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Содержание A63.7069

Страница 1: ...ety and obtain satisfactory performance please study this instruction manual thoroughly before start to use your instrument A63 7069 Tungsten Filament Scanning Electron Microscope SED BSDE CCD 8x 300000x Instruction Manual ...

Страница 2: ...s 13 2 2 Operation of Acquire an image 14 2 3 Specimen Changing Procedures 16 2 4 Filament changing procedures 17 2 5 SEM Shutdown Procedures 18 3 Scanning Control Window of A63 7069 19 3 1 Title Bar 19 3 2 Menu Bar 19 3 3 Shortcut Toolbar 19 3 4 Control Panel 20 3 4 1 Vacuum and HV 21 3 4 2 High Voltage control 21 3 4 3 Bias control 22 3 4 4 Filament control 22 3 4 5 Brightness and Contrast 23 3 ...

Страница 3: ...ation 31 3 9 1 Zoom in 31 3 9 2 Zoom out 31 3 9 3 Actual Size of Image 32 3 9 4 Fit Window 32 3 9 5 Character Edit 32 3 9 6 Label 32 3 9 7 Date 32 3 9 8 U Scale 32 3 9 9 Oscillograph 33 3 9 10 Standard Rectangle 33 3 10 Document Window Operation 33 3 10 1 File 33 3 10 2 View 33 3 10 3 Language and Other parameter 34 3 10 4 Debug 34 4 Digital Image Processing Window 35 4 1 Mirror 35 4 2 Flip 35 4 3...

Страница 4: ...ure Alignment and Selection 44 5 3 1 Check the Alignment of Final aperture 44 5 3 2 Final Aperture Alignment 44 5 3 3 Final Aperture Selection 46 5 4 Astigmatism Correction 48 5 5 Operation of the Specimen Stage 49 5 5 1 Precautions 49 5 5 2 Operation of specimen stage standard specimen stage 49 5 5 3 Specimen Grounding Alarm 50 6 Accessories 51 6 1 CCD 51 6 2 Backscatter detector 51 7 Maintenance...

Страница 5: ...uch as high temperature stage low temperature stage and pulling stage to observe phase transition and transformation under different conditions 9 The extensiveness of the instrument is good users can carry out multi function analysis by adding different signal detecting devices e g X ray energy spectrometer can be used to do micro area components analysis or qualitative and quantitative analysis o...

Страница 6: ...changing rapidly in the fields of human survival and development such as biology environmental protection and medicine 1 1 3 Product Name Model Product name Scanning ElectronMicroscope Product model A63 7069 1 1 4 Using Condition 1 1 4 1 Environmental Condition Temperature 16 25 Temperature change 1 h Relative humidity 70 25 Floor load 246Kg m2 1 1 4 2 Working Condition Power Supply Single phase 2...

Страница 7: ...16A 1 1 5 Influence on Environment and Energy Sources The X ray radiations conform to the national standard and will not influence environment and energy sources 1 1 6 Safety The safety of A63 7069 conforms to the requirements of the national safety standards of instruments ...

Страница 8: ...lectron gun is a high brightness electron source which is a self biased triple structure The filament tip wehnelt cap hole center and anode hole center are coaxial for the result of highest brightness The distance between anode and wehnelt cap is adjustable for high or low accelerating voltage Three screws above electron gun are used to adjust the position of electron gun in order to realize filam...

Страница 9: ...ice can help users to select final aperture according to actual needs and align it with electron beam The final aperture influences depth of focus resolution and electron beam current 1 2 2 6 Scanning Coil Assembly Scanning coil assembly is installed inside of objective lens to make the electron beam deflect on the surface of specimen along X direction and Y direction When observing images at high...

Страница 10: ...odoluminescence spectrometer backscattered electrons detector SE detector and other experimental instrument 1 2 3 2 Standard Specimen Stage The standard specimen stage is applied to standard chamber The range of movement is as follows Horizontal X Y 50mm Vertical Z 25mm Tilt 5 90 Rotation 360 continuously For the needs of reduce vibration specimen stage can be locked with specimen chamber by the i...

Страница 11: ...assist valves to realize vacuum control Air compressor supplies power to each pneumatic valve The vacuum control part is installed on the rear of main frame The whole process from low vacuum to high vacuum is fully automatically controlled by software The system can realize the vacuum real time measurement and can be displayed on the software interface Operations of vacuum system are very simple t...

Страница 12: ...ity The image control system supports same screen display combined image display with SEM control which are convenient to users The scanning area can be zoomed according to different scales to fully satisfy the requirements of observation The default image pixel is 1024 768 24 and support various modes to choose The scale and format of image is fully compatible with popular style Support outputtin...

Страница 13: ...tion 360 continuously Image acquisition mode Various resolution selectable Active selection scan Line scan Spot scan Dual channels Image scanning speed 500ns 80μs Image output Support various image format output and printer output BMP JPG TIFF TGA PNG sem special format can be used in Image processing software Auto function auto focus auto brightness contrast auto stigmator auto filament High perf...

Страница 14: ...the rear part of Main frame Turn on Computer run the software of SEM The password of windows operation system is sem Click the Start button the color of Start button will turn red the vacuum system will come into the working status V2 will be turned on After the indicator lamp of V2 V3 TMP went on vacuum system come into the high vacuum working status About 5 mins the vacuum indication turns green...

Страница 15: ...into adjustable status Adjust HV slowly especially over 10KV Generally for the sample which has good electrical conductivity HV can be adjust to the range of 20 30KV for the sample which has low electrical conductivity HV should be adjust to the range of 10 20KV Adjust Contrast until some small white point display on the screen or adjust the contrast value to approximately 50 ...

Страница 16: ...stment should be controlled lower than 0 25A s at the range of 2A to saturated point the speed of filament adjustment should be controlled lower than 0 1A s Generally Beam Current should be about 200 and can be controlled by Bias adjustment If Beam current is too high it is necessary to adjust the Bias value If is too low it is needs to readjust the installed position of filament We provide two ki...

Страница 17: ... click the Chamber button again the color of Chamber button will change to grey system will pump the low vacuum and the vacuum value will displayed on control panel NOTE Before pumping check the O ring After pumping the low vacuum V3 and TMP will be opened system will pump the high vacuum automatically When the color of vacuum changes to GREEN SEM can begin to work It is recommended to start worki...

Страница 18: ...un chamber and take out the Wehnelt Cap dismantle the filament change a new one Then install the Gun cap click the Gun button again the color of Gun button will change to grey V2 and V3 is opened system will pump the low vacuum When TMP is opened system will pump the high vacuum until the color of vacuum turns to GREEN SEM can begin to work It is recommended to start working after vacuum degree is...

Страница 19: ...lick the Start button the color of Start will turn Grey Close the software and shutdown the computer Turn off the main frame switch the switch of electronics console Turn off the Main Switch Turn off the power supply of Mechanical Pump and Air Compressor NOTE Before turn off the main frame switch the software should be closed ...

Страница 20: ...ntents from left to right are as follow program icon program name and window name The window name of scanning window is SemScan 3 2 Menu Bar Items of all menu bar are shown as follows comply with the Windows operating system application rules The menu includes all operations of software commonly used functions can be found in the shortcut toolbar 3 3 Shortcut Toolbar Each shortcut button on shortc...

Страница 21: ... 20 Control Panel ...

Страница 22: ...automatically OFF When finished the work click the button software will turn off the filament HV Bias contrast automatically Vacuum The label displays vacuum value When the background color of it turns green the vacuum is ok Monitor Monitoring system status V1 Pneumatic control V1 valve user has this button Click the button and its color turns green indicating that the V1 valve is open Click the b...

Страница 23: ...e adjust to 0A The value of electron beam current depends on many factors When operating SEM users can adjust bias voltage and filament current to get stable emission current of filament Filament of electron gun of SEM is a V shaped tip with very small diameter made from tungsten filament and can be heated by its power supply When the filament reaches working temperature the emitted electrons will...

Страница 24: ...3 5 Brightness and Contrast Dragging the scroll bar of Brightness and Contrast on panel with mouse can control the value of brightness and contrast Note Contrast signal should be added after opening V1 valve in order to avoid damage of contrast supply and photomultiplier caused by impulse of large voltage 3 3 6 Condenser Lens Dragging the scroll bar of Condenser Lens on panel to control condenser ...

Страница 25: ...fication automatically according to the objective lens current value 3 3 9 Objective Lens Reversal Switch Objective lens reversal is realized by reversing the current of objective lens This function is used to degauss objective lens Operating steps open reversal of objective lens and then switch it off At this time the image will be defocusing Adjust objective lens to focus the image Repeat this s...

Страница 26: ...area can return control value of XY to zero quickly 3 4 12 Beam Alignment Beam alignment can control the beam position by adjusting electromagnetic field in alignment coil Clicking Beam Alignment button on panel can start beam alignment adjustment The Beam Alignment control contains a box area two scroll bars and a display label Dragging horizontal and vertical scroll bars of Beam Alignment can co...

Страница 27: ... stigmator control value in X direction while dragging upward and downward can change stigmator control value in Ydirection Directly clicking in the box area or dragging the cross line in the box can adjust two directions simultaneously Right clicking in the box area can return control value of XY to zero quickly For users convenience adjusting stigmator can operate as follows move cursor on the c...

Страница 28: ...h can provide maintainer with reference when the instrument is out of order Select Click the Select button open the Control Items Select dialog box Check the items which need to be recorded in log Clicking the All button can automatically select all items Clicking the Clear button can automatically clear all items Clicking the OK button can save settings and exit the dialog box Clicking the Cancel...

Страница 29: ...ed by dragging selected area box withmouse 3 7 4 Line Scanning In this mode the electron beam only continuously scans on a line on specimen The signal intensity curve video signal on the line displays in scanning area Direct current level and amplitude of video signal can be adjusted by brightness and contrast Clicking menu Scan Line or clicking the Line button or on shortcut toolbar can set the c...

Страница 30: ...ning resolution steps correspond to different scanning speed respectively The software default is 1 corresponds to 512 2 to 800 3 to 1024 4 to 2048 Clicking menu Scan Scan Resolution or clicking the scan resolution button on shortcut toolbar can change scanning speed The default set is 3 3 7 9 Snapshot This function can capture the collecting image User can switch to image window and save the imag...

Страница 31: ...nser Lens Reverse in three groups at 500ms intervals and then performs an automatic brightness contrast operation Channels The source of image data displayed in each channel can be selected from SE BSE and SE BSE SE represents the secondary electron detector signal BSE represents the backscatter detector signal SE BSE represents the mixed signal of the secondary electron detector and backscatter d...

Страница 32: ...Y of stigmator and determine the optimal stigmation current value During the process of automatic adjustment press the ESC key will escape this function 3 8 4 Auto Filament Clicking menu Auto Auto Filament or clicking the Auto Fila button on shortcut toolbar can adjust filament automatically In this procedure the software will adjust filament parameter automatically until the filament reaches the ...

Страница 33: ...tom of scanning area It expresses some important data relevant to this image The data includes Accelerating voltage of electron beam KV Image magnification Work Distance Detector Source Micron scale u scale SEM mark Date and Note 3 9 7 Date Clicking menu Image Date or clicking the button of date on shortcut bar can display or hide the date The default stateis hide 3 9 8 U Scale Clicking menu Image...

Страница 34: ...Image Standard Rectangle can show or hide standard rectangle The default state is hide The standard rectangle is a square with side length equal to length of current U scale which is always coordinated with U scale 3 10 Document Window Operation 3 10 1 File Open Clicking menu File Open can open one existing document Exit Clicking menu File Exit can quit the application and save documents 3 10 2 Vi...

Страница 35: ...tion After checking the magnification displayed in the image label is multiplied by the device magnification and the screen magnification factor Write param as default OneKEY Record the current value of HV Bias Filament Brightness Contrast Condenser Lens Objective Lens and Magnification to software CPS and CCG com port The communication port of SEM Colors Fonts Select software colors and text font...

Страница 36: ...mages and some practical image operation It can save the images as new file Clicking the Return button on shortcut toolbar can return to scanning control window Open one image and click image on menu bar and the image processing functions are shown as follows 4 1 Mirror Source Mirror 4 2 Flip Source Flip ...

Страница 37: ... 36 4 3 Negative Source Negative 4 4 Filters 4 4 1 Set Threshold Source Setting threshold 4 4 2 Colorize Source Colorize 4 4 3 Lighten Source Lightening 4 4 4 Darken Source Darken ...

Страница 38: ... 37 4 4 5 Contrast Source Adding contrast 4 4 6 Erode Source Erode 4 4 7 Dilate Source Dilate 4 4 8 Blur Source Blur ...

Страница 39: ... 38 4 4 9 Soften Source Soften 4 4 10 Sharpen Source Sharpen 4 4 11 Edge Source Edge 4 4 12 Emboss Source Emboss ...

Страница 40: ...Set Rotation Source Rotate in arbitrary angle 4 7 Re sample Image Magnification Source After re sampling and zoom 4 8 Alpha Channel 4 8 1 Opacity Source After Opacity 4 8 2 Remove It is only applicable to color image 4 9 Gray Scale It is only applicable to color image ...

Страница 41: ... 40 4 10 Dither ...

Страница 42: ... the default set of image is optimal it is not recommended to change 4 12 Split Channels 4 12 1 Split to RGB Source After splitting according to three primary colors 4 12 2 Split to YUV After splitting according to YUV 4 12 3 Split to HSL After splitting according to HSL ...

Страница 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...

Страница 44: ...e printed circuit board and line plug under the electrified status If the column does not vent do not pull out the final aperture holder Before shutting down Console Power first close V1 valve Under the situation of venting chamber do not open TMP and V1 valvemanually The electron optics column of electron microscope has been adjusted to optimal state before leaving factory It has small combined m...

Страница 45: ...ual mode 5 3 Final Aperture Alignment and Selection 5 3 1 Check the Alignment of Final aperture 1 Adjust the magnification to 500X 800X acquire a relatively clear image Use Active Area scanning at a high speed scanning rate and select a characteristic point on image At the same time remember the position of this point 2 Focus the image by adjusting the coarse button and observe the movement of ima...

Страница 46: ...make sure the characteristic point do not move or move the smallest when focusing or defocusing Focus the image the characteristic point move away its original position along a certain direction adjust the knob of final aperture holder and make this point move back to its original position Repeat this step until this point almost stay in the original position when focusing or defocusing ...

Страница 47: ... Note If you want to observe the image at high magnification adjust the magnification over 5000X repeat the step 3 and 4 again 6 Any changes of final aperture will break the Astigmatism status Therefore when finishedFinal Aperture Alignment the user must do astigmatism correction About astigmatism correction please refer to 5 4 5 3 3 Final Aperture Selection 1 Three apertures have been installed i...

Страница 48: ...ate 3 apertures Each marked line indicate one aperture 5 After change an aperture the user must readjust the alignment of Final Aperture 6 After finish the alignment of Final Aperture the user must readjust the astigmatism correction Caution The aperture holder can be taken out by rotate counterclockwise Therefore it is dangerous that take out the aperture holder when the column is kept in vacuum ...

Страница 49: ...o becleaned The final aperture is polluted which needs to be changed another aperture Or the 3 apertures need to be cleaned or replaced 3 new apertures The alignment of final aperture is bad it is needs to readjust again Steps of astigmatism correction procedure 1 Select Active Area adjust magnification to 2000X 3000X Use slow scanning speedmode 2 Clicking the Stigmator button on panel can start s...

Страница 50: ...electron detector 5 5 2 Operation of specimen stage standard specimen stage The standard specimen stage is applied to standard chamber The range of movement is as follows Horizontal X Y 50mm Vertical Z 25mm Tilt 5 90 Rotation 360 continuously Movement in X direction Rotate the knob X in the stage can move the specimen holder in X direction The movement amount of specimen in X direction is 0 25mm M...

Страница 51: ...n the stage the specimen holder can rotate at any degree from 0 to 360 Specimen tilt Rotate the knob T in the stage the specimen holder can be tilted from 5 to 90 5 5 3 Specimen Grounding Alarm A warning device has been installed in the stage When the specimen touch the bottom pole piece a buzzer will alarm At this moment do not adjust the knob X Y T of specimen stage Only rotate the knob Z clockw...

Страница 52: ... spectrometer analysis when equipped with the energy spectrum detector if the CCD is turned on the interface will pop up as shown in the dialog box Select Yes to open the CCD function choose No do not turn on the CCD function If you use the spectrum after opening the CCD function you need to manually close the CCD window 6 2 Backscatter detector 1 The front panel knob and key of the backscatter de...

Страница 53: ...king distance can be adjusted to about 7mm the best working distance of backscattering The condenser lens is generally selected between 400 and 450 After the secondary electronic image is clear the backscatter image is also clear and the brightness and contrast can be adjusted according to the situation When the backscatter image is collected the scroll bar of Signal 2 Brightness adjustment is sho...

Страница 54: ...of filament is dependent on emission current heating current and vacuum degree If the display of Beam current change to 0 suddenly and the screen change to black also when normally working which means the filament is breakdown It is needs to replace a new one If the value of Beam current always display 0 that means the filament is broke down or there are some other reasons such as loose contact to...

Страница 55: ...5 ammonia water to clean the aperture of wehnelt cap Please clean it softly to avoid the damage the aperture Use absolute alcohol to clean again Use dryer to dry the wehnelt cap 5 Mount the shims into wehnelt cap We provide two kinds of shims its thickness are 0 3mm and 0 1mm for the filament position adjustment The position of filament is 0mm without shim The suggestion position is between 0 4 0 ...

Страница 56: ...just HV Contrast and Filament to acquire an image Set the Beam alignment X and Y to zero Adjust the magnification to 500X select the Active area and high scanning speed Use an inner hexagon spanner to adjust the 3 inner hexagon screws which have been installed in the top of the Gun cap When adjusting observe the lightness of the screen Until the image is brightest the alignment is finished Adjust ...

Страница 57: ...destroyed 5 Install the Collector ensure its good contact 6 Install the stage and click the Chamber button to pump the vacuum 6 3 Check level of oil in the mechanical pump The user can check the amount of oil in the mechanical pump through the window of the pump The level of oil should be between MIN and MAX If the level of oil is lower than MIN please add the oil of mechanical pump in time Before...

Страница 58: ...ed and probably lead to decline the imaging quality It is needs to clean this part Click the OFF button close the V1 Vent specimen chamber The aperture holder can be taken out by rotate the Knob counterclockwise and pull it out Place it in a clean cloth And use screw driver to dismantle the set screw then use the tweezer to take the aperture out Dismantle the O ring of aperture holder Use metal po...

Страница 59: ... If the aperture is distort please replace a new one Mount the aperture to the holder mount the fixed shim and fasten the set screw Mount the O ring to the aperture holder coated with a thin layer of vacuum grease If the O ring is broken please change a new one When install the aperture holder to the Column the locating pin of holder should toward to the locating slot of the Column Push the holder...

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