MKS HPS 945 Series, Руководство по эксплуатации и обслуживанию

Страница: 4 / 38

Digital Pirani Vacuum Sensor System
Part # 945-X-XXX-XX
– __– __ __ __–__ __
Serial # __ __ __ __ __ __
Please fill in these numbers and have
them readily available when calling for
service or additional information.
(The part number can be found on your
packing slip, and the serial number is
located on the back panel of the
controller.)
© 1999 by MKS Instruments, Inc. HPS ® Products, Inc., All rights reserved.
Is a registered trademark of MKS Instruments, Inc., HPS TM Products, Inc.
Teflon is a registered trademark of DuPont Co.
VCR is a registered trademark of Cajon Co.
For more information or literature, contact:
MKS Instruments, Inc., HPS ® Products, Inc.
5330 Sterling Drive
Boulder, CO 80301 USA
Phone: 303-449-9861
800-345-1967
FAX: 303-442-6880