MKS HPS 945 Series, Руководство по эксплуатации и обслуживанию

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15
Digital Pirani vacuum Sensor System
Operating the Series
945 Pirani System
Reading Pressure
The Sensor must be connected to the Controller before turning
on the unit
.
Turn the power on to display pressure or to operate the set point relays. The
table below shows the Series 945 Pirani System’s voltage output as a
function of pressure for nitrogen, argon, and helium, and the graph on the next
page gives the same information.
Since Pirani systems are gas dependent and the Series 945 Pirani System is
calibrated for air/nitrogen, it reads in
nitrogen equivalent pressure for argon,
helium, or any other gas. The table and graph do not give true pressure of
gases other than nitrogen. Refer to page 20, Using the Series 945 Pirani
System with Other Gases, to determine true pressure.
In the measuring range of 1.0 x 10
-4
to 1.0 x 10
-3
Torr, only one significant
digit will be displayed, e.g., 2 -4 . At pressures above 100 Torr, the Series
945 System's upper measuring limit, the display will show. H1 At
pressures below 1x10
-4
The display should show LO x 10
-4
(See page 17).
Series 945 Pirani System
Output Voltage vs. Pressure
Torr Pascal Voltage
Nitrogen Argon Helium
Torr Pascal Voltage
Nitrogen Argon Helium
1.0E-04 1.3E-02 0.211 0.211 0.211
5.0E-04 6.7E-02 0.217 0.215 0.217
1.0E-03 1.3E-01 0.225 0.220 0.224
2.5E-03 3.3E-01 0.246 0.234 0.243
5.0E-03 6.7E-01 0.278 0.255 0.273
7.5E-03 1.0E+00 0.307 0.275 0.300
1.0E-02 1.3E+00 0.333 0.294 0.324
2.0E-02 2.7E+00 0.420 0.358 0.407
3.0E-02 4.0E+00 0.491 0.411 0.476
4.0E-02 5.3E+00 0.552 0.458 0.536
5.0E-02 6.7E+00 0.606 0.500 0.589
6.0E-02 8.0E+00 0.655 0.539 0.638
7.0E-02 9.3E+00 0.700 0.574 0.684
8.0E-02 1.1E+01 0.742 0.607 0.726
9.0E-02 1.2E+01 0.781 0.638 0.766
1.0E-01 1.3E+01 0.818 0.667 0.804
2.0E-01 2.7E+01 1.103 0.896 1.112
3.0E-01 4.0E+01 1.306 1.060 1.347
4.0E-01 5.3E+01 1.464 1.189 1.543
5.0E-01 6.7E+01 1.593 1.295 1.713
6.0E-01 8.0E+01 1.702 1.385 1.865
7.0E-01 9.3E+01 1.796 1.462 2.003
8.0E-01 1.1E+02 1.877 1.530 2.129
9.0E-01 1.2E+02 1.949 1.590 2.246
1.0E+00 1.3E+02 2.013 1.643 2.355
2.0E+00 2.7E+02 2.411 1.976 3.174
3.0E+00 4.0E+02 2.609 2.143 3.723
4.0E+00 5.3E+02 2.729 2.245 4.133
5.0E+00 6.7E+02 2.810 2.313 4.456
6.0E+00 8.0E+02 2.868 2.362 4.718
7.0E+00 9.3E+02 2.911 2.399 4.937
8.0E+00 1.1E+03 2.945 2.428 5.122
9.0E+00 1.2E+03 2.973 2.452 5.282
1.0E+01 1.3E+03 2.995 2.471
2.5E+01 3.3E+03 3.127 2.583
5.0E+01 6.7E+03 3.172 2.622
5.0E+01 6.7E+03 3.172 2.622
1.0E+02 1.3E+04 3.193 2.638