rbd instruments IG2, Руководство пользователя, Страница: 2 / 18

1
Table of Contents
Safety No�ces
....................................................................................................................................
2
Limited Warranty ............................................................................................................................... 3
IG2 Introduc�on ................................................................................................................................. 3
RBD Model 04- 165 2 kV Backfill Ion Source ..................................................................................... 5
04- 165 Specifica�ons ...................................................................................................................... 5
04- 165 Diagram .............................................................................................................................. 6
RBD Model 32-175 2 kV Ion Source Control .................................................................................... 7
32-17 5 Specifica�ons ...................................................................................................................... 7
Unpacking the IG2 ............................................................................................................................ 8
Se�ng Up the IG2
.............................................................................................................................
9
Install the 04 -165 Ion Source .......................................................................................................... 9
Install the 04-165 Ion Source Control ........................................................................................... 10
Remote Switching the Ion Beam .................................................................................................. 10
Opera�ng the IG2 With the 32 -175 Controller ............................................................................... 11
32- 175 Front Panel Controls and Meter ....................................................................................... 11
Ini�al Out - gassing of the 04 -165 Ion Source ................................................................................ 12
Opera�on of the 32 - 175 Control and 04 -165 Ion Source ............................................................. 12
Remote Switching of the Ion Beam .............................................................................................. 12
Using the 04-165 with a PHI 20-045 Control .................................................................................. 13
Using the 32-175 with a PHI 04-161 or PHI 04-162 Ion Source
......................................................
13
IG2-EAPR Equipment Aligner .......................................................................................................... 13
Principles of Opera�on .................................................................................................................... 14
Appendix – Cable Diagrams ............................................................................................................ 14