46
GA 09.035/6.02 - 07/2011 - © Oerlikon Leybold Vacuum
Parameters
5.2.12
Pirani range extension (
PrE
)
Extend the display and the setpoint adjustment range.
Tab. 5-8
PrE
parameter values
Display
Significance
oFF
Normal operation
on
Range extension:
Display down to 5
×
10
-5
mbar
Setpoint adjustment range
down to 2
×
10
-4
mbar