Maintenance
— 42
SPECTRO GENESIS FES 27 — 17.07.2019
6.9
Cleaning the Side-On Plasma Interface (SPI)
Notice – Damage to instrument!
The load coil is very sensitive.
Make sure not to hit the load coil when removing the SPI.
In order to clean the SPI, proceed as follows :
1.
Removing the SPI, see page 42.
2.
Clean the lens and the SPI, see page 43.
3.
Install the lens and the SPI, see page 44.
6.9.1
Removing the SPI
Warning! Hot surface!
The Plasma torch, plasma interface, and load coil may be very hot.
Let the components cool for 10–15 minutes before commencing work on
them.
In order to remove the components, proceed as follows:
1.
Switch off the plasma.
2.
Release the connections (1) on
the torch.
3.
Loosen and remove the clamp
(2) from the torch.
4.
Release the torch holder (3).
5.
Remove the Plasma torch.
6.
Switch the optical system to
1 L/min (software).
Fig. 14
3
1
2
