MKS Series 275 MiniConvectron Скачать руководство пользователя

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Instruction manual part number 275513
Revision C - November 2019

Series 275

Mini-Convectron

Vacuum Gauge Module

with Nonlinear Analog Outputs
and Process Control Relays

Instruction Manual

Customer Service / Technical Support:

MKS Global Headquarters

2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at www.mksinst.com

Содержание Series 275 MiniConvectron

Страница 1: ...Mini Convectron Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays Instruction manual part number 275513 Revision C November 2019 Series 275 Instruction Manual...

Страница 2: ......

Страница 3: ...lips and Convectron are registered trademarks and mksinst TM is a trademark of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners Mini Con...

Страница 4: ...E 1 33 inch NW16CF Conflat type flange F 1 33 inch NW35CF Conflat type flange G 1 8 inch NPT 1 2 inch tubulation P 1 4 inch VCR type female Q 1 2 inch VCR type male R Measurement Units Torr T pascal...

Страница 5: ...elays 40 3 4 Reading Relay Status 44 If the module without a display has one setpoint relay 44 If the module has a digital display 44 3 5 Calibrate the Convectron Gauge at Atmospheric Pressure 44 If t...

Страница 6: ...Table of Contents 6 Mini Convectron Module Instruction Manual 275513...

Страница 7: ...d will result in death or serious injury Warning indicates a hazardous situation which if not avoided could result in death or serious injury Caution indicates a hazardous situation or unsafe practice...

Страница 8: ...ct and in the operating instructions Follow Instructions Follow all operating and maintenance instructions Accessories Do not use accessories not recommended in this manual as they may be hazardous El...

Страница 9: ...ety as well as proper operation that the envelope of the gauge be connected to a facility ground See Section 2 3 4 for detailed grounding instructions Connect power cords only to properly grounded out...

Страница 10: ...d with at all times 1 the proper gas cylinders are installed 2 the gas cylinder valve positions are correct on manual systems 3 the automation is correct on automated gas delivery systems Vacuum gauge...

Страница 11: ...ications and recommendations For product safety related matters contact the MKS Customer Service Department See Section 1 8 for detailed information regarding how to contact MKS Customer Service Repre...

Страница 12: ...tensive work by a qualified technician to restore the product to its normal operation e If the product has been dropped or the enclosure has been damaged f When the product exhibits a distinct change...

Страница 13: ...eturning products to MKS be sure to package the products to prevent shipping damage Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer...

Страница 14: ...no guarantee that interference will not occur in a particular installation Operation of this equipment in a residential area may cause harmful interference in which case the user will be required to c...

Страница 15: ...or two setpoint relays Figure 2 1 Mini Convectron Modules without Digital Display Figure 2 2 Mini Convectron Module with 3 Digit Display Explosive Environment Using the module to measure the pressure...

Страница 16: ...llow the instructions below 2 3 1 1 Locate the Module For greatest accuracy and repeatability locate the module in a stable room temperature environment Ambient temperature should never exceed 40 C 10...

Страница 17: ...will vibrate Vibration causes convection cooling resulting in inaccurate high pressure readings Figure 2 3 Mini Convectron Module Dimensions 2 3 1 2 Orient the Module For proper operation of the modu...

Страница 18: ...ber with thread seal tape b Without using a wrench or other tool tighten the module just enough to achieve a seal Over Pressure Conditions Twisting the module to tighten the fitting to the vacuum cham...

Страница 19: ...OFHC copper gasket Avoid scratching the seal surfaces To avoid contamination install metal gaskets a Finger tighten all bolts b Use a wrench to continue tightening 1 8 turn at a time in crisscross ord...

Страница 20: ...with 9 Pin Connector one Setpoint Relay no Digital Display Figure 2 6 275400 2 Module with15 Pin Connector two Setpoint Relays no Digital Display Figure 2 7 275600 0 Module with15 Pin Connector no Se...

Страница 21: ...amp to the gauge stem of the housing b Install a 3 31 mm2 12 AWG or larger copper wire between the clamp and a metal ground lug bolt or stud on the vacuum chamber Figure 2 9 Ground Connection to the V...

Страница 22: ...3 6 2 3 6 1 Atmospheric Pressure Calibration An atmospheric calibration is performed on the Convectron gauge using N2 at the factory before the module is shipped The factory calibration sets the atmos...

Страница 23: ...the front panel if the module has the optional display Figure 3 2 illustrates the module with one setpoint relay and no display Table 3 2 lists features of the front panel if the module has one setpoi...

Страница 24: ...nward adjustment of setpoint 1 or setpoint 2 S P ADJUST UP switch Enables upward adjustment of setpoint 1 or setpoint 2 Pressure value display Provides 3 digit indication of measured pressure TORR and...

Страница 25: ...tpoint relay activates MONITOR ANALOG test point Enables reading of analog output voltage representing measured pressure MONITOR COMMON test point Enable checking of values for Convectron gauge calibr...

Страница 26: ...vacuum pressure at which setpoint relays activate MONITOR ANALOG test point Enables reading of analog output voltage representing measured pressure MONITOR COMMON test point Enable checking of values...

Страница 27: ...adjust the setpoint relays for the process gas that will be used See Section 3 3 1 For application assistance contact an MKS application engineer at 1 833 986 1686 Once the module is operating you ma...

Страница 28: ...Vdc at 760 Torr 133 3 kPa 1333 mbar for N2 or air The vacuum chamber pressure indicated by the gauge depends on the gas type gas density pressure and the module orientation The module is factory calib...

Страница 29: ...3767 c 0 04563 d 0 1151 e 0 04158 f 0 008737 2 2 842 to 4 945 V a 0 1031 b 0 3986 c 0 02322 d 0 07438 e 0 07229 f 0 006866 3 4 94 to 5 659 V a 100 624 b 0 37679 c 20 5623 d 0 0348656 yTorr a bx cx 2 d...

Страница 30: ...Chapter 3 30 Mini Convectron Module Instruction Manual 275513 Figure 3 4 Analog Output Voltage vs Indicated N2 or Air Pressure 1 mTorr to 100 mTorr...

Страница 31: ...Operation Mini Convectron Module Instruction Manual 275513 31 Figure 3 5 Analog Output Voltage vs Indicated N2 or Air Pressure 0 1 Torr to 1000 Torr...

Страница 32: ...03 4 071 4 154 4 336 4 502 4 621 4 708 4 775 4 830 4 860 4 877 4 919 4 955 O 2 384 392 417 453 521 679 868 1 141 1 664 2 195 2 814 3 672 4 225 4 620 4 916 5 026 5 106 5 200 5 315 5 422 5 515 5 592 5 6...

Страница 33: ...ion Manual 275513 33 Figure 3 6 True Pressure versus Indicated Pressure for Commonly used Gases 10 4 to 10 1 Torr Indicated pressure in Torr N2 equivalent To convert Torr to pascal multiply by 133 3 T...

Страница 34: ...uction Manual 275513 Figure 3 7 True Pressure versus Indicated Pressure for Commonly used Gases 10 1 to 1000 Torr Indicated pressure in Torr N2 equivalent To convert Torr to pascal multiply by 133 3 T...

Страница 35: ...ion Manual 275513 35 Figure 3 8 True Pressure versus Indicated Pressure for Commonly used Gases 10 1 to 1000 Torr Indicated pressure in Torr N2 equivalent To convert Torr to pascal multiply by 133 3 T...

Страница 36: ...Chapter 3 36 Mini Convectron Module Instruction Manual 275513 Figure 3 9 True Pressure versus Indicated Pressure for Commonly used Gases 10 4 to 0 1 mbar...

Страница 37: ...Operation Mini Convectron Module Instruction Manual 275513 37 Figure 3 10 True Pressure versus Indicated Pressure for Commonly used Gases 0 1 to 1000 mbar...

Страница 38: ...Chapter 3 38 Mini Convectron Module Instruction Manual 275513 Figure 3 11 True Pressure versus Indicated Pressure for Commonly used Gases 0 1 to 1000 mbar...

Страница 39: ...ipped from the factory relays are set to activate below 0 0 Torr The relays will not operate until they have been adjusted for the application Adjustment causes setpoint relays to activate with decrea...

Страница 40: ...of 0 64 V represents an N2 or air pressure of 40 mTorr 5 3 x 10 3 kPa 5 3 x 10 2 mbar In Figure 3 14 a test point voltage of 4 8 V indicates an N2 or air pressure of 40 Torr 5 33 kPa 53 3 mbar If the...

Страница 41: ...driver to adjust the ADJUST SET PT1 or ADJUST SET PT2 potentiometer for the desired setpoint voltage at which relay 1 will activate with decreasing pressure 3 3 2 3 If the module has a digital display...

Страница 42: ...Chapter 3 42 Mini Convectron Module Instruction Manual 275513 Figure 3 13 Example Test Point Voltage 0 64 V equals 40 mTorr 5 3 x 10 3 kPa 5 3 x 10 2 mbar of N2 or Air...

Страница 43: ...Operation Mini Convectron Module Instruction Manual 275513 43 Figure 3 14 Example Test Point Voltage 4 8 V equals 40 Torr 5 33 kPa 53 3 mbar of N2 or Air...

Страница 44: ...even if the process gas is N2 or air Regardless of the process gas that is being used you should always use N2 or air to calibrate the Convectron gauge at atmospheric pressure The procedure for calib...

Страница 45: ...e MONITOR ANALOG and MONITOR COMMON test points on the module front panel 3 Use a flat head instrument screwdriver to adjust the ADJUST VACUUM potentiometer to a reading of 0 375 Vdc 3 6 2 If the modu...

Страница 46: ...ings in the 1 x 10 4 Torr 1 3 x 10 5 kPa 1 3 x 10 4 mbar range are not required In the 1 x 10 4 Torr 1 3 x 10 5 kPa 1 3 x 10 4 mbar range resolution is 0 1 millitorr if the Convectron gauge has been p...

Страница 47: ...nical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www mksinst com 4 1 1 Damage Requiring Service...

Страница 48: ...ring a ground strap Rely on voltage measurements for troubleshooting module circuitry Do not use an ohmmeter Use a grounded electrostatic discharge safe soldering iron Safety Precautions Substitution...

Страница 49: ...uge or differential pressure sensor is damaged for example by reactive gas or contaminated Temperature or mechanical vibration is extreme If Convectron gauge is out of calibration recalibrate it see S...

Страница 50: ...or if other listed resistance values are greater than the listed values the gauge is defective Install a replacement Convectron gauge as instructed in Section 4 4 2 Figure 4 1 Convectron Gauge Pins O...

Страница 51: ...Convectron Gauge To avoid contaminating the Convectron gauge wear sterile gloves during the replacement procedure 1 Shut OFF power to the module 2 Align the gauge pins so they mate with spring loaded...

Страница 52: ...Chapter 4 52 Mini Convectron Module Instruction Manual 275513...

Страница 53: ...n the accuracy specification for the instrument If the module will measure the pressure of a gas other than N2 or air you must adjust relays for the process gas Temperature Limits Operating Temperatur...

Страница 54: ...1 significant digit for module with optional display Resolution Two significant digits Analog Output 0 375 to 5 659 Vdc for 0 to 1000 Torr of N2 non linear 0 to 1333 mbar of N2 non linear 0 to 1 33 x...

Страница 55: ...sions are in cm in Optional Display Pressure Units Torr or Pascal Pressure Value Green 3 digit LED automatic ranging from Torr to mTorr Vacuum Connections Dim H cm in 1 8 NPT pipe thread inch inside d...

Страница 56: ...56 Mini Convectron Module Instruction Manual 275513...

Страница 57: ...tron gauge sensing wire is designated R1 in the Wheatstone bridge circuit The temperature compensator is designated R2 At bridge null the following equation applies Bridge voltage is a non linear func...

Страница 58: ...58 Mini Convectron Module Instruction Manual 275513...

Страница 59: ...dimensions 17 module orientation 18 module with one relay no display 25 module with optional display 15 module with two relays no display 24 26 module without display 15 output voltage versus N2 or ai...

Страница 60: ...ional display 53 wiring 20 Precautions for troubleshooting 48 Pressure atmospheric at altitude pressure voltage relationships 45 relief devices 16 true versus indicated 33 35 37 38 versus analog outpu...

Страница 61: ...on Module Instruction Manual 275513 61 ground connection to vacuum chamber 21 grounding 21 I O connector module with one relay 20 module with two relays 20 specifications 53 installation 19 power supp...

Страница 62: ...Index 62 Mini Convectron Module Instruction Manual 275513...

Страница 63: ......

Страница 64: ...n Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays Instruction Manual Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA...

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