MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 100 / 122

5 Operation of a Stabil-Ion System
5-2
Series 370 Stabil-Ion Instruction Manual - 370119
In the 10
-4
Torr range, the indication is accurate to about
±
0.1 millitorr provided the
instrument has been carefully zeroed at vacuum. See Section 4.9 on page 4-29 for vacuum
and atmosphere calibration procedures. For accurate use in the 10
-4
range, zeroing should be
repeated frequently.
3. If you have Convectron Gauge capability installed and have prepared your system for
automatic operation of the Stabil-Ion Gauge(s) per Section 4.8 on page 4-28, the ionization
gauge(s) will turn ON and OFF automatically.
4. For manual operation, press the Stabil-Ion Gauge 1 (or 2) power switch, IG1 (or IG2
)
, on the
Control Unit. The pressure in Stabil-Ion Gauge 1 (or 2) will be displayed on the IG line of the
display in the chosen pressure units.
5. To degas IG1 ( IG1 must be ON and the
pressure within IG1 must be below
5 x 10
-5
Torr), depress the DEGAS
switch on the Control Unit (see Figure
5-2). When degassing with filament 1
or 2 selected, both filaments will
operate in order to achieve full degas
power and thorough cleaning of both
filaments.
If one of the filaments is not operating, the degas will revert back to degassing the single
selected filament at a reduced power.
6. When either filament is nearing the end of its useful lifetime or is badly contaminated, the
DEGAS switch LED indicator on the front panel will blink during degassing (see Figure 5-2).
This is an indication that the filament emission properties have deteriorated. This may be due
to contamination which has temporarily “poisoned” the filament coating, or to long term
permanent erosion of the coating.
If this condition does not disappear after a few days of operation at clean high vacuum, it is an
indication that one or both filaments are approaching their end of life.
Stable pressure measurement requires that all the environmental parameters in, on, and
around the vacuum gauge and vacuum system remain unchanged during measurement.
Therefore, expect measurements immediately after turning ON the Stabil-Ion Gauge or
immediately after degassing the gauge to be less stable and less accurate. Permit sufficient time
for the environmental parameters to stabilize.
Figure 5-2 Control Unit Front Panel Showing
DEGAS Button and LED Indicator
O
I G 1
O
DEGAS
O
POWER
O
I G 2
TORR
IG
2.13 -8
A
B
5.67 -2
745
1
2
3
4
5
6