10
2.
Remove
the
blank
flange
from
the
vacuum
chamber
port into
which
you
are
installing
the
ion
source.
3.
Insert
a new
copper gasket between
the ion source and the flange
.
4.
Tighten
the
ion source
flange
using
the
appropriate
hardware
.
5.
Bake the system at 150° C to 200° C for 4 to 8 hours. You may use heat tape to bake only the 04
-
165.
Install the 32-175 Ion Source Control
1.
Mount
the 32
-
175 Control in a 19" electronics rack
or use on a desktop
(ensure power cable is
disconnected and power switch is off)
.
2.
Connect the 04
-
165 Ion Source to the 32
-
175 Control using the IG2
-
CA1 cable.
3.
C
onnect the AC power cord (120 VAC OR 230 VAC)
to the 32
-
175 and then plug the AC power
cord into the power outlet.
DO NOT TURN ON THE POWER to the 32-
175 at this �me
.*
4.
Set the following switches and controls on the 32
-
175 Control front panel:
a.
Set the Beam Control switch to Off.
b.
Set the Beam Voltage Select dial to 500, which is its lowest se�ng.
c.
Turn the Focus Adjust dial arrow to center (straight up).
d.
Turn the Filament Adjust dial fully counterclockwise
(set to 0).
5.
On the 32
-
175 Control back panel, set the Filament Select Switch (labeled F1 and F2) to the F1
posi�on.
6.
The IG2 is now ready for use.
*
It is recommended that the AC power to the 32-175 is interlocked to your ion gauge so that
the 32-175 cannot be turned on if your vacuum chamber is up to air.
Remote Switching of the Ion Beam
If you want to use a computer to control the ion gun beam remotely, you need to connect a TTL
level BNC cable to the Remote connector on the back of the 32
-175. A
TTL
low
turns the beam volt
-
age
ON
,
and
a
TTL
high
will turn
the
beam
voltage
OFF
.
The
Remote
signal
only
turns the beam
voltage on and off. The filament is controlled independently.