SevenStar CS100D MFC, Руководство пользователя

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2.5 Checking Before Operation
Before operating the MFC the following checks should be completed:
2.5.1 Check that tubing is leak free.
2.5.2 Check the process sequence and proper function of all other gas components
involved.
2.5.3 Check the voltage of command signals and power supply to the MFC/MFM.
2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure.
2.5.5 Allow the MFC to warm up for 20 minutes, and then check the zero level output.
2.5.6 Use dry inert gas for test runs.
2.5.7 Prior to using the MFC for extremely corrosive gases, purge MFC with a dry inert
gas for one hour.
SECTION3 FUNCTIONS
3.1 General
Based on new sensor driver technology, zero balance technology and VCP technology,
CS100MFC/MFM presents high performance and reliability. And more digital functions
are developed in CS100 products.
3.2 Control Mode
CS100 MFC/MFM are available for digital
，
0-5V voltage control mode and output.
When customer chooses one of the three control modes, the others will be screened. The
analog output will be available at all times. The flow output of the CS100 MFC/MFM will
be available through the RS485 interface, even in the analog control mode. The setting of
the CS100 MFC/MFM can be provided to the MFC through one of three sources, in digital