6
04-165 Diagram
The diagram below iden�fies the dimensions of the RBD 04
-
165 as well as its sec�ons. Please note
that
the
ver�cal
dimensions
reflect
04-165
when
op�onal
X-Y
aligner
(RBD
part
number IG2
EA) is not used.
Страница 1: ...IG2 Manual For Use With the 32 175 Control RBD Instruments Inc 2437 NE Twin Knolls Dr Suite 2 Bend OR 97701 541 330 0723 WWW RBDINSTRUMENTS COM...
Страница 2: ...nstall the 04 165 Ion Source Control 10 Remote Switching the Ion Beam 10 Opera ng the IG2 With the 32 175 Controller 11 32 175 Front Panel Controls and Meter 11 Ini al Out gassing of the 04 165 Ion So...
Страница 3: ...technical informa on and instruc ons provided in the included documenta on It is also expected that unless Operators have the skills and knowledge required by maintenance personnel Operators will not...
Страница 4: ...either express or implied including but not limited to implied warran es of merchantability and tness for a par cular purpose This limited warranty gives customer speci c legal rights Customer may hav...
Страница 5: ...uded from the Limited Warranty for the speci c product of which they are a part However each of these expendable items will have its own warranty and will be replaced or repaired in accordance with it...
Страница 6: ...ioniza on chamber and are then focused at the target with energies of up to 2K eV The impurity content of the ion beam is minimized by using an o axis lament geometry A focusing lens permits high ion...
Страница 7: ...The diagram below iden es the dimensions of the RBD 04 165 as well as its sec ons Please note that the ver cal dimensions re ect the 04 165 dimensions when the op onal X Y aligner RBD part number IG2...
Страница 8: ...ng conditions 32 175 Specifications Specification Description Input Power 120 or 230 VAC 47 63 Hz Single Phase Output Voltage 5 kV to 2 kV in 500 volt increments Ripple to Noise 30 mV peak to peak Foc...
Страница 9: ...for damage If there is any damage please report it to the shipping company immediately 3 Verify that you have the following items If any are missing please contact RBD Instruments at 541 330 0723 or...
Страница 10: ...f the pins on the 04 165 ion source b The lament pins A to B and B to C should show less than 1 ohm of resistance c All other pins should be open to each other d All pins should be open to ground the...
Страница 11: ...lowing switches and controls on the 32 175 Control front panel a Set the Beam Control switch to O b Set the Beam Voltage Select dial to 500 which is its lowest se ng c Turn the Focus Adjust dial arrow...
Страница 12: ...reduced by 50 NOTE Before outgassing the 04 165 ion source the vacuum chamber needs to be baked out to remove water vapor from the ion source If at any time during out gassing the emission meter start...
Страница 13: ...e then slowly increase the emission current knob un l there is 25 mA of emission current 5 Back ll the chamber with Argon to 5 to 6 X 10 5 Torr 6 Set the beam voltage knob to the desired accelera on v...
Страница 14: ...nches Note that the IG2 EAPR requires a large ID tube approximately 1 5 to work properly The IG2 EAPR ange which is tapped for six 28 moun ng bolts is mounted to the vacuum cham ber at the appropriate...
Страница 15: ...rr with an inert gas such as argon Positive ions are created by electron impact within the ion gun s ionization chamber The ions are then extracted from the ionization chamber accelerated through a fo...
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