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MKS PR 4000 F, Инструкция по эксплуатации

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Chapter 1:  General Information

PR4000F

6

1.2    How This Manual Is Organized

This manual provides instructions on how to install, set up and operate the PR4000F unit.

Before installing your PR4000F unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the 

Safety Messages and Procedures

section at the front of this manual. In addition, observe and obey all 

WARNING

 and 

CAUTION

notes provided throughout the manual.

Chapter 1

General Information;

 (this chapter) introduces the product and ist manual

Chapter 2

Installation;

 explains environmental requirements and practical considerations for

the installation.

Chapter 3

Overview; 

reviews the PR4000F controller. It describes the components on both

the front and rear panels and describes the electrical connections.

Chapter 4

Operation;

 explains the parameter editing (Setup), describes how to operate the

unit and contains examples for system configurations.

Chapter 5

Interfaces; 

describes the RS232 and RS485 interfaces.

Appendix A

Specifications; 

lists the technical data of the unit.

Appendix B

Error Messages; 

contains a list of error messages shown in the display.

Appendix C

Default Configurations

; lists the default settings for both pressure and flow.

1.1  Customer Support

Standard maintenance and repair services are available at all of our regional MKS Calibration and
Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
PR4000F instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS,
your service center can inform you about the need for an ERA Number (Equipment Return
Authorization Number) or a form for declaration of decontamination or other regulations before
shipping.  The ERA Number expedites handling and ensures proper servicing of your instrument.

Please refer to the last page of this manual for a list of MKS Calibration and Service Centers.

Warning

All returns to MKS Instruments must be free of harmful, corrosive,
radioactive, or toxic materials.

Содержание PR 4000 F

Страница 1: ...PR 4000 F 2 Channel Power Supply and Readout for Flow and Pressure Instruction Manual MKS Instruments Deutschland GmbH Release 05 2000...

Страница 2: ...work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expre...

Страница 3: ...ral Description 5 1 2 How This Manual Is Organized 6 1 1 Customer Support 6 Chapter 2 Installation 7 2 1 Unpacking 7 2 2 Unpacking Checklist 7 2 3 Cables 8 Interconnection Cabels from MKS 8 Generic Sh...

Страница 4: ...Control 33 Display for measurement values and setpoints 33 Status Displays 34 Control Display 34 4 5 Operation with pressure transducers 35 Operation with Baratron Type 120 36 4 6 Operation with mass...

Страница 5: ...tring ID 46 Remote Mode RT 46 Access Channel AC 46 Actual Value AV 46 Setpoint SP 47 External Input EX 47 Status ST 47 Valves VL 47 Relays RL 48 Displays DP 48 Display 4 DP4 48 Range RG 48 Gain GN 49...

Страница 6: ...R 52 Formula Temporary FT 52 Parity PY 53 Baudrate BD 53 Address AD 53 Interface Mode IM 53 Resolution RS 54 Reset Status RE 54 Default DF 54 Appendix A Specifications 55 Appendix B Error Messages 57...

Страница 7: ...ables Figures Figure 1 Dimensions 11 Figure 2 Front Panel 13 Figure 3 Rear Panel of the PR4000F 14 Figure 4 Structure of the menu 19 Tables Table 1 Definition of Symbols Found on the Unit 2 Table 2 St...

Страница 8: ...List of Figures and Tables PR4000F viii This page left blank...

Страница 9: ...he like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like w...

Страница 10: ...No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Clas...

Страница 11: ...NDING THE PRODUCT This product is grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the...

Страница 12: ...Safety information PR4000F 4 This page left blank...

Страница 13: ...o or more units PR4000 can be combined thus performing multichannel control units Further features Display format four or five digits selectable 2 trip limits and 2 relays can be combined and configur...

Страница 14: ...l data of the unit Appendix B Error Messages contains a list of error messages shown in the display Appendix C Default Configurations lists the default settings for both pressure and flow 1 1 Customer...

Страница 15: ...carrier and MKS immediately Please refer to the last page of this manual for a list of MKS calibration and service centers Caution Only qualified individuals should perform the installation and any us...

Страница 16: ...es Note An overall metal braided shielded cable properly grounded at both ends is required to meet CE specifications We recommend to use the cables offered by MKS Instruments Cables which are in compl...

Страница 17: ...remotely closing of the control valve Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment Should you choose to manufacture your own cables follow the guidelines l...

Страница 18: ...or signal voltage gets to the device D The capacitance and inductance of cables which are handling fast signals such as data lines or stepper motor drive cables and E That some cables may need intern...

Страница 19: ...PR4000F Chapter 2 Installation 11 Dimensions Figure 1 Dimensions above Front and Rear Panel below Side View...

Страница 20: ...0mA 115 VAC 15 V 1 5 A T1A 115 VAC 24 V 1 A T630mA Table 3 Fuse Information The version of your PR4000F is derived from the informations on the serial label Caution Check to make sure the voltage sett...

Страница 21: ...nt output Note Channel valve switch channel preselection must be activated for setpoint output SETPOINT LED lit when setpoint output active REMOTE LED lit when unit is operated through serial interfac...

Страница 22: ...ccess to the inputs and outputs for signals of measurement setpoint and controls EXTERN This connection is used to input external analog setpoint signals and to output measurement signals of both chan...

Страница 23: ...t 10 reserved 3 Flow controllers Valve Close Baratron Type 120 Range Turndown 11 Signal ground 4 Digital out 12 Signal ground 5 15 V Ground 13 reserved 6 15 V 14 reserved 7 15 V 15 Chassis ground 8 Se...

Страница 24: ...CH2 5 15 V Ground Identical to Pin 2 at connector CHANNEL1 CHANNEL2 Identical to pin 11 12 of the corresponding channel connector ACCESS This connector provides access to different utility signals on...

Страница 25: ...n Pin Function 1 Relay 1 Normally closed 9 Relay 1 Common 2 Relay 1 Normally open 10 Relay 2 Normally closed 3 Relay 2 Common 11 Relay 2 Normally open 4 reserved 12 reserved 5 reserved 13 5 V 6 reserv...

Страница 26: ...8 No connection 4 No connection 9 No connection 5 GND RS485 15 pin Sub D Pin Function Pin Function 1 Shield 9 Send Data T B 2 Send Data T A 10 No connection 3 No connection 11 Reveive Data R B 4 Revei...

Страница 27: ...erent displays and how to set the parameters for operation and control 4 1 Structure of the Menu The menu is divided in two levels 1 Displays for standard operation These displays show measurement val...

Страница 28: ...ow keys or 3 When you switch on Edit mode the cursor appears as a flashing underscore below the first or last alphanumeric character You can move the cursor within a line using the left right arrow ke...

Страница 29: ...ction Entering Setup Enter the setup submenu by pressing the right arrow key A cursor appears under the word SETUP Confirm by pressing the enter key ENTER Or simply press two times the enter key For d...

Страница 30: ...2 display as flow FL Flow You can activate and deactivate display 2 Place the cursor between the word DISPLAY2 and the following character then make your choice with the up down arrow keys Configurati...

Страница 31: ...ation The adjustable range and the engineering units are determined by the choosen range as shown next Range Place the cursor by using the left right arrow keys under the parameter to be edited Edit r...

Страница 32: ...ing GAIN 00 7000 This finally results in a range of 0 140 sccm CO2 which is displayed correctly by the PR4000F OFFS is the zero offset value of the respective input signal Typically the zero offset is...

Страница 33: ...in 2 connector CHANNEL 1 OUT1 Setpoint signal full scale for the MFC or pressure controller connected to channel 1 Pin 8 connector CHANNEL 1 EI1 External setpoint input for channel 1 Pin 1 connector E...

Страница 34: ...alve unintendendly The digital output connector CHANNEL1 or CHANNEL2 pin 4 is held to LOW This activates the input Valve Close of MFC s forcing the control valve to be closed METER Setpoint output vol...

Страница 35: ...500 80 6 25 1 Example as before but for external setpoint mode EXTRN Channel 1 MFC 500 sccm full scale Mode EXTRN this makes channel 1 to be the slave of the external setpoint source Scaler SCL set to...

Страница 36: ...ration points shall be used Example for a pressure transducer 1 mbar full scale The 6 point calibration data sheet lists the known deviation Cal Point Pressure mbar Baratron Reading mbar 0 0 000 0 000...

Страница 37: ...window for channel 1 and channel 2 In the limit mode you can set two switchpoints and the hysteresis In the window shown the hysteresis DEAD BAND is set to 1 5 The switchpoints shown are set to UL Up...

Страница 38: ...e 30 00 mbar was passed To both limits the selected value for the hysteres must be added In the example shown relay RLY2 is set to an idle state Refer to the section Relay Settings at the end of this...

Страница 39: ...0 57600 76800 115000 Baud Parities Odd Even None For more instructions refer to chapter 5 INTERFACE Interface RS485 In this menu the adress and interface mode are selected Only for units with RS485 in...

Страница 40: ...gs for both flow and pressure RESOL16 activated indicated by a diamond shaped sign 4 5 digit display format recommended for pressure measurement with Baratron pressure transducers De activated no diam...

Страница 41: ...r display 2 The windows above show the format which would come up when following the examples described in the section Setup To ease operation the setpoints SP1 or SP2 can be set here It is not necess...

Страница 42: ...cycle first indicate the respective channel with the left right arrow key and then press the ENTER key It is recommended to check that the readout will be set to zero 0 1 Digit Repeat the autozero cyc...

Страница 43: ...side of VLVX Then use either the up or the down key to generate a diamond sign and confirm with the ENTER key Any channel marked with a diamond can be switched on with the ON key This allows to switc...

Страница 44: ...bar As explained before the PR4000F will display the complete pressure measurement range of the type 120 with no restriction of the specified resolution provided the RTD mode has been selected To do t...

Страница 45: ...the section Control Display VLV1 VLV2 Note The setpoint voltage will be applied only to channels which have been pre selected with the valve switch VLV1 or VLV2 Beside the thermal mass flow controlle...

Страница 46: ...o be edited are set to standard values but should be checked anyway See the table in appendix C for all default settings Change the setup settings where needed Always check the correct setting of para...

Страница 47: ...SLEEP In this mode the trip limits are not active LIMIT In LIMIT mode the signal L is triggered if the actual input is below LL and the signal U is triggered if the actual input is above UL BAND In B...

Страница 48: ...ential setpoint switch of the channel is on D1 D2 RTD line in the range turn down mode is active T1 T4 Results of 4 temporary formulas to increase the flexiblity of combinations 0 bzw 1 constant value...

Страница 49: ...election of numbers of criteria Position before or after criteria Choice of operation Position under a criteria Choice of criteria or of a constant value Examples RLY1 L1 v U2 Relay 1 is activated whe...

Страница 50: ...Chapter 4 Operation PR4000F 42 This page left blank...

Страница 51: ...ional and token divided by a separator are alternatives There are no blanks between command elements needed Yellow characters are constant gray characters represent placeholders for command values aa...

Страница 52: ...nts needed Yellow characters are constant gray characters represent placeholders for command values r1 r2 r3 CR r1 r2 r3 reply values of command CR reply terminator carriage return 13 value separator...

Страница 53: ...xt HELLO DT HELLO return dislayed text DT blanks out display Request Key KY KY key number request most recently pressed key OFF 00007 ON 00008 ESC 00009 ENTER 00010 RIGHT 00011 LEFT 00012 UP 00013 DOW...

Страница 54: ...PR4000 to local mode Access Channel AC ACc setpoint vlv actvalue vlv access channel setpoint actvalue 5 110 of FS vlv OFF ON AC1 100 00 010 00 set setpoint of channel 1 and retrieve actual value AC2...

Страница 55: ...input 5 110 of FS EX1 000 00 retrieve external input Status ST ST hexsts request of hex status word hexsts bits 0 comerr 1 underrange AIN0 2 overrange AIN0 3 underrange AIN1 4 overrange AIN1 5 relay0...

Страница 56: ...to FL of channel 1 DP1 1 3 1 retrieve setting of display 1 DP2 OFF switch display 2 off Display 4 DP4 DP4 enable enable setup configurable display 4 enable OFF ON DP4 ON switch display 4 on Range RG R...

Страница 57: ...hannel 1 OF1 00030 retrieve offset RTD Offset RO ROc offset offset setup RTD offset offset 250 250 RO1 3 set offset of channel 1 RO1 00003 retrieve offset Autozero AZ AZc offset trigger autozero offse...

Страница 58: ...al input range phyrange 1 10 EI1 10 set external input range to 10V EI1 00010 retrieve external input range External Output Range EO OTc phyrange phyrange setup of physical output range phyrange 1 10...

Страница 59: ...int of lin table LN1 2 02 000 02 000 retrieve point in lin table LSc size size setup of table size size 0 10 LS1 2 set table size LS1 00002 retrieve table size Limit Mode LM LMc lmode lmode setup limi...

Страница 60: ...neg src op neg src neg src op neg src op neg src setup of relay source r Number of formula 1 2 neg Sign for negation is src R1 R2 L1 L2 U1 U2 E1 E2 V1 V2 D1 D2 T1 T2 T3 T4 1 0 op Operator is OR is AND...

Страница 61: ...ate baudrate 0 110 1 1200 2 2400 3 4800 4 9600 5 19k2 6 38k4 7 57k6 8 76k8 9 110k BD 4 set baudrate BD 00004 retrieve baudrate Address AD AD address address setup of address address 0 15 AD 4 set addr...

Страница 62: ...nable setup of 16 bit resolution enable OFF ON RS ON set resolution to 16 bit RS ON retrieve resolution Reset Status RE RE reset status RE reset status Default DF DF dmode reset to default values Pres...

Страница 63: ...onfigurable 4 digits 0000 9999 12 bit resolution 5 digits 00000 99999 16 bit resolution Conversion rate Mode EXTERN not EXTERN Rate 5 Hz at 16 bit 20 Hz at 12 bit 20 Hz Signal input range all 11 V to...

Страница 64: ...Appendix A Specifications PR4000F 56 This page left blank...

Страница 65: ...PR4000F Appendix B Error Messages 57 Appendix B Error Messages Code Problem E 001 Communication Error E 002 ADC Overflow or Underflow E 003 Range Error Setpoint 0 or out of Range W 001 Offset 250 mV...

Страница 66: ...Appendix B Error Messages PR4000F 58 This page left blank...

Страница 67: ...0 0mV 1 0 0mV RTDOFFS1 RTDOFFS2 0mV 0mV IN1 OUT1 EI1 EO1 5V 5V 10V 10V IN2 OUT2 EI2 EO2 5V 5V 10V 10V SIGMODE1 SCL1 INDEP 100 METER 0 SIGMODE2 SCL2 INDEP 100 METER 0 LIN1 1 1 zero points 1 1 zero poi...

Страница 68: ...Appendix C Default Configuration PR4000F 60 This page left blank...

Страница 69: ...u Commandant Rolland B P 41 F 93352 Le Bourget Cedex France 33 1 48 35 39 39 Telex 233817 F Fax 33 1 48 35 32 52 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 M nchen 49 89 4...

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