MKS Series 275 MiniConvectron, Инструкция по эксплуатации

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Chapter 3
32
Mini-Convectron Module Instruction Manual - 275513
Table 3-7 Voltages (Vdc) for Commonly used Gases, 0.1 mTorr to 1000 Torr
CH
4
.3896
.403 .438 .492 .584 .796
1.053 1.392 2.014 2.632 3.313
–
4.699 5/172 5.583 5.720 5.860
–
6.103
–
6.342
– –
6.519
–
6.642
Ne
.381 .388 .405 .433 .484 .608 .768
1.002 1.469 1.976 2.631 3.715 4.605 5.406 6.159 6.483 6.661 6.726 6.767 6.803 6.843 6.890 6.920 6.942 7.000 7.056
D
2
.386 .396 .425 .470 .549 .727 .944
1.265 1.914 2.603 3.508 5.059 6.361
– – – – – – – – – – – – –
Fr
eo
n
22
.388 .400 .432 .480 .566 .764 .990
1.
291
1.
805
2.
247
2.
666
3.
090
3.
330
3.
414
3.
509
3.
660
3.
883
4.
005
4.
088
4.
151
4.
203
4.
247
4.
271
4.
286
4.
321
4.
354
Fr
eo
n
12
.388 .401 .437 .488 .581 .778
1.009 1.315 1.826 2.257 2.647 3.029 3.204 3.308 3.430 3.618 3.827 3.938 4.016 4.076 4.124 4.166 4.190 4.203 4.237 4.270
KR
.379 .384 .395 .415 .451 .544 .668 .847
1.194 1.536 1.921 2.429 2.734 2.966 3.075 3.134 3.269 3.384 3.466 3.526 3.573 3.613 3.632 3.645 3.674
–
CO
2
.385 .395 .412 .462 .536 .705 .900
1.179 1.668 2.172 2.695 3.316 3.670 3.903 4.071 4.154 4.336 4.502 4.621 4.708 4.775 4.830 4.860 4.877 4.919 4.955
O
2
.384 .392 .417 .453 .521 .679 .868
1.141 1.664 2.195 2.814 3.672 4.225 4.620 4.916 5.026 5.106 5.200 5.315 5.422 5.515 5.592 5.633 5.658 5.713 5.762
Helium
.382 .389 .409 .441 .497 .637 .814
1.068 1.589 2.164 2.939 4.387 5.774 7.314
– – – – – – – – – – – –
Arg
o
n
.381 .387 .403 .429 .477 .595 .745 .962
1.386 1.818 2.333 3.028 3.480 3.801 4.037 4.122 4.192 4.283 4.386 4.477 4.550 4.611 4.643 4.663 4.706 4.745
N
2
(a
ir
)
.38
4
.39
2
.41
7
.45
5
.52
3
.68
2
.87
6
1.15
5
1.68
3
2.21
7
2.84
2
3.67
5
4.20
6
4.57
7
4.84
6
4.94
5
5.01
9
5.11
1
5.22
4
5.32
9
5.41
9
5.49
5
5.53
4
5.55
8
5.61
4
5.65
9
True pressure
mba
r
1.3 x 2.6 x 6.0 x 1.3 x 2.6 x 6.6 x 1.3 x 2.6 x 6.6 x 1.3 2.6 6.6 1.33 x 2.66 x 6.66 x 1.33 x 2.66 x 3.99 x 5.33 x 6.66 x 7.99 x 9.33 x 1.01 x 1.06 x 1.19 x 1.33 x
kPa
1.
3
x
2.
6
x
6.
0
x
1.
3
x
2.
6
x
6.
6
x
1.
3
x
2.
6
x
6.
6
x
1.
3
x
2.
6
x
6.
6
x
1.
3
3
2.
6
6
6.
6
6
1.
3
3
x
2.
6
6
x
3.
9
9
x
5.
3
3
x
6.
6
6
x
7.
9
9
x
9.
3
3
x
1.
0
1
x
1.
0
6
x
1.
1
9
x
1.
3
3
x
Torr or mTorr
1 mTorr 2 mTorr 5 mTorr 10 mTorr 20 mTorr 50 mTorr 100 0.2 Torr 0.5 Torr 1 Torr 2 Torr 5 Torr 10 To
rr
20 To
rr
50 To
rr
100
T
o
rr
200
T
o
rr
300
T
o
rr
400
T
o
rr
500
T
o
rr
600
T
o
rr
700
T
o
rr
760
T
o
rr
800
T
o
rr
900
T
o
rr
100
0