Chapter 2
SQM-242 CoDep
2-8
Tooling:
Adjusts for measured deposition rates that differ from the actual substrate
deposition rate. If the sensor sees only 50% of the substrate rate, set the value to 200.
This multiplies the sensor reading by 2.
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%
Monitor:
Monitor sensors halt deposition when their Thickness setpoint is reached.
Sensor 1 Controls
Material 1 Rate
Sensor 2 Controls
Material 2 Rate
Sensor 3 Monitors
CoDeposited Material
Often sensors are configured to tightly control the deposition rate of a material, such as
Sensor 1 & 2 above. However, you might also use a monitor sensor near the substrate,
to more accurately monitor the final thickness of the co-deposited material.
Setpoint:
The material thickness (in kA) measured by a monitor sensor that will halt
deposition.
