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Appendix A

Material Properties

Material

Density

ZFactor

Material

Density

ZFactor

Aluminum

2.73

1.08

Magnesium Fluoride

3

1

Aluminum Oxide

3.97

1

Manganese

7.2

0.377

Antimony

6.62

0.768

Manganese Sulfide

3.99

0.94

Arsenic

5.73

0.966

Mercury

13.46

0.74

Barium

3.5

2.1

Molybdenum

10.2

0.257

Beryllium

1.85

0.543

Neodymium Fluoride

6.506

1

Bismuth

9.8

0.79

Neodymium Oxide

7.24

1

Bismuth Oxide

8.9

1

Nickel

8.91

0.331

Boron

2.54

0.389

Niobium

8.57

0.493

Cadmium

8.64

0.682

Niobium Oxide

4.47

1

Cadmium Selenium

5.81

1

Palladium

12

0.357

Cadmium Sulfide

4.83

1.02

Platinum

21.4

0.245

Cadmium Teluridium

5.85

0.98

Potassium Chloride

1.98

2.05

Calcium

1.55

2.62

Rhenium

21.04

0.15

Calcium Fluoride

3.18

0.775

Rhodium

12.41

0.21

Carbon Diamond

3.52

0.22

Samarium

7.54

0.89

Carbon Graphite

2.25

3.26

Scandium

3

0.91

Cerium Fluoride

6.16

1

Selenium

4.82

0.864

Cerium Oxide

7.13

1

Silicon

2.32

0.712

Chromium

7.2

0.305

Silicon Dioxide

2.2

1.07

Chromium Oxide

5.21

1

Silicon Oxide

2.13

0.87

Cobalt

8.71

0.343

Silver

10.5

0.529

Copper

8.93

0.437

Silver Bromide

6.47

1.18

Copper Sulfide

4.6

0.82

Silver Chloride

5.56

1.32

Copper Sulfide B

5.8

0.67

Sodium

0.97

4.8

Copper Sulfide A

5.6

0.69

Sodium Chloride

2.17

1.57

Dysprosium

8.54

0.6

Sulfur

2.07

2.29

Erbium

9.05

0.74

Tantalum

16.6

0.262

Gadolinium

7.89

0.67

Tantalum Oxide

8.2

0.3

Gallium

5.93

0.593

Tellurium

6.25

0.9

Gallium Arsenide

5.31

1.59

Terbium

8.27

0.66

Germanium

5.35

0.516

Thallium

11.85

1.55

Gold

19.3

.381

Thorium Fluoride

6.32

1

Hafnium

13.1

0.36

Tin

7.3

0.724

Hafnium Oxide

9.63

1

Titanium

4.5

0.628

Holnium

8.8

0.58

Titanium Oxide

4.9

1

Indium

7.3

0.841

Titanium Oxide IV

4.26

0.4

Indium Intimnide

5.76

0.769

Tungsten

19.3

0.163

Indium Oxide

7.18

1

Tungsten Carbide

15.6

0.151

Iridium

22.4

0.129

Uranium

18.7

0.238

Iron

7.86

0.349

Vanadium

5.96

0.53

Lanthanum

6.17

0.92

Ytterbium

6.98

1.13

Lanthanum Fluoride

5.94

1

Yttrium

4.34

0.835

Lanthanum Oxide

6.51

1

Yttrium Oxide

5.01

1

Lead

11.3

1.13

Zinc

7.04

0.514

Lead Sulfide

7.5

0.566

Zinc Oxide

5.61

0.556

Lithium

0.53

5.9

Zinc Selenide

5.26

0.722

Lithium Fluoride

2.64

0.774

Zinc Sulfide

4.09

0.775

Magnesium

1.74

1.61

Zirconium Oxide

5.6

1.001

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Содержание SAM-242

Страница 1: ...SQM 242 Quartz Crystal Card SAM 242 Analog Input Card SQM 242 CoDep Co Deposition Control Software User s Guide Version 2 03 Copyright Sigma Instruments Inc 1999 2004 Sigma instruments...

Страница 2: ...Safety Symbols WARNING Calls attention to a procedure practice or condition that could possibly cause bodily injury or death CAUTION Calls attention to a procedure practice or condition that could pos...

Страница 3: ...kmanship are not covered by this warranty NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE UNDER...

Страница 4: ...1 4 4 1 Operation 4 1 1 5 SAM 242 Card Connections 1 6 1 6 Digital I O 1 6 Chapter 5 LabView Demo Chapter 2 CoDep Program 5 0 Introduction 5 1 2 0 Introduction 2 1 2 1 Main Screen 2 1 Chapter 6 Inter...

Страница 5: ...your program with Windows DLL and Active X interfaces Sample Visual Basic and LabView programs with source code are included SQM 242 Deposition Control Card The sample SQM 242 CoDep software included...

Страница 6: ...SQM 242 Card 1 as long as the ribbon cable is not twisted red stripe on the top or bottom of both cards Once each card is jumpered 1 Turn off the computer unplug the power cord and remove the computer...

Страница 7: ...ures above carefully Note Occasionally it may be necessary to completely uninstall and reinstall a card Highlight the improperly installed card in Device Manager and press Delete Next run the Clean pr...

Страница 8: ...cillator The maximum length is 50 feet 15 meters To ensure proper operation of the SQM 242 use oscillators manufactured by Sigma Instruments PN 900 010 Oscillators made by Sycon and Maxtek should also...

Страница 9: ...care must be taken in connecting the SQM 242 card output to the input connector of your equipment Failure to understand and follow the equipment manufacturer s instructions can result in damage to the...

Страница 10: ...o observe this constraint can result in damage to your equipment and or the SAM 242 card Output Connection The SAM 242 outputs are identical to the SQM 242 See the previous section for hookup instruct...

Страница 11: ...led in your system For example with only one SQM 242 card installed the main display shows only two output frames Each output frame corresponds to a physical output on an SQM 242 card On the screen ab...

Страница 12: ...e Power Reading displays the current output power in Full Scale In Manual mode the Power Setpoint can be edited to manually adjust output power The option buttons control the function of each output A...

Страница 13: ...ttings or sending them to the SQM 242 card Update Saves the settings in the dialog box sends them to the SQM 242 card but does not and close the dialog box Input Selects the sensor s or analog input u...

Страница 14: ...le output voltage is a function of your power supply s input specifications Max Power The maximum output power allowed for an output in percent of full power This limits the maximum of Full Scale volt...

Страница 15: ...10V Output Full Scale establishes the measured value on the Input that will generate a Full Scale 10V output In the sample above a measured rate of 10A s will generate a 10V recorder output If you sel...

Страница 16: ...e main screen which may show the average of several sensors assigned to an output this screen displays raw input readings The size of the grid is adjusted to display only the components installed in y...

Страница 17: ...of any output control assignment Density The density of the material measured by this quartz sensor in grams per cubic centimeter Material density can be found in the appendix and numerous handbooks Z...

Страница 18: ...ensors halt deposition when their Thickness setpoint is reached Sensor 1 Controls Material 1 Rate Sensor 2 Controls Material 2 Rate Sensor 3 Monitors CoDeposited Material Often sensors are configured...

Страница 19: ...iated with the analog input in degrees F To leave the analog input display in Volts set Gain 1 and Offset 0 Gain The gain term for transforming voltage to measured units This is the m term in y mx b O...

Страница 20: ...e a crystal fail error Values 1MHz to 10MHz are permitted but 6MHz crystals are most common Min Max values are also used to calculate the Life remaining on the sensor screen For 6 MHz crystals set the...

Страница 21: ...ity Tooling and Z factor parameters then click Start to begin taking readings Since this is a monitor only program there are no settings for output control The Setup screen contains only monitor relat...

Страница 22: ...revision e g Card 1 2 00 is displayed then consult the card installation section of this manual Operation of the SQM 242 Multi program is very similar to SQM 242 CoDep Refer to the previous chapter fo...

Страница 23: ...pdown boxes First select the sensor to be zeroed then click Zero Map Sensors Assigns each sensor to an output If a sensor is assigned to Monitor then it displays rate and thickness but does not contri...

Страница 24: ...ired Note Before using the LabView demo it s best to familiarize yourself with operation of the SQM 242 CoDep program To run the demo click Load DLL Use Card and then set the Sensor and Output paramet...

Страница 25: ...his is an excellent option if you have an application that already communicates with a stand alone deposition controller via RS 232 The Utilities CD ROM contains a fully functional copy of the SQS 242...

Страница 26: ...card found Card Status 7 Firmware revision of SAM 242 card Sif142Init double Xfmax double Xfmin double Xinit double Period Initializes the measurement engine Should be called before readings are taken...

Страница 27: ...r s the parameter is for For example to set the sensor two of 0 to 23 place 100 in the lowest three bits Send 111 in the lowest three bits to set sensors 0 1 and 2 Density Sets the density of the mate...

Страница 28: ...indicating the output to place in PID control Sif142Loop2 double Rate double P double I double D long Output Sets the control loop parameters for an output The sensors specified in the Sif142MapSenso...

Страница 29: ...e Rate A S Thickness A and Frequency Hz Negative frequency values indicate a sensor error The OutputArray element is output power 0 to 1 If a 0 is returned from this function there are no new readings...

Страница 30: ...87 Cobalt 8 71 0 343 Silver 10 5 0 529 Copper 8 93 0 437 Silver Bromide 6 47 1 18 Copper Sulfide 4 6 0 82 Silver Chloride 5 56 1 32 Copper Sulfide B 5 8 0 67 Sodium 0 97 4 8 Copper Sulfide A 5 6 0 69...

Страница 31: ...al and sensor frequency change of Density of material D m 2 700 gm cm 3 Z Factor of material Z 1 00 Starting Frequency F q 6000000 Hz Ending Frequency F c 5999995 Hz Yields a Thickness in Angstroms of...

Страница 32: ...Vdc 20 kOhms 15 bits plus sign SQM 242 SAM 242 Outputs Number of Outputs Connector Output Voltage Source Impedance Resolution 2 non isolated 1 4 Dual Phone Jack 0 to 10VDdc 1 kOhms 15 bits plus sign S...

Страница 33: ...t Dimensions HxW Weight PCI 32 bit 5V 33MHz 6 Slave to SQM 242 ribbon cable 1 5 W max Windows 98 ME NT 2000 XP 0 to 80 RH non condensing 0 to 2 000 meters Indoor Use Only Class 1 Equipment Grounded Ty...

Страница 34: ...possibility that a noisy source or poor loop tuning is causing an unstable PID loop In the SQM 242 CoDep program select View Readings Since a QCM is basically a frequency counter we will use the meas...

Страница 35: ...t the sensor is not adequately cooled Incorrect Rate or Thickness Measurement First complete the procedures in the previous section to assure reliable sensor operation Set the crystal Tooling as descr...

Страница 36: ...resolution as shown below for material Density 1 Measurement Period Frequency Resolution Thickness Resolution Rate Resolution Rate Density 2 25 sec 11 Hz 16 A 64 A s 32 A s 50 055 08 16 08 1 0 028 04...

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