
-
24-
4.1.2.
UnitStatus
Table 4-6.UnitStatus
byte
bit
Content
Description
2
0
Valve short circuit
0 : No valves have a short circuit.
1 : At least one valve has a short circuit.
1
Pressure sensor short circuit
0 : No pressure sensors have a short circuit.
1 : At least one pressure sensor has a short circuit.
2
Pressure sensor
failure/disconnection
0 : No pressure sensors have a failure/disconnection.
1 : At least one pressure sensor has a failure/disconnection.
3
Manifold connection error
0 : Normal connection to vacuum manifold.
1 : Disconnection between vacuum manifold and the SI Unit.
4
Power supply diagnostics for
logic/input
0 : Power supply for logic/input is present.
1 : Power supply for logic/input is low. (< approx. 16.8 VDC)
5
Supply valve type setting
mismatch
0 : Supply valve type parameter setting is normal.
1 : The setting of Supply valve type parameter has a mismatch
on at least one CH.
6
Pressure/Hysteresis
parameter setting failure
0 : Pressure/Hysteresis parameter setting is normal.
1 : The setting of Pressure/Hysteresis parameter has a failure
on at least one CH.
7
Valve protection
0 : Valve protection function is not operating
1 : Valve protection function is operating on at least one CH.