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Zentrale/Headquarters

Pfeiffer Vacuum GmbH

Emmeliusstrasse 33
D-35614 Asslar

Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
Internet:
http://www.pfeiffer-vacuum.de

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, 
tel30 / 1 674 8973
t30 / 1 674 8978

India

Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009, 
tel91 / 40 775 0014, t91 / 40 775 7774

Israel

ODEM Scientific Applications,
2 Bergman Street, Science based park
Rehovod
tel972 8 9366 101,
t972 8 9366 102

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44  I-20017 RHO (Milano)
tel39 / 2 93 99 051, t39 / 2 93 99 05 33

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
tel81 / 3 32 258 910
t81 / 3 32 259 009

Korea

Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
tel82 / 2 3461 0671/5
t82 / 2 3461 0676

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
tel31 / 30 6666050, t31 / 30 6662794

Peru

Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores,
tel51 / 1 445 8178
t51 / 1 445-1931

Poland

Softrade Sp.z.o.o, ul. Grunwaldzka 391,
PL-60-173 Poznan, tel48 / 61 8677 168,
t48 / 61 8677 111

Portugal

Unilaser Lda, Taguspark
Núcleo Central, sala n

o

268, Estrada Cacém-

Porto Salvo, P-2780 Oeiras
tel351 / 1 421 7733
t351 / 1 421 7744

Singapore

APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
tel65 / 268 2024, t65 / 268 6621

Spain

Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
tel34 / 91 804 11 34,
t34 / 91 804 30 91

Sweden

Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
S-194 61 Upplands Väsby
tel46 / 590 748 10
t46 / 590 748 88

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
tel41 / 1 444 2255,
t41 / 1 444 2266

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
tel27 / 11 315 5434
t27 / 11 315 5882

Taiwan

HAKUTO Taiwan Ltd. Hsinchu office No. 103, 
Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
tel886 / 3 554 1020 
t886 / 3 554 0867

Thailand

S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110 
tel662 / 259 4623 
t662 / 259 6243

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
tel1/ 603 578 6500
t1/ 603 578 6550

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
tel58 / 2 573 8687
t58 / 2 573 1932

Other countries

AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
tel41 / 81 710 03 80
t41 / 81 710 03 81

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania,
Maldavia, Philippines, P.R. China, Rumania, Russia,
Tajikistan, Turkmenistan, Ukraine, Uzbekistan, Vietnam

A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
tel41 / 75 380 0550
t41 / 75 380 0551

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen

Argentina

ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, tel54 / 1 331 3918,
t54 / 1 331 3572

Australia

Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
tel61 / 2 9954 1925, t61 / 2 9954 1939

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
tel43 / 1 8941 704, t43 / 1 8941 707
Service Hotline: +43 / 1 8941704

Branch Office, Czech Republic

Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885
CZ-156 00 Praha 5
tel 420/2 900 42981
t 420/2 579 23014

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-1940 Temse
tel32 / 3 710 5920, t32 / 3 710 5929
Service Hotline: +32 / 3 710 5922

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
tel55 / 11 532 0740
t55 / 11 535 3598

Chile

BERMAT S.A., Coyancura 2283, piso 6 
Providencia, P.O. Box 9781, Santiago
tel56 / 2 231 8877,
t56 / 2 231 4294

Colombia

Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota  /  D.C.
tel57 / 1 288 7799, t57 / 1 285 3604

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, 
tel45 / 43 52 38 00
t45 / 43 52 38 50

France

Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139   F-78531 BUC Cedex
tel33 / (0)1 30 83 04 00
t33 / (0)1 30 83 04 04

Germany

Pfeiffer Vacuum GmbH,
Emmeliusstrasse 33, D-35614 Asslar
tel49 / 6441 802 400
t49 / 6441 802 399
Service Hotline: +49 / 6441 802 333

Great Britain

Pfeiffer Vacuum Ltd.
2-4 Cromwell Business Centre
Howard Way, Interchange Park
Newport Pagnell, MK16 9QS, United Kingdom
tel44 / 1 908 500615
t44 / 1 908 500616

(0101)

Содержание TMH 262

Страница 1: ...Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit With TC 100 TMH 262 TMU 262 TMH 262 P TMU 262 P PT 800 043 BE B 0101...

Страница 2: ...nterface RS 485 10 Connection 10 Connecting The RS 485 10 3 13 Connections Diagram 11 4 Operations 12 4 1 Before Switching ON 12 4 2 Switching ON 12 4 3 Operations Via The Remote Control Unit 12 Local...

Страница 3: ...rt of the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 100 only in conjunction with the relevant power unit accessory The uni...

Страница 4: ...ion of purge gas see Section 3 10 The turbopump must be connected to a backing pump in accordance with Section 3 3 Only PFEIFFER power units may be used to operate The use of other power units require...

Страница 5: ...O flange with 4 bracket screws or CF flange with the complete set of M8 screws or Underside of the pump with 4 screws M8 screws quality 8 8 For operating the pump air or water cooling is necessary 3 2...

Страница 6: ...rocess gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all gas manufacture s safety instructions With rigid pipe connections fit a bellows in the...

Страница 7: ...g Instructions PM 800 507 BN for details on Venting Valve TVV 005 3 6 Connecting The Casing Heating Unit In order to accelerate attainment of final pressures turbopumps and vacuum chambers can be heat...

Страница 8: ...tails regarding the installation of the sealing gas valve and setting the sealing gas level please refer to Operating Instructions PM 800 229 BN Connecting the Electronic Drive Unit TC 100 with Power...

Страница 9: ...ot vent or vent or heating OFF heating ON 4 Input accessory 2 5 Input pumping station Pumping station OFF Pumping station ON turbopump backing pump and fan are switched ON 6 Input standby reset Standb...

Страница 10: ...nnecting an Electronic Drive Unit TC 600 to a Profibus DP Please refer to the respective Operating Instructions PM 800 599 BN for detailed information on the operation of the TIC 250 PLEASE NOTE Pin A...

Страница 11: ...13 14 15 2 3 4 5 6 7 U B PE Remote Local Accessory 1 Accessory 2 Pumping station Standby Reset 24 VDC or Cable with bridge PM 051 421 T Cable PM 051 431 T or TPS 100 150 DCU 100 150 10 11 8 9 12 13 14...

Страница 12: ...are possible via inputs Pin 2 Pin 6 X3 on the TC 100 Shielded cable must be used The shielding on the plug side of the Electronic Drive Unit TC 100 should be connected to the metal cap on the plug Inp...

Страница 13: ...3 13 Connections Diagram Accessory Outputs 10 X3 and Pin 11 X3 The accessory outputs can be loaded with a maximum of 24 V 200 mA The works setting on the accessory outputs are Accessory output 1 A co...

Страница 14: ...the turbo pump must be air sealed in a plastic bag together with a bag of dessicant e g silicagel If the pump has been shut down for 3 years the bearing must be changed please contact PFEIFFER Service...

Страница 15: ...g noises Inform defective bearing PFEIFFER Service TC run up time too short Set longer start up time with the DCU or PC Thermal overloading caused by Water flow insufficient Ensure free flow Insuffici...

Страница 16: ...f the turbopump vent to atmospheric pressure see Section 4 5 and allow to cool as necessary If necessary remove the turbopump from the system Unscrew locking cover 90 on the underside of the pump with...

Страница 17: ...nd invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated micr...

Страница 18: ...z 120 1000 120 1000 B W Hz 120 1000 120 1000 C W Hz 120 1000 120 1000 D W Hz 120 1000 120 1000 Final pressure5 With rotary vane pumps mbar 5 10 10 5 10 10 With diaphragm pumps mbar 1 10 8 1 10 8 Lubri...

Страница 19: ...s Diagram 99 3 89 8 111 3 1 2 2 8 5 0 1 1 1 3 M 8 45 33 DN 100 ISO K DN 100 CF F DN 25 ISO KF 91 55 101 5 32 98 82 96 5 128 5 194 5 TMH TMU 262 1 1 Sealing gas valve only for P version turbopumps see...

Страница 20: ...Size Number Comments Ordering Quantity Spare Parts TMH TMU 262 Set of seals 1 PM 033 315 T 17 USIT ring 1 P 3529 133 A 91 O ring 1 Vi 38x3 P 4070 621 PV 92 Lubricant reservoir 1 PM 063 265 T 10 Spare...

Страница 21: ...051 461 T PM 800 521 BN DCU 150 19 insert unit with Operating and Display Control Unit DCU PM C01 698 PM 800 477 BN Mains cable Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115...

Страница 22: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 23: ...y that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in accordanc...

Страница 24: ...3 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telepho...

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