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is programmed in millisecond but the MFC internally rounds up any value to 100ms. For
example, when the delay value is 200, MFC will delay 200ms then receiving the operate
command. When the set point is less than the min control rate, the valve will shut off, and
when larger than the min control rate, MFC will start after the set delay time.
Special default: Values from 1 to 49 ms will be programmed as 100ms. Delay applies
to digital and analog set-points.
3.7 Valve Command Mode
CS100D MFC/MFM are available for valve-close or valve-open by input digital
signal or analog voltage directly. The Valve Command Mode is used to select one of three
ways to interpret the analog signal of Valve Command. For more information, please refer
to www.mfcsevenstar.cn.
Path: Service >> Downloads>>Software download>>Communication Protocol .
3.8 Valve Type
CS100D MFC/MFM the type of valve: Normally closed(NC) . When MFC do not
have power supply, the “NC” type valve is closed and gas can not flow through. Please
mention the valve type when you order the MFC.
3.9 Multi-Gas and Multi-Flow
The multi-gas and multi-range technology has been developed in the CS100series
MFC/MFM. Customer can change gas convert factor, full scale of MFC via digital
interface. Full scale of CS100 series MFC/MFM can be re-ranged from 30% to 110%F.S.
For example, an MFC with 100SCCM full scale , the new full scale can be re-ranged
between from 30SCCM to 110SCCM.
CS100 MFC/MFM support customer offset by the target null value. The target null
Содержание CS100D MFC
Страница 1: ...CS100D MFC MFM User s Manual July 2020...
Страница 11: ...9 of 30 Figure 2 1 Product dimensio...