SevenStar CS100D MFC, Руководство пользователя

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available.
g) Please use proper fittings and keep the rules.
All fittings of instrument must be matched according to the listing in manual. Please
read manual carefully before screwing tightly.
h) Please do leakage check.
Please check carefully all of vacuum parts and make sure that there is not leakage in
the system.
i) Please make sure that instrument is working under safe pressure.
Please make sure that the pressure of inlet gas is less than maximum working pressure
(referring to maximum working pressure in manual).
j) Please keep the whole system away from pollution.
When system running, do not use polluting gas, such as particle of dust, dirt, fibre,
glass or scrap iron.
k) Please do warm-up instrument before working.
Please do warm-up instrument, especially in using dangerous gas. Please close valve
completely to make sure that there is not error flow.
1.4 General
Mass flow controller (MFC) accurately measures and controls mass flow rates, which
is widely applied in the fields as: semiconductor and IC fabrication, special materials
science, chemical industry, petrolic industry, pharmaceutical industry, environmental
protecting and vacuum system researching, etc.. The typical applications include:
microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting,
micro-reaction equipment, mixing & matching gas system, capillary flow control system,
gas chromatograph and other analytical instruments.
The CS100D MFC/MFM are a latest generation MFC for use in semiconductor