57
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Troubleshooting
Error
code
Designation
Meaning
Possible Cause
Remedy
Shut-
down
82
Fan voltage has failed
no
83
Motor temperature
low warning
no
84
Motor overtemperatu-
re warning
no
101
overload warning
The pump speed has
dropped under the nor-
mal operation threshold
Forevacuum pressure too
high.
Gas flow too high
Check the ultimate pressure of
the backing pump and install a
bigger backing pump if req.
Seal leak, check process
no
103
Supply voltage
warning
Intermediate circuit vol-
tage too low or maxi-
mum time for generator
operation was excee-
ded.
DC supply voltage below
24V
Mains voltage has failed
Check the voltage at the power
supply and if required set up cor-
rectly
Remedy the cause for the mains
power failure
no
106
overload error
The pump speed has
dropped under the
minimum speed
Forevacuum pressure too
high.
Gas flow too high
Check the ultimate pressure of
the backing pump and install a
bigger backing pump if req.
Seal leak, check process
yes
111
Motor undertempera-
ture error
The minimum permissi-
ble motor temperature
is not attained.
Ambient temperature too
low
Pump cooling too high
Ensure min. ambient tempera-
ture of 0°C
Reduce water cooing
yes
116
Permanent overload
error
The speed of the pump
has dropped below the
normal operation thres-
hold and has stayed
there for a longer peri-
od of time.
Forevacuum pressure too
high.
Gas flow too high
Check the ultimate pressure of
the backing pump and install a
bigger backing pump if req.
Seal leak, check process
yes
117
Motor current error
Motor current less than
nominal current
Cable fault
Faulty
connector
Contact Oerlikon Leybold
Vacuum Service
yes
128
Motor temperature
sensor error
Motor temperature sen-
sor defective
Sensor defective, short
circuit or broken cable
Contact Oerlikon Leybold
Vacuum Service
yes
143
Overspeed error
yes
