26
This slope depends on the fast scan direction and therefore on the rotation
of the measurement, as shown in figure Tilt, position A and B. It is desirable
that the measurement plane is parallel to the sample plane, because this
makes it easier to see smaller details in the measurement, and because the z-
feedback loop can function more accurately in this case. Therefore, the sample
plane should be made parallel to the sample plane by properly setting the
values of ‘X-Slope’ and ‘Y-Slope’.
You can align the measurement plane with the sample plane using the fol-
lowing procedure:
- Alter the value of ‘X-Slope’ using the arrow buttons until the x-axis of the
scan line lies parallel to the x-axis of the sample. You can measure the
slope in the LineView using the angle tool (see Software Reference).
- Enter the value 90 in the ‘Rotation’ input to scan along the y-direction of
the scanner i.e. the sample’s tilt as shown in the schematics view B. If the
input for ‘Rotation’ is not visible, you can make it visible by clicking
.
Scan panel after adjusting the slopes
F
IRST
M
EASUREMENTS
A
DJUSTING
THE
SAMPLE
’
S
TILT
COORDINATES
Содержание easyScan E-STM
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