Primes FocusMonitor FM+, Руководство по эксплуатации

Страница: 27 / 56

FocusMonitor FM+
35,0(6
27 Revision 03/2019 EN
CAUTION
Risk of crushing
Unlike the housing, the measuring head of the FocusMonitor FM+ can move along the z- and
y-axis.
X
Do not reach into the movement range of the measuring head.
11.2 Configure FocusMonitor FM+
1. Based on Tab. 18.1 on page 47, check whether the installed measuring tip is suitable for your measur-
ing task. You will find instructions for switching out measuring tips in chapter 18.5 on page 52.
2. Based on Tab. 18.2 on page 47, check whether the installed detector is suitable for your measuring
task. You will find instructions for switching out detectors in chapter 18.6 on page 54.
3. Determine the necessary revolution speed of the measuring tip, taking into account the permissible
power density based on Tab. 18.4 on page 49 or Tab. 18.6 on page 51.
NOTICE
Damage/Destruction of the measuring tip
In case of very high power densities (CO
2
> 15 – 30 MW/cm²; NIR > 8 – 10 MW/cm²), plasma
may be ignited on the surface of the measuring tip. This could destroy the measuring tip.
X
Increase the speed according to the Tab. 18.4 on page 49 or Tab. 18.6 on page 51 and
purge it with inert gas, if necessary.