
-
29-
6.
LED indication
COM
ST
PWR(V)
LED
Status
Description
COM
Green flashing
(900 ms ON,
100 ms OFF)
Power supply for logic/input is present and IO-Link communication is active.
Green ON
Power supply for logic/input is present and IO-Link communication is inactive.
OFF
Power supply for logic/input is low (< approx. 16.8 VDC) or not present.
ST
OFF
Operating normally.
Red ON
One of the following may have occurred. (DeviceStatus : Failure)
・
Valve has a short circuit.
・
Pressure sensor has a short circuit.
・
Pressure sensor has a failure or a disconnection.
・
No connection or a disconnection between the SI Unit and vacuum manifold.
・
There is a firmware error.
Orange ON
One of the following may have occurred. (DeviceStatus : Maintenance-Required)
・
Power supply for logic/input is low. (< approx. 16.8 VDC)
・
The setting of Supply valve type parameter has a mismatch.
・
The setting of Pressure/Hysteresis parameter has a failure.
・
Valve protection function is operating.
Green flashing
(1 Hz)
A firmware update is being performed via IO-Link communications or the
firmware update has failed.
PWR(V)
Green ON
Power supply for output is present.
OFF
Power supply for output is not present.
Fig 6-1. LED indication