SevenStar CS100D MFC, Руководство пользователя

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The used gas should be purified without dust
，
liquid and oil stain. If necessary, the
filter should be added to gas system for purification. If the outlet of MFC is connected to
liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC.
Attention :
For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure
that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the
controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to
purge the controller could cause a fire or explosion resulting in death.
4.2.2 Seal of Valves
The Solenoid Valve of MFC is only for adjustment, can not be used for shut-off.
Generally, shut-off valves should be added in upstream and downstream of MFC for
protection. Normally leakage of MFC valve is not more than 1% F.S.
SECTION 5 TROUBLESHOOTING
5.1 Initial Check
5.1.1 Check the gas supply pressure and check the flow-path to the MFC/MFM has been
opened.
5.1.2 Ensure that the power supply and command signals are correctly transmitted to the
D-connector pins and RS485.
5.1.3 Check that the output signal matches the external reading.
5.2 Troubleshooting
Use the following table to locate the fault.
SYMPTOMS Possible cause Action