Pfeiffer Vacuum HiPace 300 P, Руководство по эксплуатации

Страница: 5 / 64

List of tables
Tbl. 1: Abbreviations used in this document 9
Tbl. 2: Permissible ambient conditions 15
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 19
Tbl. 4: Turbopump features 19
Tbl. 5: Requirements for the dimensioning of customer-specific high vacuum con-
nection 22
Tbl. 6: Reduction of the pumping speed when using a splinter shield or protective
screen 23
Tbl. 7: Requirements on the cooling water composition 30
Tbl. 8: Requirements on the cooling water connection 30
Tbl. 9: Pre-set accessory connections to electronic drive unit TC 400 32
Tbl. 10: Factory setting of the electronic drive unit when delivered 35
Tbl. 11: Behavior and meaning of the LEDs on the electronic drive unit 38
Tbl. 12: Factory settings for delayed venting in turbopumps 39
Tbl. 13: Maintenance intervals 41
Tbl. 14: Characteristic nominal rotation speeds of the turbopumps 46
Tbl. 15: Troubleshooting turbopumps 50
Tbl. 16: Overview of the spare parts available for the HiPace 300 P 53
Tbl. 17: Conversion table: Pressure units 55
Tbl. 18: Conversion table: Units for gas throughput 55
Tbl. 19: Technical data for HiPace 300 P | 24 V 57
Tbl. 20: Technical data for HiPace 300 P | 48 V 58
Tbl. 21: Materials that make contact with the process media 58
List of tables
5/62