
Flow Sensor
Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instructions for flow controller" from page 24 through 35.
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5
C
onstruction
No,
Parts
Material
⑧
Resin body
PA
⑨
Sensor chip
Semiconductor chip
⑩
Rectifier plate
stainless steel
⑪
Port filter
stainless steel
⑫
Sensor substrate
Alumina
⑬
Circuit board
−
⑭
Case
ABS
①
②
③
■
No needle valve model
④
⑤
⑥
⑦
⑧
⑨
⑩
⑪
⑫
⑬
⑭
*.
Parts materials are subject to change without notice.
■
Built-in needle valve model
No,
Parts
Material
①
LCD cover
Acryl resin
②
LCD
−
③
Switch
EPDM
④
Circuit board spacer
PC
⑤
Module holder
PA
⑥
Quick-Fitting Joint
−
⑦
Sensor gasket
FKM
①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩
⑪
⑫
⑬
⑭
⑮
Sensor section*1
No,
Parts
Material
⑨
Fitting fixing pin
stainless steel
⑩
Needle valve body
PA
⑪
Port filter
stainless steel
⑫
O-ring
FKM
⑬
Orifice
nickel-plated brass
(
*3)
⑭
Fitting fixing pin
stainless steel
⑮
O-ring
FKM (fluororesin coating)
No,
Parts
Material
①
Knob
PBT
②
Lock nut
nickel-plated brass
③
Needle guide
nickel-plated brass
④
Needle
nickel-plated brass
(
*2)
⑤
Fixing pin
stainless steel
⑥
O-ring
FKM
⑦
O-ring
FKM
⑧
Cartridge fitting
−
*1. Please refer to construction of no needle valve model for the main sensor parts.
*2. Stainless steel for FUS20…005/010/020
*3. PTFE for FUS20…005/010/020