These wires break very easily.
•
Slide the process tube very carefully inside the heating element, till the right position
has been achieved.
•
Place the radiation shield and the cover. After the radiation shield has been installed,
the quartz tube must be pressed firmly to the radiation shield.
F
URNACE
R
EFERENCE
M
ANUAL
4-5
