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Oerlikon CENTER ONE, Руководство по эксплуатации

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Operation 

 
 

38

  GA 09.033/6.02 – (2011-07) – 

©

 Oerlikon Leybold Vacuum 

 

 

Degas 

  Only for ITR 90, ITR 100 and ITR 200 

ionization and ionization/Pirani vacuum gauges. 
ITR 100 and ITR 200 gauges: Degas acts only 
upon the active filament. 

Contamination deposits on the electrode system of ioni-
zation vacuum gauges may cause instabilities of the 
measurement values. The Degas function allows to 
clean the electrode system. 

 

 

Value  

 

 

 

Ö

 Normal operation. 

 

 

Ö

  Degas: The electron 

collection grid is 
heated to 

≈

700 °C by 

electron bombard-
ment and the elec-
trode system is thus 
cleaned. 

 

 

Duration of the Degas function: 
3 min (can be aborted). 

 

 

Lower/upper switching threshold 

CENTER ONE has a switching function with two adjust-
able thresholds. The status of the switching function is 
displayed on the front panel and can be evaluated via 
the floating contact at the CONTROL connector 
(

→

 

 27, 26). 

Содержание CENTER ONE

Страница 1: ...cess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Dem...

Страница 2: ...CENTER ONE Single Channel Vacuum Gauge Controller Operating Manual GA 09 033 6 02 Part numbers 230 002 235 002...

Страница 3: ...ikon Leybold Vacuum D 50968 K ln Type No F No V Hz VA Validity This document applies to products with part numbers 230 002 Version for Europe 235 002 Version for USA and Japan The part number can be t...

Страница 4: ...TER ONE is used together with Leybold Vakuum Transmitters in this document referred to as gauges for total pressure measurement All products must be operated in accordance with the relevant operating...

Страница 5: ...22 3 4 SENSOR Connector 23 3 5 Interface Connector RS232 25 3 6 CONTROL Connector 26 4 Operation 27 4 1 Front Panel 27 4 2 Turning CENTER ONE On and Off 29 4 3 Operating Modes 30 4 4 Measurement Mode...

Страница 6: ...ccessories 86 9 Storage 86 10 Disposal 87 Appendix 88 A Conversion Tables 88 B Default Parameters 89 C Firmware Update 90 D Literature 93 E Index 96 EC Declaration of Conformity 96 For cross reference...

Страница 7: ...r equipment damage 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be car ried out by persons who have suitable technical train ing and the necessary experi...

Страница 8: ...ate into the unit Make sure no objects enter through the lou vers and no liquids penetrate into the equip ment Disconnecting device The disconnecting device must be readily identifiable and easily rea...

Страница 9: ...bility and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modi...

Страница 10: ...ation 20 60 C 5 50 C Relative humidity 80 up to 31 C decreasing to 50 at 40 C Use indoors only max altitude 2000 m NN Pollution degree II Protection type IP30 Compatible gauges Number 1 Compatible typ...

Страница 11: ...s depending on gauge 1 16 Measurement error gain error offset error 0 02 FSr 0 05 FSr Measurement rate analog digital 100 s 50 s CTR 100 CTR 101 ITR 90 ITR 200 10 s ITR 100 Display rate 10 s Filter ti...

Страница 12: ...ter time constant Adjustment range depending on gauge 1 16 Hysteresis 1 FSr for linear gauges 10 of measurement value for logarithmic gauges Switching function relay Contact type floating changeover c...

Страница 13: ...enchtop use max 30 V or 60 V may be connected Service life mechanic electric 108 105 at maximum load Connector 9 pin D Sub male pin assignment 26 Contact positions 9 8 no error 9 8 error or no mains p...

Страница 14: ...character mnemonics bi directional data flow RS232C only TXD and RXD used Transmission rate 9600 19200 38400 baud Connector 9 pin D Sub female pin assignment 25 Dimensions mm 91 2 3 5 106 2 78 84 204...

Страница 15: ...ted for incorporation into a 19 rack or a control panel or for use as desk top unit DANGER DANGER damaged product Putting a damaged product into operation can be extremely hazardous In case of visible...

Страница 16: ...the protection class of the rack pro tection against foreign bodies and water e g the EN 60204 1 regulations for switch cabinets Take appropriate measures for the rack to meet the specifications of t...

Страница 17: ...Installation 16 GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum Slide rails For safe and easy installation of heavy rack chassis adapters preferably equip the rack frame with slide rails...

Страница 18: ...Installation GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 17 Mounting height Height 3 U Height 2 U Rack installation...

Страница 19: ...Fasten CENTER ONE to the rack chassis adapter using the screws supplied with it The temperature inside the switching cabinet must not exceed the admissible maximum am bient temperature 9 Height 3 U ra...

Страница 20: ...he screws supplied with the adapter panel Adapter panel for height 3 U rack adapter p Slide CENTER ONE into the rack chassis adapter Height 3 U q Fasten the adapter panel to the rack chassis adapter u...

Страница 21: ...E into a control panel the following cut out is required M3 or 3 5 105 91 2 78 69 For reducing the mechanical strain on the front panel preferably support the unit n Slide CENTER ONE into the cut out...

Страница 22: ...purpose two self adhesive rubber feet as well as a slip on rubber bar are supplied with it n Stick the two supplied rubber feet to the rear part of the bottom plate o Slip the supplied rubber bar onto...

Страница 23: ...ble without protective ground The unit is supplied with a 2 5 m power cord If the mains cable is not compatible with your system use your own suitable cable with protective ground The socket must be f...

Страница 24: ...once Make sure that there is never more than one gauge connected to CENTER ONE at the same time Connect the gauge to one of the two SENSOR connec tors on the rear of the unit Use a screened 1 1 cable...

Страница 25: ...gnment Pin assignment of the 8 pin RJ45 appliance connector Socket Signal 1 2 3 4 5 6 7 8 24 V PGND Signal Ident Signal GND Status HV_L HV_H Pin assignment of the 15 pin D Sub appliance connector Sock...

Страница 26: ...the RS232 con nector on the rear of the unit using a screened cable electromagnetic compatibility DANGER DANGER protective low voltage According to EN 61010 voltages exceeding 30 VAC or 60 VDC are ha...

Страница 27: ...ccording to EN 61010 voltages exceeding 30 VAC or 60 VDC are hazardous If you are using CENTER ONE as desk top unit you may only connect a protective low voltage SELV Connect the peripheral components...

Страница 28: ...unit Switching function status Upper threshold Lower threshold Measurement value in floating point or exponential format or status messages 25 Warning error flashing Offset value 0 Correction factor...

Страница 29: ...hes The measurement value is above the upper measurement range limit of the connected gauge The lamp flashes The measurement value is below the lower measurement range limit of the connected gauge The...

Страница 30: ...it is incorporated in a rack After power ON CENTER ONE automatically performs a self test identifies the connected gauge activates the parameters that were in effect before the last power OFF switches...

Страница 31: ...he standard operating mode of CENTER ONE Measurement values and statuses as well as the gauge identification are displayed in this mode To get to the Measurement mode turn CENTER ONE on do not press a...

Страница 32: ...d for 10 s PARA PARA Measurement value Parameter X Power ON 5 s PARA 5 s PARA 4 4 1 Operation In the Measurement mode the following commands are possible Getting to the Parameter mode 34 Turning the g...

Страница 33: ...e gauge identification Press 0 5 s 33 Getting to the Test mode Press 5 s 51 4 4 2 Turning the Gauge On Off Only for PTR 225 cold cathode gauge and ITR 100 ionization vacuum gauge The high vacuum measu...

Страница 34: ...acitive gauge TTR 100 TTR 100 S2 TTR 101 TTR 101 S2 Cold cathode gauge PTR 225 Cold cathode Pirani gauge PTR 90 Linear gauge capacitiv analog CTR 90 CTR 91 DI 200 DI 201 DI 2000 DI 2001 DI 2001 rel Li...

Страница 35: ...you are in the Measure ment mode To quit the Parameter mode turn CENTER ONE off do not press any key for at least 10 s press the PARA key after Parameter X bAud to get to the Measurement mode press a...

Страница 36: ...itching threshold 38 Upper switching threshold 38 Measurement range of linear gauges 42 Offset correction zero adjust of linear gauges 43 Measurement unit 45 Correction factor 45 Filter time constant...

Страница 37: ...s The value is in creased in small increments The value is in creased in large increments The parameter value is modified by 1 increment Loading the default parameters Press 5 s Setting all parameter...

Страница 38: ...02 2011 07 Oerlikon Leybold Vacuum 37 4 5 2 Parameters Some parameters are not available for all gauge types They are only displayed if available The following table shows which parameters are availa...

Страница 39: ...the measurement values The Degas function allows to clean the electrode system Value Normal operation Degas The electron collection grid is heated to 700 C by electron bombard ment and the elec trode...

Страница 40: ...3 4 2 3 4 Display Measurement value Value the lower switching threshold Setpoint low defines the pres sure at which the switching func tion is activated when the pres sure is dropping e g gauge depend...

Страница 41: ...lower threshold limit upper threshold limit all values in mbar 2 10 4 mbar if PrE is activated 50 The minimum hysteresis between the upper and lower switching threshold is at least 10 of the lower th...

Страница 42: ...usts the threshold if required unterer Schwellwert 5 102 1 10 2 FSr 1 103 1 10 1 1 5E3 1 10 3 FSr 1 103 lower threshold limit upper threshold limit 10 lower threshold 10 lower threshold 10 lower thres...

Страница 43: ...defined by the user the full scale value of logarithmic gauges is auto matically recognized Value e g 0 01 mbar 0 01 Torr 0 02 Torr 0 05 Torr 0 10 mbar 0 25 mbar 0 50 mbar 0 10 Torr 0 25 Torr 0 50 To...

Страница 44: ...10 of the full scale setting When the offset correction is activated the saved offset value is subtracted from the actual measurement value This allows for measurements relative to a reference pressur...

Страница 45: ...gauge and then the controller Deactivate the offset correction before adjusting the zero of the gauge you are using 43 press 2 s Zero adjustment only for CTR 100 and CTR 101 Value e g Zero adjustment...

Страница 46: ...icron the readout automatically changes over to Torr When the pressure drops below 90 Torr the instrument automatically switches back to Micron Correction factor Not for CTR 90 CTR 91 CTR 100 CTR 101...

Страница 47: ...evaluation of unstable or disturbed measurement signals The measurement value filter affects neither the analog output 26 nor the digitally transmitted measurement value of the ITR 90 ITR 100 and ITR...

Страница 48: ...NE does not re spond to small changes in measured values As a conse quence it will also respond more slowly to changes in the measured values For CTR gauges only The response of the CENTER ONE to sign...

Страница 49: ...Value High vacuum meas urement circuit acti vated High vacuum meas urement circuit de activated Display resolution digits Display resolution of measured values Value Display rounded to one decimal dig...

Страница 50: ...Only for ITR 200 ionization Pirani vacuum gauge Switching the emission on and off Value the emission is switched on and off automatically by the gauge the emission is switched on and off by the user...

Страница 51: ...old Vacuum Pirani range extension The display and setpoint adjustment range can be extended TTR transmitters with display range down to 5 10 5 mbar only Value Default Display extended to 5 10 5 mbar s...

Страница 52: ...ONE on press all keys simultaneously for at least 5 s while you are in the Measurement mode press all keys simultaneously for at least 5 s while you are in the Parameter mode To quit the Test mode tur...

Страница 53: ...s Program version 53 Watchdog error 54 Torr lock 54 Parameter setup lock 54 The name of the test program is displayed until it is started RAM test program 55 EPROM test program 55 EEPROM test program...

Страница 54: ...0 4 6 2 Parameters Firmware version The firmware version program version is displayed Version The two parts of the firmware number are displayed alter nately The last character indicates the modifi ca...

Страница 55: ...to be acknowledged by the operator Torr lock The measurement unit Torr can be suppressed in the corresponding parameter setting unit 45 Setting Lock disabled measurement unit Torr available Lock enabl...

Страница 56: ...Test finished no error found Test finished error s found The lamp flashes EPROM test Test of the program memory Test sequence The test runs automatically one time Test in process Test finished no erro...

Страница 57: ...fly Test finished no error found Test finished error s found The lamp flashes Display test Test of the display Test sequence The test runs automati cally one time 1 First all display ele ments are lit...

Страница 58: ...se of the high sensi tivity of the open measurement circuit Test sequence z B Positive portion of the meas urement signal in Volt A D converter test 1 Test of channel 1 of the analog digital converter...

Страница 59: ...erence voltage at the signal input of the SENSOR connector 24 The measurement value filter affects the ap plied voltage If the signal input is open CENTER ONE displays a default value that may easily...

Страница 60: ...nnect all gauge and control system lines to ensure that no control commands or mes sages are triggered by mistake The relays switch on and off cyclically The switching operations are indicated optical...

Страница 61: ...old Vacuum RS232C test Test of the RS232C interface CENTER ONE repeats each sign transmitted by the communicating HOST The data transferred from to CENTER ONE can be displayed by the computer only sec...

Страница 62: ...t character is transferred to the CENTER ONE the automatic transmission of measured values stops After the necessary inquiries or parameter modifications have been made the transmission of measured va...

Страница 63: ...ance by one line 10 0A ENQ ENQUIRY Request for data transmission 5 05 ACK ACKNOWLEDGE Positive report signal 6 06 NAK NEGATIVE ACKNOWLEDGE Negative report signal 21 15 Transmit Data transfer from HOST...

Страница 64: ...monics and parameters The maximum number of digits the data formats and admissible value ranges are also specified there Transmission protocol HOST CENTER ONE Explanation Mnemonics and parameters CR L...

Страница 65: ...nsmits data with end of message Error processing All strings received are verified in the CENTER ONE If an error is detected a negative acknowledgment NAK is output The appropriate flag is set in the...

Страница 66: ...HVC HV EMI on off 67 ITR ITR CTR 100 CTR 101 data output 68 LOC Parameter setup lock 78 OFS Offset correction 73 PNR Program number 77 PRE Pirani range extension 76 PR1 Pressure measurement 66 RES Re...

Страница 67: ...Receive ACK CR LF Transmit ENQ Receive x sx xxxxEsxx CR LF Measurement value 1 in current pressure unit Status x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off ITR 100 PT...

Страница 68: ...ue in the desired interval Receive x sx xxxxEsxx y CR LF Measured value 1 with pressure unit Status x 0 Measurement data okay 1 Underrange 2 Overrange 3 Sensor error 4 Sensor off ITR 100 PTR 225 5 No...

Страница 69: ...ceive ITR 90 200 xx xx xx xx xx xx xx xx CR LF CTR 100 101 Transmission string byte 0 7 in hex format ITR 90 ITR 200 CTR 100 CTR 101 Gauge identification Transmit TID CR LF Receive ACK CR LF Transmit...

Страница 70: ...eter 0001 SYN Syntax error The ERROR word is cancelled when read out If the error persists it is immediately set again Reset Transmit RES x CR LF x 1 Reset Receive ACK CR LF Transmit ENQ Receive x x x...

Страница 71: ...ion Transmit SP1 x xxEsx x xxEsx CR LF Upper threshold 1 in current pressure unit default depending on gauge Lower threshold 1 in current pressure unit default depending on gauge 1 Values can be enter...

Страница 72: ...Operation GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 71 Switching function status Transmit SPS CR LF Receive ACK CR LF Transmit ENQ Receive x CR LF Switching function x 0 off 1 on...

Страница 73: ...d Transmit FSR x CR LF Measurement range x 0 0 01 mbar 1 0 01 Torr 2 0 02 Torr 3 0 05 Torr 4 0 10 mbar 5 0 10 Torr 6 0 25 mbar 7 0 25 Torr 8 0 50 mbar 9 0 50 Torr 10 1 mbar 11 1 Torr 12 2 mbar 13 2 To...

Страница 74: ...o offset value needs to be entered 1 On If no offset value has been entered the previously defined offset value is taken over 2 Auto offset measurement No offset value needs to be entered 3 Zero adjus...

Страница 75: ...ve ACK CR LF Transmit ENQ Receive x CR LF Measurement unit Correction factor Transmit COR x x xxx CR LF 0 100 10 000 default 1 000 Receive ACK CR LF Transmit ENQ Receive x x xxx CR LF Correction facto...

Страница 76: ...0E 4 mbar the display resolution of the TTR transmitters is reduced by one decimal digit Transmission rate Transmit BAU x CR LF x 0 9600 baud default 1 19200 baud 2 38400 baud As soon as the new baud...

Страница 77: ...ent 2 Receive ACK CR LF Transmit ENQ Receive x CR LF Save parameters to EEPROM Transmit SAV x CR LF x 0 Save default parameters 1 Save user parameters Receive ACK CR LF Pirani range extension Transmit...

Страница 78: ...02 2011 07 Oerlikon Leybold Vacuum 77 5 2 3 Test Mode For service specialists Firmware version Transmit PNR CR LF Receive ACK CR LF Transmit ENQ Receive xxx xxx x CR LF x Modification index original v...

Страница 79: ...as responded the error is automatically acknowledged and cancelled after 2 s Receive ACK CR LF Transmit ENQ Receive x CR LF Watchdog control Torr lock Transmit TLC x CR LF x 0 off default 1 on Receive...

Страница 80: ...on 1 s Receive xxxx CR LF ERROR word EPROM test Transmit TEP CR LF Receive ACK CR LF Transmit ENQ Starts the test duration 10 s Receive xxxx xxxx CR LF Check sum hex ERROR word EEPROM test Transmit TE...

Страница 81: ...ts the test all LEDs on Receive ACK CR LF Transmit ENQ Receive x CR LF Display test status ADC test Transmit TAD CR LF Receive ACK CR LF Transmit ENQ Receive x x xxxx x xxxx x xxxx CR LF ADC channel 2...

Страница 82: ...Setpoint relay off error relay on 4 Setpoint relay on error relay on Receive ACK CR LF Transmit ENQ Receive x CR LF I O test status Operator key test Transmit TKB CR LF Receive ACK CR LF Transmit ENQ...

Страница 83: ...3 9 80E 3 CR LF R ACK CR LF Modification of threshold values of switching function setpoint Positive acknowledgement T FOL 2 CR LF R NAK CR LF T ENQ R 0001 CR LF T FIL 2 CR LF R ACK CR LF T ENQ R 2 C...

Страница 84: ...leaning CENTER ONE For cleaning the outside of CENTER ONE a slightly moist cloth will usually do Do not use any aggressive or scouring cleaning agents DANGER DANGER mains voltage Contact with live par...

Страница 85: ...RA key If the problem persists or is displayed Possible cause and remedy acknowledgement CENTER ONE has been turned on too fast after power OFF Acknowledge with the PARA key If the watchdog is set to...

Страница 86: ...ROM error Acknowledge with the PARA key Possible cause and remedy acknowledgement Display driver error Acknowledge with the PARA key Possible cause and remedy acknowledgement A D converter error Ackno...

Страница 87: ...e D Sub connector fitting the CONTROL connector screw type 230 006 DI SC adapter connection cable for DI Gauge Heads 245 009 V01 9 Storage Caution Caution electronic component Inappropriate storage st...

Страница 88: ...imental to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its compo nents according to...

Страница 89: ...3 at 101 325 103 1 013 1 013 103 760 1 14 696 lbf in2 psi 6 895 103 68 948 10 3 68 948 51 715 68 046 10 3 1 Pressure units used in the vacuum technology mbar Pascal Torr mmWs psi inch of merc mbar 1 1...

Страница 90: ...likon Leybold Vacuum 89 B Default Parameters The following values are activated when the default pa rameters are loaded 36 mbar oFF 1000 Torr 1 103 mbar 5 10 4 mbar oFF 1 00 nor oFF 9600 Auto oFF 2 Di...

Страница 91: ...a rameter and Test mode will not be affected by a firm ware update To be sure note your parameter settings before upgrading the firmware 89 Preparing CENTER ONE for a program transfer Turn CENTER ONE...

Страница 92: ...Programmtransfer n Unpack the self extracting file exe or the packed zip file o If you have not connected CENTER ONE to the COM1 interface Open the batch file Update BG509763 A edit the interface and...

Страница 93: ...firm ware If the program transfer was successful quit the Update mode by turning CENTER ONE off Wait at least 10 s before turning CENTER ONE on again in order for it to correctly initialize it self CE...

Страница 94: ...3 1 02 Oerlikon Leybold Vacuum GmbH D 50968 K ln Deutschland 4 www oerlikon com Operating Manual THERMOVAC Transmitter TTR 211 S GA 09 216 1 02 Oerlikon Leybold Vacuum GmbH D 50968 K ln Deutschland 5...

Страница 95: ...Leybold Vacuum GmbH D 50968 K ln Deutschland 11 www oerlikon com Operating Manual IONIVAC Transmitter ITR 100 GA 09 414 1 02 Oerlikon Leybold Vacuum GmbH D 50968 K ln Deutschland 12 www oerlikon com...

Страница 96: ...erlikon com Gebrauchsanleitung CERAVAC Transmitter CTR 100 17200257_001_00 Oerlikon Leybold Vacuum GmbH D 50968 K ln Deutschland 16 www oerlikon com Gebrauchsanleitung CERAVAC Transmitter CTR 101 1300...

Страница 97: ...Gauge identification 33 I O 59 Interface connector 25 Literature 93 Mains power connector 22 Maintenance 83 Measurement 42 45 46 Measurement mode 31 32 33 Mnemonics Communication Mode Operating modes...

Страница 98: ...GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 97...

Страница 99: ...Notes 98 GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum...

Страница 100: ...Notes GA 09 033 6 02 2011 07 Oerlikon Leybold Vacuum 99...

Страница 101: ...eybold Vacuum GmbH Bonner Strasse 498 D 50968 K ln Tel 49 0 221 347 1234 Fax 49 0 221 347 1245 documentation vacuum oerlikon com w w w o e r l i k o n c o m Original German GA 09 033 6 01 2011 07 ga09...

Страница 102: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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