
7-1
Series 370 Stabil-Ion Instruction Manual - 370119
Chapter 7
7
Service and Maintenance
7.1 Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical
Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a
Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA. In
some cases a hazardous materials disclosure form may be required. The MKS Customer Service
Representative will advise you if the hazardous materials document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping
damage on returned products as a result of inadequate packaging is the Buyer's responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at: www.mksinst.com
Because the 370 Controller contains static-sensitive electronic parts, the following precautions must be
followed when troubleshooting:
• Use a grounded, conductive work surface. Wear a high impedance ground strap for personnel
protection.
• Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed
circuit boards.
• Do not operate the product with static sensitive devices or other components removed from the
product.
• Do not handle static sensitive devices more than absolutely necessary, and only when wearing a
ground strap.
• Do not use an ohmmeter for troubleshooting MOS circuits. Rely on voltage measurements.
• Use a grounded, electrostatic discharge safe soldering iron.
NOTE: This product is designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Danger, High Voltage – The high voltages present within the Power Supply
are capable of causing injury or death. To avoid electric shock, wait 3
minutes after power is removed before touching any component within the
Power Supply. This will permit charged capacitors to discharge.
The service and repair information in this manual is for the use of Qualified
Service Personnel. To avoid shock, do not perform any procedures in this
manual or perform any servicing on this product unless you are qualified to
do so.
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by MKS for service and
repair to ensure that safety features are maintained. Do not use this product
if it has unauthorized modifications.
Содержание Stabil-Ion 370 Series
Страница 2: ......
Страница 8: ...Table of Contents iv Series 370 Stabil Ion Instruction Manual 370119...
Страница 36: ...2 Initial Setup Procedures 2 16 Series 370 Stabil Ion Instruction Manual 370119...
Страница 46: ...3 Installation 3 10 Series 370 Stabil Ion Instruction Manual 370119...
Страница 58: ...3 Installation 3 22 Series 370 Stabil Ion Instruction Manual 370119...
Страница 121: ......