MKS Series 275 MiniConvectron, Инструкция по эксплуатации

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Operation
Mini-Convectron Module Instruction Manual - 275513
29
Table 3-6 Equations for Calculating N
2
or Air Pressure Versus Analog Output Voltage
Segment Output Voltage Equation where y = Pressure and x = Voltage Coefficients
1 0.375 to 2.842 V a –0.02585
b 0.03767
c 0.04563
d 0.1151
e –0.04158
f 0.008737
2 2.842 to 4.945 V a 0.1031
b –0.3986
c –0.02322
d 0.07438
e 0.07229
f –0.006866
3 4.94 to 5.659 V a 100.624
b –0.37679
c –20.5623
d 0.0348656
y
Torr
a bx cx
2
dx
3
ex
4
fx
5
+ + + + + =
y
Pa
a bx cx
2
dx
3
ex
4
fx
5
+ + + + + ( )
133.3
×
=
y
mbar
a bx cx
2
dx
3
ex
4
fx
5
+ + + + + ( )
1.333
×
=
y
Torr
a cx ex
2
+ +
1 bx dx
2
fx
3
+ + +
-------------------------------------------- =
y
Pa
a cx ex
2
+ +
1 bx dx
2
fx
3
+ + +
--------------------------------------------
 
 
 
133.3
× =
y
mbar
a cx ex
2
+ +
1 bx dx
2
fx
3
+ + +
--------------------------------------------
 
 
 
1.333
× =
y
Torr
a cx +
1 bx dx
2
+ +
------------------------------- =
y
Pa
a cx +
1 bx dx
2
+ +
-------------------------------
 
 
 
133.3
× =
y
mbar
a cx +
1 bx dx
2
+ +
-------------------------------
 
 
 
1.333
× =