SevenStar CS100D MFC Скачать руководство пользователя страница 26 | Manualshive

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SevenStar CS100D MFC Скачать руководство пользователя страница 26

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Appendix

Ⅰ

CS100 Selection Guide

CS100-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d]

[t]

–

Type

- [D] Metal type

[g,g,g]

–

Gas

Standard: SEMI52-0302
For example
-[ 013 ] N

2

-[ 007 ] H

2

-[ 000 ] Mixture Gases (please consult [d] for details)

[v]

–

Type of Valve

- [ C ] Normally closed (unavailable to MFM)
- [ N ] No Valve (available to MFM only)

[r,r,r,r]

–

Full Scale

- [ 010C]  10SCCM
- [ 020C]  20SCCM
- [ 030C]  30SCCM
- [ 050C]  50SCCM
- [ 100C]   100SCCM
- [ 200C]  200SCCM
- [ 300C]  300SCCM
- [ 500C]  500SCCM
- [ 001L]  1SLM
- [ 002L]  2SLM
- [ 003L]  3SLM
- [ 005L]  5SLM
- [ 010L]  10SLM
- [ 020L]  20SLM
- [ 030L]  30SLM
- [ 000C]

customized Full scale, please consult [d] for details

[d]

[a]

–

Electronic connector

- [ A ] DB9 pin (Analog,

±

15V)

- [ B ] DB15 pin (Analog,

±

15V)

- [ R ] DB9 pin (6 pin RJ11

，

Digital,

±

15V)

- [ D ] DB15 pin (6 pin RJ11

，

Digital, +24V)

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Содержание CS100D MFC

Страница 1: ...CS100D MFC MFM User s Manual July 2020...

Страница 2: ...2 2 Unpacking 7 3 12 LED 18 2 3 Mechanical Installation 8 SECTION 4 MAINTENANCE 2 3 1 General 8 4 1 General 18 2 3 2 Installation 10 4 2 Caution 18 2 3 2 1 1 4VCR Installation 10 SECTION 5 TROUBLESHOO...

Страница 3: ...licate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake...

Страница 4: ...ents or disassemble the instrument without any authorized and make sure that the label or and seal of product is not removed when returning for reworking recalibration and maintenance b Please contact...

Страница 5: ...do warm up instrument before working Please do warm up instrument especially in using dangerous gas Please close valve completely to make sure that there is not error flow 1 4 General Mass flow contro...

Страница 6: ...can be operated in analog mode In addition auto alarm change of operating gas and range available through the digital interface Customer Secondary Development of control and sample software is availab...

Страница 7: ...05 F S Span 0 1 F S Max Pressure 3MPa 10MPa Leak integrity 1 10 9 Pa m3 sec He 1 10 8 atm cc sec He Wetted Materials Metal maximum operating pressure 0 45MPa Operation Temperature 5 45 Input Signal A...

Страница 8: ...ion Without customer s information the MFC are calibrated under standard conditions 1 6 1 Standard conditions Without special conditions specified by the customer the MFC is calibrated under the follo...

Страница 9: ...n Adjustment Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench The accuracy the dynamic response the stability to pressure variations is double checke...

Страница 10: ...as trapped between the two devices can cause purge effects and consideration must be given to the sitting of the shutoff valve upstream or downstream in relation to the process sequencing It is recomm...

Страница 11: ...9 of 30 Figure 2 1 Product dimensio...

Страница 12: ...connector 2 3 2 Installation Place MFC according to the flow direction 2 3 2 1 1 4VCR Connection Refer to figure 2 2 and figure 2 3 Check the gland to gland space including the gaskets Remove the plas...

Страница 13: ...ck ferrule and nut Figure 2 4 Compression Fitting Connector Installation Attention When installing the fitting you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Comp...

Страница 14: ...9 pin male Sub D connector 15 pin male sub D connector RS485 connector 3 pin male O connector and 15 pin male D sub Digital 24V connector are shown in figure2 5 figure2 6 figure 2 7 figure 2 8 and fig...

Страница 15: ...b connector Figure 2 7 RS485 connector Figure 2 8 3 pin male O connector Figure 2 9 15 pin male D sub Digital 24V connector Sevenstar manufactures all standard cables RS485 adaptor customized cables a...

Страница 16: ...C for extremely corrosive gases purge MFC with a dry inert gas for one hour SECTION3 FUNCTIONS 3 1 General Based on new sensor driver technology zero balance technology and VCP technology CS100MFC MFM...

Страница 17: ...solve the MFC inaccurate problem which is caused by the connection of the customer ground connection incorrect or connection line is too long First of all adjust zero by the 3 3 way if MFC cannot be...

Страница 18: ...ee ways to interpret the analog signal of Valve Command For more information please refer to www mfcsevenstar cn Path Service Downloads Software download Communication Protocol 3 8 Valve Type CS100D M...

Страница 19: ...delivered by CS100MFC MFM The amount of purge will not be accumulated in the total flow amount For example the total reading is 3000 means the amount of gas delivered by MFC is 3000SCC For more infor...

Страница 20: ...be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding...

Страница 21: ...connecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death 4 2 2 Seal of Valves The Solenoid Valve of MFC is only for adjustment can not be used...

Страница 22: ...t Sevenstar PCB problems Contact Sevenstar Defective Mechanics Contact Sevenstar 3 MFC will not communicate with PC Power failure Check Power and pin position Cable problems Check cable and connector...

Страница 23: ...ipment incidents by fax phone or e mail as soon as possible after receipting the goods 6 2 3 During the warranty period products must only be repaired by authorized Sevenstar service centers Otherwise...

Страница 24: ...s specified in the user s manual 4 Pressure at the mass flow inlet must be regulated by an accurate pressure regulator to prevent gas flow oscillation C Electrical connection requirements are as follo...

Страница 25: ...ing Sevenstar Flow Co Ltd is not responsible to loss as following situation 1 Nature disaster and calamity 2 Unsuitable operation and unreasonable usage 3 Operating and storing in inappropriate or exe...

Страница 26: ...unavailable to MFM N No Valve available to MFM only r r r r Full Scale 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 002L 2SLM 003L 3SLM...

Страница 27: ...Differential Pressure 0 05 0 35 MPa 7 3 50 8 psid FLOW 10SLM 0 1 0 35 MPa 14 5 50 8 psid 10SLM FLOW 30SLM 0 2 5 0 45 MPa 29 0 65 3 psid 30SLM FLOW CS100D N Differential Pressure 0 02MPa CS100D Max inl...

Страница 28: ...etal type Gas N2 Type of Valve Normally closed Full range 500SCCM Electronic connector DB15 Fittings VCR 1 4 M Seal material Viton Mounting position Horizontal For example Customized requirement In Ch...

Страница 29: ...150 0 722 C2H2 042 0 4049 1 1620 0 596 C2H4 038 0 3658 1 2510 0 597 C2H6 054 0 4241 1 3420 0 482 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3H8 089 0 3990 1 9670 0 358 C4H6 093 0 3515...

Страница 30: ...0 2464 0 9000 1 431 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 978 NO2 026 0 1923 2 0520 0 737 N2O 027 0 2098 1 9640 0 710 O2 015 0 2196 1 4270 0 981 PCl3 193 0 1247 6 1270 0 358 PH3 031 0 26...

Страница 31: ...the gas N Structure factors of gas molecule See the following table Table Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N2 1 00 T...

Страница 32: ...wnload Address en mfcsevenstar com Please register first and then download software Note Please contact our people if you need disk to download software Email address is weidongxia sevenstar com cn or...

Страница 33: ...anghai Office Room 511 Building 29 No 368 Zhangjiang Road Pudong New District Shanghai Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 202 Section B No 1 Chuangjin No 125 Chuangye Erlu 28th...

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