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MKS Stabil-Ion 370 Series Скачать руководство пользователя страница 35

2

Initial Setup Procedures

2-15

Series 370 Stabil-Ion Instruction Manual - 370119

2.

Replace the fuses whenever the switch settings are changed with correct fuse values as
indicated on the power supply panel. New fuse holders may be required.

3.

Do not connect power cables until the Installation Instructions in Chapter 3 are completed.

4.

The 370 VGC is supplied with a convenient IEC 320 AC main connection receptacle which
allows selection of a detachable line cord to match your available main power.

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Содержание Stabil-Ion 370 Series

Страница 1: ...Series 370 Instruction Manual Stabil Ion Vacuum Measurement Controller Instruction manual part number 370119 Revision C March 2020...

Страница 2: ......

Страница 3: ...ville Phillips Stabil Ion and Convectron are registered trademarks and mksinstTM is a trademark of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respec...

Страница 4: ...emote Power Supply 370502 Interface Option None 0 RS 232 A RS 485 B Gauge Options None 0 Dual Convectron 1 Convectron 2 Setpoint Options None 0 2 Setpoints for Stabil Ion Gauge A 6 Setpoint Relays 2 p...

Страница 5: ...ion 2 3 3 Convectron Gauge Installation 3 3 3 1 Compression Mount Quick Connect 4 3 3 2 1 8 NPT Mount 4 3 3 3 VCR VCO Mount 4 3 3 4 NW16KF Flange Mount 4 3 3 5 ConFlat Flange Mount 4 3 4 Installing th...

Страница 6: ...ectron Gauge Analog Output Signal 30 4 11 Preparing for Process Control Operation 31 4 11 1 Setpoint Display and Adjustment 31 4 11 2 To Display a Setpoint 31 4 11 3 To Modify a Setpoint 31 4 12 Prepa...

Страница 7: ...shooting the Electrometer Module 7 7 9 Overpressure Shutdown 8 7 10 Turn OFF History 9 7 11 Troubleshooting the Process Control Module 10 7 12 RS 232 Troubleshooting 10 7 13 RS 485 Troubleshooting 11...

Страница 8: ...Table of Contents iv Series 370 Stabil Ion Instruction Manual 370119...

Страница 9: ...e customer s failure to comply with these requirements Read Instructions Read all safety and operating instructions before operating the product Retain Instructions Retain the Safety and Operating Ins...

Страница 10: ...ons Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by MKS or that have the same characteristics as the original parts Unauthorized sub...

Страница 11: ...imilar high voltage producing product Verify that the vacuum port to which the Stabil Ion Gauge is mounted is electrically grounded It is essential for personnel safety as well as proper operation tha...

Страница 12: ...gas being used Using the N2 calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system See Sect...

Страница 13: ...responsibility For Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www m...

Страница 14: ...rements of the Canadian Interference Causing Equipment Regulations Cet appareil numerique de la classe B respecte toutes les exigences du Reglement sur le material broilleur du Canada UL Listed This p...

Страница 15: ...it 5 Stabil Ion Gauges 2 Interconnect cable 6 Stabil Ion cables 3 Stabil Ion Power Supply 7 Dual Convectron cable 4 Power cable 8 Convectron Gauges Figure 1 2 Stabil Ion Gauge 1 Stabil Ion Gauge mount...

Страница 16: ...auge 1 power switch 3 Convectron Gauge B display 10 Process Control channel indicator lights 4 Unit of measure label Torr mbar or Pascal user selectable 11 Process Control channel labels 5 Degas power...

Страница 17: ...zero adjustment Convectron Gauge A 5 Auto ON switch IG2 14 Atmosphere adjustment Convectron Gauge A 6 Auto ON adjustment IG2 15 Auto ON switch IG1 7 Vacuum zero adjustment Convectron Gauge B 16 Auto...

Страница 18: ...n Gauge A 4 Collector connector for Stabil Ion Gauge 2 10 Collector connector for Stabil Ion Gauge 1 5 Connector for analog output voltage from Convectron Gauge B 11 Connector for remote parameter sel...

Страница 19: ...uge 1 4 Line voltage selector switch 9 Connector for Stabil Ion Gauge 2 5 Line voltage selector switch 10 Connector for power cable 9 ALL 3 SWITCHES MUST BE SET TO THE SAME AC LINE VOLTAGE POWER 50 60...

Страница 20: ...nstruction Manual 370119 1 Figure 1 8 Top View of Stabil Ion Vacuum Gauge Control Unit cover and door removed 1 1 For completeness all available capabilities are assumed present Not all capabilities m...

Страница 21: ...ithin the Control Unit See Section 2 1 1 on page 2 2 and the following sections for further details Review Sections 2 1 2 2 1 3 2 1 4 and 2 1 5 for the factory default settings for the switches or set...

Страница 22: ...than necessary and only when wearing a high impedance ground strap A high impedance helps protect human life in case of inadvertent contact with high voltage 3 Remove the four Phillips head screws ide...

Страница 23: ...ressure display units of measure see Section 4 3 4 1 on page 4 12 2 To change the units of measure label open the door and lift the label card from its slot in the top of the front panel See Figure 2...

Страница 24: ...he gold plating may be consumed This may make the contacts unsuitable for low level signal switching in the future 6 Attach a copy of the Process Control circuit diagram to this manual for future refe...

Страница 25: ...gure 2 6 Two Channel Process Control Cat No 370108 NOTE 2 Setpoints 3 and 4 are factory assigned to Convectron Gauge A Setpoints 5 and 6 are factory assigned to Convectron Gauge B Figure 2 7 Six Chann...

Страница 26: ...hes are factory preset as shown on Table 2 3 for relay activation below the pressure setpoint This is most commonly desired when you want the relay to be de energized under a high pressure condition T...

Страница 27: ...ion differs from the setpoint value by one display unit A 10 hysteresis is automatically programmed into each setpoint for returning pressures Table 2 4 illustrates this using an assumed setpoint pres...

Страница 28: ...g options are available as well as switches to force the handshake lines to an always true condition Stabil Ion System RS 232 factory defaults are 9600 BAUD 8 data bits no parity 1 stop bit DCD CTS an...

Страница 29: ...ery 5 seconds If the Convectron Module is not present only the ion gauge pressure will be output Table 2 6 Character Framing S3 S4 S5 Character Bits Parity Stop Bits ON ON ON 8 None 2 ON ON OFF 8 Even...

Страница 30: ...UE in order for 370 to send the next byte in its message or data CTS 1 and DSR 1 When ON forces the functions TRUE and thus assumes host is always ready to receive Both ON DCD 8 DATA CARRIER DETECT Mu...

Страница 31: ...Controller on power up Asserted by the Controller upon receipt of a message terminator as a hold off to prevent the host computer from attempting to transmit data until the message just received has b...

Страница 32: ...module on the back of the controller and Switch S1determine the controller s RS 485 address This address can be any hex code from 00 to FF The address dial on the RS 485 module on the back of the cont...

Страница 33: ...determined by setting switches S2 3 S2 4 and S2 5 See Figure 2 15 Table 2 12 below defines the character bits parity and stop bits based on the switch settings The factory default setting is S2 3 ON S...

Страница 34: ...t the address listed at the front of this manual AC Line Voltage between 180V to 240V For AC line voltage between 180V to 240V set all switches to 230V as shown to the right Use 1 6A F 250V Power Fuse...

Страница 35: ...rrect fuse values as indicated on the power supply panel New fuse holders may be required 3 Do not connect power cables until the Installation Instructions in Chapter 3 are completed 4 The 370 VGC is...

Страница 36: ...2 Initial Setup Procedures 2 16 Series 370 Stabil Ion Instruction Manual 370119...

Страница 37: ...auge system when subjected to industrial levels of RF energy Snap on ferrite sleeves G P p n 013746 4 ea provided must be installed on the ion gauge cable at both the gauge tube end and Controller end...

Страница 38: ...ve temperature at the electrical connector when degassing it is best not to install the Stabil Ion Gauges with the electrical connector above the gauge If it is necessary to install the gauge with the...

Страница 39: ...ngrounded conductor at high potential When high voltages are used within the vacuum system and the Convectron Gauge envelope is not reliably grounded through its vacuum connection either a separate gr...

Страница 40: ...ce it into the female nut where applicable Assemble components and snug finger tight While holding a back up wrench stationary tighten the female nut 1 8 turn past finger tight for 316 stainless steel...

Страница 41: ...potentially dangerous situation 2 Provide a connection to ground for other instruments with electrodes in the vacuum system possibly exposed to high voltage electrical discharges 3 Provide a connecti...

Страница 42: ...Table 3 1 Installation Hardware Part Numbers Part Number Adapter Hardware Description 370008 To mount one or two Power Supplies side by side in a 19 in rack 370010 To mount Control Unit only on left o...

Страница 43: ...Convectron Gauge module via a standard 1 8 in miniature phone jack Two mating connectors are supplied with this capability See Section 4 10 on page 4 30 pertaining to the characteristics of these sig...

Страница 44: ...ol Output Connector Pin Assignments A mating connector is supplied in the hardware kit Figure 3 7 Process Control Output Connector It is the installer s responsibility to ensure that the automatic sig...

Страница 45: ...ption common or TTL 0 state Maximum current 2 mA per low input Ionization gauge IG1 IG2 ON OFF CG gas selection gas a or b Degas ON OFF Pressure range selection high or low Filament selection 1 or 2 o...

Страница 46: ...3 Installation 3 10 Series 370 Stabil Ion Instruction Manual 370119...

Страница 47: ...oth filaments in series 3 Filament 2 IG1 Selects backup filament 2 operation for IG1 If not Both 24 Both Filaments IG2 Selects both filaments in series 4 Filament 2 IG2 Selects backup filament 2 opera...

Страница 48: ...med time to expire NOTE The state of the DEGAS input does not override other degas ON OFF commands from for example the front panel button the computer interface or the internal timer IG Lockout Input...

Страница 49: ...talled capability produces the signals shown in Table 3 4 A mating DB 25S connector is supplied in the hardware kit Use shielded cable to minimize electromagnetic radiation or susceptibility Ground th...

Страница 50: ...test them again until ready to begin transmitting the next After transmitting the terminator 370 will negate RTS and wait for the next incoming message To summarize CTS DSR Set the computer to indica...

Страница 51: ...ctor use the configuration shown in Table 3 6 Section 4 12 on page 4 32 contains instructions for communicating using the RS 232 Computer Interface Table 3 5 Computer Cable Pin Assignments for a 9 Pin...

Страница 52: ...an idle state all nodes are in listen receive mode Under this condition there are no active drivers on the network In order to maintain the proper idle voltage state bias resistors must be applied to...

Страница 53: ...ex asynchronous Data Rate 9600 Default 4800 2400 1200 600 300 150 baud Character Length 8 bit or 7 bit ASCII Factory default is 8 bit Parity No parity even or odd Factory default is None Stop Bits 1 o...

Страница 54: ...und the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times Never...

Страница 55: ...the cable connector into the pin guard of the Stabil Ion Gauge d Rotate slightly until the locating key engages the cable connector keyway e Push on the connector Make sure the connector fully seats a...

Страница 56: ...cts on performance that might be caused by cable movement Do not touch the Stabil Ion Gauge during degas operation if the Guard has been removed Serious burns can occur Danger high voltage 180V is pre...

Страница 57: ...set can cause costly damage and even be dangerous Figure 3 19 Power Supply and Control Unit Rear Views Showing Power Cable Connections Compliance with the usual warning to connect the power cable onl...

Страница 58: ...3 Installation 3 22 Series 370 Stabil Ion Instruction Manual 370119...

Страница 59: ...al Ultrahigh Vacuum Chapman and Hall London 1968 O Hanlon J F A User s Guide to Vacuum Technology John Wiley Sons New York 1980 4 2 Stabil Ion Gauge Calibration Memory The Stabil Ion Gauge is the fir...

Страница 60: ...er pressure threshold line frequency and display update rate The Info menu provides Calibration Memory serial numbers turn OFF history and Code Version Number The arrow keys or are used to scroll thro...

Страница 61: ...nce flow diagram NOTE The Pressure Units and the Line Frequency may be different than those shown in Table 4 1 depending on the configuration you purchased Table 4 1 Electrometer Module Display Menu S...

Страница 62: ...Setup Menu SELECT SELECT SELECT SELECT pressure units degas time line frequency display update overpressure threshold pressure range IG1 IG2 filament select IG1 IG2 scale factor IG1 IG2 gas type IG1 I...

Страница 63: ...grounded unpainted metal surface on the 370 Control Unit and then touch the surface of the anti static bag before removing the Memory Module from its bag Information Menu CANCEL SELECT SELECT IG seri...

Страница 64: ...the gauge and the IG channel to which it is assigned is displayed using the Serial function under the INFO Menu The serial number of the gauge and the IG channel to which it is assigned is displayed...

Страница 65: ...n your application will range from 1 x 10 2 to say 5 x 10 8 Torr leave the range switch on H If much of the time the system pressure will be below approximately 1 x 10 4 Torr set the pressure range se...

Страница 66: ...on of the filament or long use Select the other filament for continued operation Set at filament 1 or filament 2 if alternate filament is required Separate settings are provided for IG1 and IG2 The Bo...

Страница 67: ...redominant gas in the system setting the scale factor at 7 75 x 10 1 as shown in Table 4 4 causes the pressure indications for N2 to be multiplied by 0 775 thus providing correct pressure indications...

Страница 68: ...d installed for a second gas b gas selection may be done using the following process Note If the Stabil Ion Gauge calibration is for a gas type other than N2 or air we suggest placing a label on the s...

Страница 69: ...Section 4 14 on page 4 33 and using the Remote Input see Section 3 7 1 on page 3 9 The default factory setting for this function is GAS a or N2 1 Press the arrow key until you see the control menu in...

Страница 70: ...ECT key to see the units display 3 Press the SELECT key again so that the unit TORR or PASCAL or mBAR is flashing 4 Press the or arrow keys to select the desired units 5 Press the SELECT key to store...

Страница 71: ...to turn OFF at a lower pressure e g 10 is one decade lower in pressure This adjustment affects both pressure ranges and both IG s simultaneously The default factory setting for this function is 100 S...

Страница 72: ...ress CANCEL again to return to the status display for the gauge tube that is turned ON 4 3 4 5 Pressure Display Update Speed It is sometimes desirable to slow down the display update rate This feature...

Страница 73: ...ont panel push buttons IG1 and IG2 2 Remotely with the available Remote Control module see Section 3 7 on page 3 9 3 Automatically using the auto ON function of the Convectron Gauge module see Section...

Страница 74: ...sh button Via the Remote Control input See Section 3 7 on page 3 9 Using an RS 232 or RS 485 Computer Interface module From the internal Degas timer time out All conductors in on or around the vacuum...

Страница 75: ...e Bakeout Applying an external heat source to the vacuum system and to the gauge envelope can speed the removal of contamination from the interior surfaces Bakeout temperatures between 150 C and 300 C...

Страница 76: ...and Rupture Discs Confirm that these safety devices are properly installed before installing the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions...

Страница 77: ...s of some other gases For example N2 or air at 24 Torr causes the same heat loss from the Convectron sensor as will argon at atmospheric pressure Thus if the pressure indication of the Convectron Gaug...

Страница 78: ...l pressure to 760 Torr during backfilling Assume you wish to measure the pressure of Freon 22 On Figure 4 11 on page 4 24 locate 760 Torr on the left hand scale travel to the right to the intersection...

Страница 79: ...on page 4 23 locate 20 Torr on the true pressure scale travel horizontally to the right to the C02 curve and then down to an indicated pressure of 6 4 Torr N2 equivalent Thus the correct process cont...

Страница 80: ...Pressure Curve 10 4 to 10 1 Torr Indicated Pressure Torr nitrogen equivalent True Pressure Torr 10 4 10 3 10 2 10 1 10 3 10 4 10 2 10 1 1 Kr Ar Ne He O2 N2 air CO2 D2 freon 22 CH4 freon 12 Do not use...

Страница 81: ...Curve 10 1 to 1000 Torr Indicated Pressure Torr nitrogen equivalent True Pressure Torr 10 1 1 10 100 1 10 1 10 100 1000 Ar He N2 air CO2 CH4 freon 12 Use only when gauge axis is horizontal Do not use...

Страница 82: ...Curve 10 1 to 1000 Torr Indicated Pressure Torr nitrogen equivalent True Pressure Torr 10 1 1 10 100 1 10 1 10 100 1000 Use only when gauge axis is horizontal Do not use this data with transducers ot...

Страница 83: ...icated vs True Pressure Curve 10 4 to 10 1 mbar Indicated Pressure mbar nitrogen equivalent True Pressure mbar 10 4 10 3 10 2 10 1 10 3 10 4 10 2 10 1 1 Kr Ar Ne He O2 CO2 D2 freon 22 CH4 freon 12 Do...

Страница 84: ...True Pressure Curve 10 1 to 1000 mbar Indicated Pressure mbar nitrogen equivalent True Pressure mbar 10 1 1 10 100 1 10 1 10 100 1000 Ar He N2 air CO2 CH4 freon 12 Use only when gauge axis is horizont...

Страница 85: ...True Pressure Curve 10 1 to 1000 mbar Indicated Pressure mbar nitrogen equivalent True Pressure mbar 10 1 1 10 100 1 10 1 10 100 1000 Use only when gauge axis is horizontal Do not use this data with...

Страница 86: ...and then dropped below it again 4 8 1 To Set the ON OFF Pressure for IG1 IG2 1 Place the AUTO switch for IG1 in the SET position See Figure 4 15 2 The existing turn ON pressure is displayed on the A d...

Страница 87: ...and at vacuum less than 1 x 10 4 Torr for at least 15 minutes adjust VAC for gauge A see Figure 4 16 until display A indicates 0 0 0 Torr mbar or 0 0 0 Pa not 1 0 4 1 0 2 or 0 0 0 3 Let the pressure i...

Страница 88: ...ron Gauge module that allow shifting the voltage corresponding to 1 x 10 4 Torr between 7 volts and 1 volt The voltage signal is smooth and continuous throughout all the decades of pressure measuremen...

Страница 89: ...units of measure If a setpoint is set to above atmosphere then the relay will always be activated unless its polarity is reversed see Section 2 1 3 on page 2 4 except during transient conditions that...

Страница 90: ...ces may appear within the command or the modifier only between them The terminator expected by the Control Unit is an ASCII carriage return line feed denoted here by CRLF The carriage return is option...

Страница 91: ...ess of the controller The terminator expected is an ASCII carriage return denoted here by CR Note that the terminator is sometimes appended automatically by the host computer s interface software to t...

Страница 92: ...y that a signal requesting degas has been sent to the electrometer Degas will not activate if the pressure is above 5 x 10 5 Torr Use the DGS command see below to verify that degas has been successful...

Страница 93: ...es to IG2 PR1 Definition Select pressure range for IG1 operation Modifiers L or H Response OKCRLF Example From computer PR1 L From 370 OKCRLF NOTES This function can be implemented from the electromet...

Страница 94: ...1 1 0 1 1 CRLF SWS Definition Display status of gauge control switches remotes Modifiers None Response Example If the Controller is set for pressure range 1 low pressure range 2 high filament 1 1 and...

Страница 95: ...control back to the electrometer front panel settings Modifiers None Response OK if command accepted or INVALID if rejected LLO Definition Local lockout of the electrometer front panel gauge control...

Страница 96: ...he arrow key to display the swap information 2 Press the arrow key again to display the swap message 3 Press the SELECT key to begin the swap action 4 Use the or arrow keys to select the desired gauge...

Страница 97: ...serial number display 3 Press the key again to see the CGA a gauge serial number 4 Press the SELECT key to select the CG data area 5 Press the arrow key to view the desired serial number display Pres...

Страница 98: ...results 13 Press CANCEL to return to the serial number display Press CANCEL again to return to the INFO Menu Press CANCEL yet again to return to the status display for the gauge tube that is turned ON...

Страница 99: ...vent the Convectron Gauge from tracking pressure accurately below 10 3 Torr After about 15 minutes indications in the 10 4 range will be valid and response will be rapid Zero adjustment at vacuum may...

Страница 100: ...thorough cleaning of both filaments If one of the filaments is not operating the degas will revert back to degassing the single selected filament at a reduced power 6 When either filament is nearing...

Страница 101: ...ed wire grid anode Electrons pass into the space enclosed by the grid In this space the electrons collide with the gas molecules that are in the vacuum system and produce positive ions The positive io...

Страница 102: ...ximately 2x10 10 Torr To measure below this limit an ultrahigh vacuum UHV Stabil Ion gauge can be used The UHV Stabil Ion gauge has an x ray limit of approximately 2x10 11 Torr This lower x ray limit...

Страница 103: ...lower and more repeatable pressure indications by bringing the pressure in the gauge closer to equilibrium with the chamber Electron Bombardment EB degassing is accomplished by increasing the anode vo...

Страница 104: ...decreased causing the resistance of R1 to decrease to its previous value The opposite events happen for a pressure increase The bridge voltage is a non linear function of pressure All materials have...

Страница 105: ...e or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive device...

Страница 106: ...cement parts that are specified by G P or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Safety Check Upon compl...

Страница 107: ...ged or contaminated filament coating will not sustain emission Try alternate filament Short in IG cable Short between IG electrodes Open filament in IG Try alternate filament Convectron Gauge display...

Страница 108: ...icating red LED s and the Power Supply monitor s green LED s located beneath the Control Unit s cover see Figure 1 8 on page 1 6 A list of specific causes are described in Table 7 2 on page 7 5 IG pre...

Страница 109: ...nician Unplugged Convectron Gauge Plug in gauge Sensor broken in Convectron Gauge Replace gauge Convectron Gauge zero badly out of calibration Adjust zero calibration See Section 4 9 on page 4 29 Chec...

Страница 110: ...tion Unknown gas type Gauge not mounted horizontally see Section 3 3 on page 3 3 Sensor damaged e g by reactive gas Gauge very dirty Extremes of temperature or mechanical vibration CGA over current in...

Страница 111: ...screen Let the solvent stand in the gauge for at least ten minutes Do not shake the gauge Shaking the gauge with liquid inside can damage the sensor wire To drain the gauge position it horizontally w...

Страница 112: ...rpressure shutdown point is factory set below the Stabil Ion Gauge turn around point at both emission currents The overpressure shutdown can be readjusted for specific applications according to the fo...

Страница 113: ...h the title Newest Event 0 marking the top or latest event in the buffer and an Oldest Event marking the oldest event up to 33 events Event buffer is from 0 33 See the table below 6 The buffer is rese...

Страница 114: ...in a bewildering array of configurations the first thing to do if trouble arises is check the following configuration options 1 Check switch settings Be sure baud rate character format and framing an...

Страница 115: ...store or ship MOS devices or printed circuit boards Do not operate the 370 Controller with MOS devices removed from the printed circuit boards 4 See Section 2 1 1 on page 2 2 for how to remove the to...

Страница 116: ...iption Figure 7 6 Power Turn ON Figure 7 9 Convectron Gauge Display Figure 7 7 Stabil Ion Gauge Turn ON Figure 7 10 RS 232 Interface Figure 7 8 Stabil Ion Gauge Display Figure 7 6 Power Turn ON NO YES...

Страница 117: ...IL ION GAUGE CALL FACTORY NO NO NO YES NO NO YES YES YES REPLACE STABIL ION GAUGE CHECK MEMORY MODULE 9 99 REPLACE CABLE IS MEMORY MODULE INSTALLED FOR GAUGE INSTALL MEMORY MODULE NO YES SET CORRECT R...

Страница 118: ...ABLE DAMAGED IS RANGE IN 10 4 DECADE IS CABLE LONGER THAN 50 FEET CHECK CABLE LENGTH CHECK VACUUM RANGE CALL FACTORY NO NO NO NO NO YES YES YES YES RE CALIBRATE VAC ATM CORRECT SETUP NO NO YES 370 RS...

Страница 119: ...2 Damage requiring service safety 1 vi Degas Power limiter 4 17 Pressure indication during 4 17 degas Ionization gauge 5 2 Degas Time 4 12 Degassing Bayard Alpert Gauges 6 3 Degassing the Stabil Ion...

Страница 120: ...for the Stabil Ion Gauge 4 10 Service and Maintenance 7 1 Service guidelines 1 ix 7 1 Setpoint display and adjustment Process Control 4 31 Setup Menu Variables 4 12 Specifications CONVECTRON Gauge 6...

Страница 121: ......

Страница 122: ...art number 370119 Revision C March 2020 Series 370 Instruction Manual Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email...

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