SevenStar CS100D MFC, Руководство пользователя

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Notes :
MFC/MFM is calibrated by N
2
as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem
— 273.15K ( 0
ºC );
Air Pressure
— 101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to
“mL/min, 0
ºC ,1atm
”, and the unit of SLM
is identical to
“L/min, 0
ºC ,1atm
”.
F.S. : Full Scale
1.6 Calibration Features
Normally, the MFC are calibrated close to customer’s requirement ( the requirement
should be accorded with the specification). Without customer’s information, the MFC are
calibrated under standard conditions.
1.6.1 Standard conditions
Without special conditions specified by the customer, the MFC is calibrated under the
following standard conditions:
Pressure Outlet: Atmospheric.
Normally gas mass flow rate is transferred to gas volume flow rate at standard state.
Mass flow rate unit:
SCCM
——
standard cubic centimeter per minute.
SLM
——
standard liter per minute.
Standard state
：
Temperature
——
0º C (273.15K)
Pressure
——
101325Pa (760mmHg)
At standard state, the gas density will be constant. The multiplication of density and
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume