MKS PR 4000 F, Инструкция по эксплуатации

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PR4000F Chapter 4: Operation
23
Setpoint
Here you can enter the setpoint for massflowcontrollers (MFC) as well as for in-line pressure
controllers, e.g. MKS type 640. The example shows an MFC on channel 2 and a pressure
controller being operated by channel 1.
The PR4000F takes automatically into account any corrections which may be necessary because
of zero offset compensation.
The adjustable range and the engineering units are determined by the choosen range as shown
next:
Range
Place the cursor by using the left/right arrow keys under the parameter to be edited. Edit range and
engineering unit by using the up/down arrow key.
Also the position of the decimal point can be edited.
The following engineering units are available:
mbar – bar – mTorr – Torr – kTorr – Pa – kPa – mH2O – cmH2O – PSI – N/m
2
– sccm – slm – scm
– scfh – scfm – mA – V - % - C –
µ
bar.
All ranges may be set in a format between 99999 und 00000.
SP1 05.000 mbar
SP2 20.000 SCCM
RNG1 10.000 mbar
RNG2 50.000 SCCM