Oerlikon Leybold Vacuum Turbovac SL 300, Руководство по эксплуатации

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Important Safety Information 3
1 Description 7
1.1 Design 8
1.2 Standard equipment 8
1.3 Technical data 9
1.4 Ordering data 14
1.5 Accessories 14
2 Installation 18
2.1 Conforming utilization 18
2.2 Operating environment 18
2.3 Fitting accessories 19
2.4 Attach the pump to the vacuum chamber 22
2.5 Forevacuum connection 25
2.6 Connect the cooling 26
2.7 Connecting the purge gas / venting valve 30
2.8 Electrical connection 32
2.8.1 Connecting pump and frequency converter 32
2.8.2 Connecting the power supply 34
2.8.3 Mounting the frequency converter 35
2.8.4 Relay status 38
3 Operation 39
3.1 Media compatibility / purge gas 39
3.2 Start-up 39
3.3 Interfaces 40
3.3.1 RS 232 C interface (SERVICE X5) 41
3.3.2 RS 485 interface 42
3.3.3 Profibus DP 43
3.3.4 Ethernet/IP interface 43
3.3.5 Parameter list 44
3.3.6 Warning codes for parameter 227 48
3.4 Switching on 49
3.5 Shutting down 50
3.6 Venting 51
3.7 Bakeout 52
3.8 Removing the pump from the system 53
Contents
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130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
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