START-UP
•
For element oxidation, the outer ends of the heating element have to be closed by
using heat resistant insulating material, such as quartz wool (to be provided by the
customer).
Figure 4-1
:
Spike thermocouple
Figure 4-2
:
Tube adapter
•
Place the tube adapters on a level surface, with the large end down and pack with
quartz wool. Ensure it will not fall from the tube adapters when they are moved and
no foreign material has been incorporated in the quartz wool.
CAUTION
Tube adapters are used to prevent air movement between the
heating element and the process tube. Air movement may be
generated by differential pressures between the cleanroom and the
area outside the cleanroom. Temperature may be substantially
affected by any airflow past the thermocouple junctions.
•
Place the tube adapters in the front and in the rear of the heating elements.
•
Check if the electrical connections on the heating element are tight. Due to the high
currents in these cables, any loose connections may damage the control circuitry and
the element.
•
Check if the cabling is properly connected and check for the correct voltage.
•
Check if the terminal strip connections are tightened.
•
Check if the water supply and the scavenger exhaust are- connected according to the
outline drawing.
•
Check if all system power switches on the furnace are switched off.
•
If present, check if the EMO-switches operate correctly.
•
Turn on the ‘House Power Supply' to the furnace and check if the Phase voltages are
correct at the main power input connections.
•
If present, turn on the main power switch.
F
URNACE
R
EFERENCE
M
ANUAL
4-2