Pfeiffer Vacuum HiPace 300 P Скачать руководство пользователя страница 23 | Manualshive

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VACUUM CHAMBER

1

Fig. 4:

Example: Safety connections

1 Safety connection, customer-side

5.2.3 Using a splinter shield or protective screen

Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the Turbopump against foreign matter from the vacuum chamber. The pumping speed is reduced
according to the passage guide values and the size of the high vacuum flange.

Flange size

Reduced pumping speed in % by gas type

H

2

He

N

2

Ar

Splinter shield DN 100

5

7

24

24

Protective screen DN 100

2

2

10

8

Tbl. 6:

Reduction of the pumping speed when using a splinter shield or protective screen

Procedure

► With ISO flanges, use centering rings with protective screen or splinter shield.
► For CF flanges, always insert protective screen or splinter shield with the clamping lugs pointing

towards the rotor in the high vacuum flange.

5.2.4 Using the vibration compensator

Pfeiffer Vacuum vibration compensators are suitable for use on vibration-sensitive systems.

WARNING

Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction

Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.

► Take suitable safety precautions on-site for the compensation of the occurring torques.
► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.

Installing the vibration compensator

1. Install the vibration compensator only with vertical passage.
2. Consider the flow resistance.
3. Secure the turbopump additionally to the high vacuum flange.
4. Observe the fastening of the ISO flanges.

Installation

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Содержание HiPace 300 P

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 300 P Turbopump ...

Страница 2: ...ffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior ...

Страница 3: ...bearing 18 3 1 3 Drive 19 3 2 Shipment 19 3 3 Identifying the product 19 3 3 1 Product types 19 3 3 2 Product features 19 4 Transportation and Storage 20 4 1 Transport 20 4 2 Storage 20 5 Installation 21 5 1 Preparatory work 21 5 2 Connecting the high vacuum side 21 5 2 1 Requirements for the dimensioning of a counter flange 21 5 2 2 Considering earthquake protection 22 5 2 3 Using a splinter shie...

Страница 4: ...nce 40 7 3 Replace operating fluid reservoir 41 7 3 1 Removing the operating fluid reservoir 42 7 3 2 Installing the operating fluid reservoir 43 7 4 Replacing the electronic drive unit 44 7 4 1 Removing electronic drive unit 44 7 4 2 Installing the electronic drive unit 45 7 4 3 Confirming the speed specification 46 8 Decommissioning 47 8 1 Shutting down for longer periods 47 8 2 Recommissioning ...

Страница 5: ...ns to electronic drive unit TC 400 32 Tbl 10 Factory setting of the electronic drive unit when delivered 35 Tbl 11 Behavior and meaning of the LEDs on the electronic drive unit 38 Tbl 12 Factory settings for delayed venting in turbopumps 39 Tbl 13 Maintenance intervals 41 Tbl 14 Characteristic nominal rotation speeds of the turbopumps 46 Tbl 15 Troubleshooting turbopumps 50 Tbl 16 Overview of the ...

Страница 6: ...nge connection ISO F stud screw and through hole 27 Fig 13 Flange connection CF F hexagon head screw and through hole 27 Fig 14 Flange connection CF F stud screw and tapped hole 28 Fig 15 Flange connection CF F stud screw and through hole 28 Fig 16 Example of fore vacuum connection on HiPace 300 29 Fig 17 Connecting the cooling water supply 31 Fig 18 Example Connecting the grounding cable 33 Fig 1...

Страница 7: ...352 BN Operating instructions Electronic drive unit TC 400 EC EtherCat PT 0452 BN Declaration of conformity A component of these in structions Current documents are available from the Pfeiffer Vacuum Download Center 1 1 2 Variants HiPace 300 P DN 100 ISO K TC 400 HiPace 300 P DN 100 CF F TC 400 HiPace 300 P DN 100 ISO F TC 400 1 2 Target group These operating instructions are aimed at all persons ...

Страница 8: ...ing plate The rating plate of the turbopump is located on the lower part of the vacuum pump Operating instructions note This sticker indicates that this operating instructions must be read before performing any tasks Protection class This sticker describes protection class 1 for the product The positioning indicates the position for the ground connection warranty seal Warranty seal The product is ...

Страница 9: ...ic drive unit control parameters Printed in bold as three digit number in square brackets Frequently displayed in conjunction with a short description Example P 312 software version remote 26 pole D Sub connecting socket on the turbopump electronic drive unit S1 S1 switch on power supply pack WAF width across flats T Temperature in C TC Turbopump electronic drive unit turbo controller TPS Voltage ...

Страница 10: ...damage to property Is used to highlight actions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the product or about this docu ment 2 2 Safety instructions All safety instructions in this document are based on the results of the risk assessment carried out in accordance with Machinery Directive 2006 4...

Страница 11: ...s on moving sharp edged parts when reaching into the open high vacuum flange With the high vacuum flange open access to sharp edged parts is possible A manual rotation of the rotor increases the danger situation There is the risk of cuts up to the separation of body parts e g fingertips There is a risk of hair and loose clothing being drawn in Objects falling in destroy the tur bopump during subse...

Страница 12: ...tch on the vacuum pump immediately prior to operation Risks during operation WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equipment for heating the vacuum pump or for optimizing the process gener ates very high temperatures on surfaces that can be touched There is a risk of burning If necessary set up a contact guard If ne...

Страница 13: ...ing sharp edged parts when reaching into the open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating parts when removing the turbopump Wait until the turbopump comes to a standstill rotation speed f 0 Switch the turbopump off properly Secure the turbopump...

Страница 14: ...rbopump being sheared off in use The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space Potentially dangerous gases can escape There is a risk of very serious injuries including death and extensive property damage Take suitable safety precautions on site for the compensation of the occurring torques Before installing ...

Страница 15: ...s apply to operation of the turbopump at maximum permissible backing pressure or at maximum gas throughput depending on the cooling type The turbopump is intrinsically safe thanks to redundant temperature monitor ing The reduction in backing pressure or gas throughput permits operation of the turbo pump at higher ambient temperatures If the maximum permissible operating temperature of the turbopum...

Страница 16: ...pplicable documents in particular the safety maintenance and repair information 2 7 1 Ensuring personnel qualification Specialist for mechanical work Only a trained specialist may carry out mechanical work Within the meaning of this document special ists are people responsible for construction mechanical installation troubleshooting and maintenance of the product and who have the following qualifi...

Страница 17: ...aintenance level 2 Customer with technical education Pfeiffer Vacuum service technician Maintenance level 3 Customer with Pfeiffer Vacuum service training Pfeiffer Vacuum service technician 2 7 3 Advanced training with Pfeiffer Vacuum For optimal and trouble free use of this product Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings For more information please contact ...

Страница 18: ...uum connection DN 100 CF F 11 Connecting plug for voltage supply DCin 4 Ground terminal 12 LED operating mode display 5 Pump base 13 Electronic drive unit TC 400 6 Sealing gas connection 14 Protective cover for the high vacuum connection 7 Venting screw 15 Pump housing aluminum 8 Cooling water connection 3 1 1 Cooling Water cooling Air cooling optional The electronic drive unit automatically regul...

Страница 19: ...uct or at www certipedia com with compa ny ID no 000021320 3 3 1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name the size which is based on the pumping speed of the vacuum pump and if required an additional feature description Family Size model Property attribute feature HiPace 10 to 2800 none Standard version mini Compact v...

Страница 20: ...e weight specified on the rating plate Where possible always transport or ship the turbopump in its original packaging Always carry the turbopump with both hands Remove the protective cover only immediately prior to installation 4 2 Storage We recommend Pfeiffer Vacuum recommends storing the products in their original transport packaging Storing the turbopump 1 Seal all flange openings with the or...

Страница 21: ...ring installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the turbopump from the operator side e g open vacuum chamber General notes for the installation of vacuum components Choose an installation location that permits access to the product and to supply lines ...

Страница 22: ...n all operating states in rela tion to the engagement depth of the fixing screw 170 N mm2 at 2 5 x d 270 N mm2 at 1 5 x d Maximum permissible surrounding magnetic field 5 5 mT Maximum permissible irradiated thermal output 2 4 W Maximum permissible rotor temperature 90 C Tbl 5 Requirements for the dimensioning of customer specific high vacuum connection 5 2 2 Considering earthquake protection NOTIC...

Страница 23: ...Pfeiffer Vacuum vibration compensators are suitable for use on vibration sensitive systems WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being sheared off i...

Страница 24: ...ections For the connection of flanges in ISO KF or ISO K design twisting may occur in the event of sudden blockage of the rotor despite correct installation Leak tightness of the flange connection however is not jeopardized in this regard Required tools Wrench WAF 15 Calibrated torque wrench Tightening factor 1 6 Fig 6 Flange connection ISO K to ISO F bracket screws Connection with bracket screw 1...

Страница 25: ...ed components for the turbopump 6 Screw the hexagon head screws into the tapped holes Observe the minimum tensile strength of the flange material and the screw depth 7 Fasten the hexagon head screws cross wise in 3 steps Tightening torque 5 10 16 1 Nm 2 5 d Fig 8 Flange connection ISO K with ISO F stud screw and tapped hole Connection of the stud screw and tapped hole 1 Only use the approved mount...

Страница 26: ...tallation with ISO F flange are Hexagon head screw and tapped hole Stud screw with tapped hole Stud screw with through hole Required tools Hexagonal wrench 13 WAF Calibrated torque wrench tightening factor 1 6 1 5 d Fig 10 Flange connection ISO F hexagon head screw and tapped hole Connection of the hexagon head screw and tapped hole 1 Only use the approved mounting kits of Pfeiffer Vacuum for the ...

Страница 27: ...pump with collar flange snap ring and centering ring to the counter flange accord ing to the figure 3 Use all prescribed components for the turbopump 4 Fasten the screw connections cross wise in 3 steps Tightening torque 10 20 22 3 Nm 5 2 9 Attaching CF flange to CF F The connection types for CF installation with CF flange are Hexagon head screw and through hole Stud screw with tapped hole Stud sc...

Страница 28: ... 3 If used Insert the protective screen or splinter shield with clamping lugs downwards in the turbo pump high vacuum flange 4 Place the seal exactly in the hollow 5 Connect the flange with the components of the mounting kit according to the figure 6 Tighten the screw couplings all the way around Tightening torque 22 2 Nm 7 Then check the torque since flowing of the sealing material may make it ne...

Страница 29: ...n from the Pfeiffer Vacuum range In this case the backing pump is also controlled directly via the turbopump electronic drive unit interfaces e g relay box or connection cable 1 2 3 4 5 Fig 16 Example of fore vacuum connection on HiPace 300 1 turbopump fore vacuum connection 4 Vacuum components DN 16 ISO KF 2 Centering ring 5 Backing pump e g multi stage roots vacuum pump 3 Circlip Establishing th...

Страница 30: ...ambient temperatures 35 C Parameter Cooling water Appearance filtered mechanically clear visually clear no turbidity no sediment free from grease and oil pH value 7 to 9 Carbonate hardness max 10 dH 12 53 e 17 8 fH 178 ppm CaC03 Chloride content max 100 mg l Sulfate content max 240 mg l Carbonic acid content max not detectable Ammonia content max not detectable Electrical conductivity max 500 µS c...

Страница 31: ... special compatible accessories for its products Information and ordering options for approved accessories for hybrid bearing turbo pumps can be found online Auxiliary connection to electronic drive unit TC 400 and TM 700 The electronic drive unit of the turbopump offers space for the connection of maximum 4 accessory devices M12 connector sockets with the designation accessory are available for t...

Страница 32: ...tructions for the relevant accessory Note the existing configuration of existing connections Use the Pfeiffer Vacuum display and control unit DCU 002 or a DCU with integrated power supply pack 5 6 Connecting the electrical supply WARNING Risk of danger to life through missing mains disconnection device The vacuum pump and electronic drive unit are not equipped with a mains disconnection device mai...

Страница 33: ...ake sure that the power supply pack meets the requirements in accordance with IEC 61010 1 IEC 60950 1 and IEC 62368 1 Where possible use original power supply packs or only power supply packs that correspond with the applicable safety regulations WARNING Danger of cut injuries from unexpected start up The use of mating plugs of the electronic drive unit accessories enables the automatic run up of ...

Страница 34: ...pply voltage 2 Make sure that the power supply pack main switch is off prior to connection 3 Use a suitable connection cable from the Pfeiffer Vacuum accessories range 4 Insert the connecting cable into the connection DCin on the electronic drive unit and close the bayonet lock 5 Insert the connecting cable into the connection DCout on the power supply pack and close the bayonet lock Installation ...

Страница 35: ...in the electronic drive unit Consult Pfeiffer Vacuum before you use gases with higher molecular masses 80 Important settings and function related variables are factory programmed into the vacuum pump elec tronic drive unit as parameters Each parameter has a three digit number and a description Parameter driven operation and control is supported via Pfeiffer Vacuum displays and control units or ext...

Страница 36: ...ed to PLC levels Instructions for remote control operation See the operating instructions of the electronic drive unit for the standard version 6 2 3 Operation via connection E74 Operation is possible via the 15 pole D sub connection with the E74 designation on the electronic drive unit Besides the signals defined in the Directive SEMI E74 0301 the connection is provided with an inverted alarm sig...

Страница 37: ...n be touched There is a risk of burning If necessary set up a contact guard If necessary apply the warning stickers provided for this at the danger points Ensure adequate cooling down before working on the vacuum pump or in its vicinity Wear protective equipment e g gloves WARNING Risk of serious injury in the event of vacuum pump destruction due to over pressure Gas entry with very high over pres...

Страница 38: ...ture Examples are an impermissible motor temperature or impermissibly high housing tempera ture Further reduction of drive power and thus decreasing speed can potentially lead to underrun the rotation speed switchpoint The turbopump switches off Exceeding the temperature threshold for error messages switches off the turbopump immediately 6 5 Switching off and venting We recommend Vent the turbopum...

Страница 39: ...ing valve is an optional accessory for installation on the turbopump The venting valve is normally closed Control is via the turbopump electronic drive unit and configura tion of parameters P 012 and P 030 In the event of a power failure the turbopump continues to de liver sufficient energy during its run down period to initiate a proper venting process When power is re stored the venting process ...

Страница 40: ...open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating parts when removing the turbopump Wait until the turbopump comes to a standstill rotation speed f 0 Switch the turbopump off properly Secure the turbopump against re start Seal open connections immed...

Страница 41: ...bottom part Partially disassemble the vacuum pump Replace the operating fluid reservoir Replace the bearing hous ing Function test Spare parts package 1 bearing Maintenance level 3 Overhaul Dismantle and clean the vacuum pump Replace all seals and wear parts Function test Spare parts package 1 bearing Set of seals Tbl 13 Maintenance intervals 7 3 Replace operating fluid reservoir WARNING Risk of p...

Страница 42: ... fluid reservoir This information can be found on the pump rating plate You can find the safety data sheet in the Pfeiffer Vacuum Download Center Prerequisites Turbopump off Vacuum system vented to atmospheric pressure Electrical supply disconnected All cables disconnected All openings sealed with the original protective covers and any plugs 7 3 1 Removing the operating fluid reservoir Required co...

Страница 43: ...ables Laboratory gloves Operating fluid reservoir Required tools Allen key WAF 5 Tweezers Calibrated torque wrench tightening factor 1 6 4 5 6 1 2 3 7 Fig 21 Installing the operating fluid reservoir 1 Operating fluid reservoir 5 Screw cap 2 Capillary rods 9 6 O ring 3 Injection tip 7 Protective cover 4 Allen head screw Installing the operating fluid reservoir 1 Wear laboratory gloves to avoid skin...

Страница 44: ... Protection of electronic devices from electrostatic phenomena Backing up settings made by the customer The factory operating parameters are always preset in replacement units All settings made by the customer to the original electronic drive unit are lost when it is replaced To preserve your custom settings you have the following options 1 Back up all your settings as a parameter set in a HPU 2 L...

Страница 45: ...ight 7 4 2 Installing the electronic drive unit Required tools Allen key WAF 3 Calibrated torque wrench tightening factor 1 6 4 5 1 2 3 Fig 23 Installation of electronic drive unit TC 400 1 Allen head screw 4 Fore vacuum connection protective cover 2 Electronic drive unit 5 Adapter plate 3 High vacuum connection protective cover Procedure 1 Install the turbopump upright if required 2 Place a new e...

Страница 46: ...000 Hz 350 450 1100 Hz 400 700 800 820 Hz Tbl 14 Characteristic nominal rotation speeds of the turbopumps Required aids A connected Pfeiffer Vacuum display and control unit Knowledge of the configuration and setting of electronic drive unit operating parameters Adjusting the nominal rotation speed confirmation 1 Observe the display and control unit operating instructions 2 See the electronic drive...

Страница 47: ...ied temperature range 9 In rooms with humid or aggressive atmospheres Hermetically seal the turbopump together with a drying agent in a plastic bag 8 2 Recommissioning NOTICE Risk of damage to the turbopump as a result of operating fluid aging after recommissioning The shelf life of the operating fluid of the turbopump is limited Aging of the operating fluid may lead to the failure of the ball bea...

Страница 48: ... must be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the following Iron Aluminium Copper Synthetic Electronic components O...

Страница 49: ...terial approved by Pfeiffer Vacuum for the installation WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being sheared off in use The energy that this would re...

Страница 50: ... play and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air supply Adjust the cooling water flow Reduce the fore vacuum pressure Adapt the ambient conditions Turbopump not achieving the ul timate pressure Turbopump is polluted Heat the turbopump if required Have it cleaned C...

Страница 51: ...lity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum representa tive For fast and smooth service process handling we recommend the following 1 Download the up to date form templates Explanations of service requests Service requests Contamination declaration a ...

Страница 52: ...oduct in suitable stable transport containers only e Maintain applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send your product to your local Service Center 8 You will receive an acknowledgment quotation from Pfeiffer Vac uum Our sales and delivery conditions and repair and maintenance conditions for vacuum devi...

Страница 53: ...ity 1 Electronic drive unit TC 400 refer to the rating plate depending on the connec tion panel 1 2 Operating fluid reservoir refer to the rating plate incl capillary rods and O ring 1 3 Banjo fitting P 4131 007 D Water cooling 2 Tbl 16 Overview of the spare parts available for the HiPace 300 P Spare parts HiPace 300 P 53 62 ...

Страница 54: ...13 Accessories View the range of accessories for hybrid bearing turbopumps on our website Accessories 54 62 ...

Страница 55: ...ion 10 s measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 10 3 hPa 1 1 10 3 100 1 0 1 0 75 kPa 10 0 01 1000 10 1 7 5 Torr mm Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 Tbl 17 Conversion table Pressure units mbar l s Pa m3 s sccm Torr l s atm cm3 ...

Страница 56: ...tex D 180 49980 W min 1 180 49980 W min 1 180 49980 W min 1 Performance curve in gas mode 1 vertex A 201 60000 W min 1 201 60000 W min 1 201 60000 W min 1 Performance curve in gas mode 1 vertex B 221 49980 W min 1 221 49980 W min 1 221 49980 W min 1 Performance curve in gas mode 2 vertex E 201 60000 W min 1 201 60000 W min 1 201 60000 W min 1 Performance curve in gas mode 2 vertex F 221 49980 W mi...

Страница 57: ... Pumping speed for N2 245 l s 245 l s 245 l s Gas throughput at final rotation speed for Ar 4 4 hPa l s 4 4 hPa l s 4 4 hPa l s Gas throughput at final rotation speed for H2 50 hPa l s 50 hPa l s 50 hPa l s Gas throughput at final rotation speed for He 20 hPa l s 20 hPa l s 20 hPa l s Gas throughput at final rotation speed for N2 17 hPa l s 17 hPa l s 17 hPa l s Fore vacuum max for N2 1 hPa 1 hPa ...

Страница 58: ...g connection G 1 8 G 1 8 G 1 8 Max connection pressure abs for venting sealing gas valve 1500 hPa 1500 hPa 1500 hPa Integral leakage rate 1 10 8 Pa m s 1 10 8 Pa m s 1 10 8 Pa m s Relative humidity of air 5 85 non con densing 5 85 non con densing 5 85 non con densing Shipping and storage tempera ture 25 55 C 25 55 C 25 55 C Mounting orientation Arbitrary Arbitrary Arbitrary Bearing Hybrid Hybrid H...

Страница 59: ...100 ISO K 131 195 131 162 Ø 110 45 45 M8 5x 83 2 6 118 18 6 2 0 Ø 144 130 184 163 DN 16 ISO KF G1 4 DN 100 ISO F Ø 8 9 0 Fig 26 HiPace 300 TC 400 DN 100 ISO F 118 131 Ø 110 45 45 M8 5x 83 2 6 18 6 2 0 Ø 144 130 DN 16 ISO KF G1 4 Ø 8 9 0 143 174 196 207 175 DN 100 CF F Fig 27 HiPace 300 TC 400 DN 100 CF F Technical data and dimensions 59 62 ...

Страница 60: ...s substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21360 4 2018 DIN EN 61000 3 2 2015 DIN EN IEC 63000 2019 DIN EN 61000 3 3 2014 DIN EN 61010 1 2011 DIN EN 61326 1 2013 DIN EN 62061 2013 The authorized representative for the compilation of technical documents is Mr Tobias...

Страница 61: ...61 62 ...

Страница 62: ...Notizen Notes ...

Страница 63: ......

Страница 64: ... PT0633 ed C Date 2108 P N PT0633BEN ...

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