Troubleshooting
56
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Error
code
Designation
Meaning
Possible Cause
Remedy
Shut-
down
1
Overspeed
warning
The actual frequency
exceeds the setpoint by
over 10 Hz.
Frequency converter defec-
tive
Contact Oerlikon Leybold Vacuum
Service.
no
2
Pass through
time error
The pump has not rea-
ched the minimum speed
after the maximum run-
up time has elapsed.
Forevacuum pressure too
high.
Gas flow too high
Rotor blocked
Check the ultimate pressure of the
backing pump and install a bigger
backing pump if req.
Seal leak, check process
Check if the rotor turns freely.
Contact Oerlikon Leybold Vacuum
Service if the rotor is damaged or
blocked.
yes
3
not used
4
Short circuit
error
yes
5
Converter tem-
perature error
Overtempera-ture at the
power output stage or
within the frequency con-
verter
Ambient temperature too
high
Poor cooling
Ensure max. ambient temperature of
45°C
Improve cooling
yes
6
Run-up time
error
The pump has not rea-
ched the normal opera-
ting frequency after the
maximum run-up time.
Forevacuum pressure too
high.
Gas flow too high
Check the ultimate pressure of the
backing pump and install a bigger
backing pump if req.
Seal leak, check process
yes
7
Motor tem-
perature error
The motor temperature
has exceeded the shut-
down threshold.
Forevacuum pressure too
high.
Gas flow too high
Fan defective
Water cooling switched off
Check the ultimate pressure of the
backing pump and install a bigger
backing pump if req.
Seal leak, check process
Replace fan
Switch on water cooling
yes
8
Pump error
Pump couldn’t be identi-
fied or no pump is
connected
Pump not connected cor-
rectly to frequency conver-
ter
Frequency converter soft-
ware not current,
Hardware defective
Check connection between pump
and frequency converter
Contact Oerlikon Leybold Vacuum
Service
Contact Oerlikon Leybold Vacuum
Service
yes
