Pfeiffer Vacuum TMH 262 Скачать руководство пользователя | Manualshive

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19

9.1. Dimensions Diagram

99.3

89.8

111.3

122

Ø85

±

0.1

113

M8

45

°

33

°

DN 100 ISO-K

DN 100 CF-F

DN 25 ISO-KF

91

55

101.5

32

98

82

96.5

128.5

194.5

TMH/TMU 262

1)

1)

Sealing gas valve only for ”P” version turbopumps (see

rating plate).

1)

1)

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Содержание TMH 262

Страница 1: ...Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit With TC 100 TMH 262 TMU 262 TMH 262 P TMU 262 P PT 800 043 BE B 0101...

Страница 2: ...nterface RS 485 10 Connection 10 Connecting The RS 485 10 3 13 Connections Diagram 11 4 Operations 12 4 1 Before Switching ON 12 4 2 Switching ON 12 4 3 Operations Via The Remote Control Unit 12 Local...

Страница 3: ...rt of the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 100 only in conjunction with the relevant power unit accessory The uni...

Страница 4: ...ion of purge gas see Section 3 10 The turbopump must be connected to a backing pump in accordance with Section 3 3 Only PFEIFFER power units may be used to operate The use of other power units require...

Страница 5: ...O flange with 4 bracket screws or CF flange with the complete set of M8 screws or Underside of the pump with 4 screws M8 screws quality 8 8 For operating the pump air or water cooling is necessary 3 2...

Страница 6: ...rocess gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all gas manufacture s safety instructions With rigid pipe connections fit a bellows in the...

Страница 7: ...g Instructions PM 800 507 BN for details on Venting Valve TVV 005 3 6 Connecting The Casing Heating Unit In order to accelerate attainment of final pressures turbopumps and vacuum chambers can be heat...

Страница 8: ...tails regarding the installation of the sealing gas valve and setting the sealing gas level please refer to Operating Instructions PM 800 229 BN Connecting the Electronic Drive Unit TC 100 with Power...

Страница 9: ...ot vent or vent or heating OFF heating ON 4 Input accessory 2 5 Input pumping station Pumping station OFF Pumping station ON turbopump backing pump and fan are switched ON 6 Input standby reset Standb...

Страница 10: ...nnecting an Electronic Drive Unit TC 600 to a Profibus DP Please refer to the respective Operating Instructions PM 800 599 BN for detailed information on the operation of the TIC 250 PLEASE NOTE Pin A...

Страница 11: ...13 14 15 2 3 4 5 6 7 U B PE Remote Local Accessory 1 Accessory 2 Pumping station Standby Reset 24 VDC or Cable with bridge PM 051 421 T Cable PM 051 431 T or TPS 100 150 DCU 100 150 10 11 8 9 12 13 14...

Страница 12: ...are possible via inputs Pin 2 Pin 6 X3 on the TC 100 Shielded cable must be used The shielding on the plug side of the Electronic Drive Unit TC 100 should be connected to the metal cap on the plug Inp...

Страница 13: ...3 13 Connections Diagram Accessory Outputs 10 X3 and Pin 11 X3 The accessory outputs can be loaded with a maximum of 24 V 200 mA The works setting on the accessory outputs are Accessory output 1 A co...

Страница 14: ...the turbo pump must be air sealed in a plastic bag together with a bag of dessicant e g silicagel If the pump has been shut down for 3 years the bearing must be changed please contact PFEIFFER Service...

Страница 15: ...g noises Inform defective bearing PFEIFFER Service TC run up time too short Set longer start up time with the DCU or PC Thermal overloading caused by Water flow insufficient Ensure free flow Insuffici...

Страница 16: ...f the turbopump vent to atmospheric pressure see Section 4 5 and allow to cool as necessary If necessary remove the turbopump from the system Unscrew locking cover 90 on the underside of the pump with...

Страница 17: ...nd invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated micr...

Страница 18: ...z 120 1000 120 1000 B W Hz 120 1000 120 1000 C W Hz 120 1000 120 1000 D W Hz 120 1000 120 1000 Final pressure5 With rotary vane pumps mbar 5 10 10 5 10 10 With diaphragm pumps mbar 1 10 8 1 10 8 Lubri...

Страница 19: ...s Diagram 99 3 89 8 111 3 1 2 2 8 5 0 1 1 1 3 M 8 45 33 DN 100 ISO K DN 100 CF F DN 25 ISO KF 91 55 101 5 32 98 82 96 5 128 5 194 5 TMH TMU 262 1 1 Sealing gas valve only for P version turbopumps see...

Страница 20: ...Size Number Comments Ordering Quantity Spare Parts TMH TMU 262 Set of seals 1 PM 033 315 T 17 USIT ring 1 P 3529 133 A 91 O ring 1 Vi 38x3 P 4070 621 PV 92 Lubricant reservoir 1 PM 063 265 T 10 Spare...

Страница 21: ...051 461 T PM 800 521 BN DCU 150 19 insert unit with Operating and Display Control Unit DCU PM C01 698 PM 800 477 BN Mains cable Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115...

Страница 22: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 23: ...y that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in accordanc...

Страница 24: ...3 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telepho...

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