PRECITEC CHRocodile C, Руководство по эксплуатации

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(3) See section 2.9: CHRocodile C performance Specifications.
(4) Resolution / Repeatability is given for optimal conditions (with a high intensity signal).
2.8.2 Optical probes characteristics
Optical probe
Specifications
Probe 200µm Probe 1mm Probe 4mm Probe 10mm
DISTANC
E
M
O
DE
Measuring range
(1)
200µm 1mm 4mm 10mm
Axial resolution /
Repeatability (R
min
) (4)(5)(6)
8nm 30nm 120nm 300nm
Accuracy (4) (5) 50nm 200nm 0.8µm 2µm
THICKN
ESS
M
O
DE
Min. measurable
thickness
(4) (7)
8µm 40µm 160µm 400µm
Max. measurable
thickness
(4) (7)
300µm 1.5mm 6mm 15mm
Axial resolution /
Repeatability
(4)
20nm 75nm 300nm 750nm
G
LOB
AL
SPEC
IF
ICATION
S
Working distance (1) (2)
4.7mm +/- 0.3mm 15.7mm +/- 0.5mm 36.7mm +/- 0.7mm 68.7mm +/- 1mm
Spot diameter
(1)
3.4µm 5µm 8µm 16µm
Lateral resolution 1.7µm 2.5µm 4µm 8µm
Max object slope (1) (3) +/- 45deg +/- 28deg +/- 20deg +/- 14deg
M
ECH
AN
ICAL
DIM
ENSIO
NS
Length
17mm
(8)
23.7mm
(8)
26.6mm
(8)
35.3mm
(8)
Diameter 28mm (8) 28mm (8) 33.8mm (8) 40mm (8)
Weight 33g 30g 44g 50g
Table 2.7: Optical Head Specifications
(1) See section 2.9: Optical probe specifications definitions
(2) Bottom of the optical probe to middle of the measuring range
(3) Decreasing accuracy on the limits
(4) See section 2.10: CHRocodile C performance Specifications
(5) Measurement on perpendicular mirror at 20°C with optimal Signal to Noise ratio.
(6) Axial Resolution varies with intensity signal in %. Axial Resolution = 10 x R
min
x I
-0.5
(7) Refractive index n=1.5
(8) See Fig A2-1: Optical probes mechanical plan
(9) See Fig A2-2: CHRocodile C unit mechanical plan