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HPS

Products Series 945

Digital Pirani

Vacuum Sensor System

OPERATION AND

MAINTENANCE MANUAL

Содержание HPS 945 Series

Страница 1: ...HPS Products Series 945 Digital Pirani Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL...

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Страница 3: ...Digital Pirani Vacuum Sensor System HPS Products Series 945 Digital Pirani Vacuum Sensor System July 1999 Part 109450020 Rev A1...

Страница 4: ...and the serial number is located on the back panel of the controller 1999 by MKS Instruments Inc HPS Products Inc All rights reserved Is a registered trademark of MKS Instruments Inc HPSTM Products In...

Страница 5: ...Pirani System 10 Pirani Sensor Installation 10 Location 10 Orientation 10 Contamination 10 Vacuum Connection 10 Pirani Controller Installation 11 Controller Mounting 11 Connecting the Sensor to the C...

Страница 6: ...ting and Service 22 Cleaning the Pirani Controller Front Panel 22 Cleaning the Pirani Sensor 23 Testing the Pirani Sensor 23 Accessories 24 Product Warranty 25 Notes 26 Appendix A How the Series 945 P...

Страница 7: ...5 Digital Pirani Vacuum Sensor System User s Manual The Series 945 System s Pirani Sensor and its connecting cable are sold separately Please refer to page 24 for necessary ordering information If any...

Страница 8: ...identify other information in this manual that is essential to highlight or useful in achieving optimal performance from your Series 945 Pirani System CAUTION Risk of electrical shock CAUTION Refer to...

Страница 9: ...r to page 20 for use with other gases In a system which is filled from a pressurized source install a safety relief valve or burst disc to safely limit pressure Turn off power to the Controller before...

Страница 10: ...current rating Only qualified personnel should change line voltage or fuse ratings if required Outside of the U S use only a detachable cord set that has conductors with a cross sectional area equal t...

Страница 11: ...ratureRange 10 to 55 C 14 to 131 F OperatingHumidity 80 maximum noncondensing InsulationCoordination Installation Overvoltage Category II Pollution Degree 2 Number of Channels 1 Front Panel Controls 2...

Страница 12: ...entation Any Reproducibility 5 of indicated pressure Tconst Materials Exposed to Vacuum SS 304 platinum alumina ceramic silver brazing alloy nickel 200 Internal Volume 0 5 in 3 8 0 cm3 maximum Operati...

Страница 13: ...w Set Point Push buttons Set Point Adjustment Potentiometers LED Set Point Indicators Atmospheric Adjustment Potentiometer Zero Adjustment Potentiometer Power Cord Inlet w Fuse Holder Panel Mounting F...

Страница 14: ...ng the relay set points Sensing abnormal pressure and taking appropriate security measures using the relay set points Controlling system pressure using the analog output as input to an automatic press...

Страница 15: ...panel cutout or stands alone All controls even the power switch are conveniently accessed from the front panel and cable connections are hidden to the rear of the Controller The Series 945 Pirani Cont...

Страница 16: ...e s filament wire and cause the calibration to shift Install the Sensor with the vacuum port facing down whenever possible to prevent particulates falling or liquids flowing into it Using a screen or...

Страница 17: ...the Controller with at least 1 inch left open above and below the perforatedpanels An optional hardware kit shown below is also available for mounting the Controller into a standard DIN cutout in a pa...

Страница 18: ...sor or Controller Pin 6 of the octal socket is intentionally shorter as a safety measure When the cable is connected or disconnected from the Sensor this feature prevents a voltage overload on the Sen...

Страница 19: ...he following time lag fuses T 0 16 A 5 mm x 20 mm 90 to 130 VAC T 0 063 A 5 mm x 20 mm 210 to 250 VAC 4 Close and secure the fuse holder drawer AccessoryConnector Relay set point contacts and the anal...

Страница 20: ...C and the resistance R are calculated by the equations C I 2 1 x 107 and R E 10Ia where C is in farads R is in ohms I is DC or ACpeak load current in amperes E is DC or ACpeak source voltage in volts...

Страница 21: ...Nitrogen Argon Helium Torr Pascal Voltage Nitrogen Argon Helium 1 0E 04 1 3E 02 0 211 0 211 0 211 5 0E 04 6 7E 02 0 217 0 215 0 217 1 0E 03 1 3E 01 0 225 0 220 0 224 2 5E 03 3 3E 01 0 246 0 234 0 243...

Страница 22: ...Sensor Adjustment Series 945 Pirani Controllers and their Sensors are calibrated at HPS However instances in which user calibration will be required are After installation on your system the Controll...

Страница 23: ...icrons L0 4 for mbar or L0 2 for Pa If the display shows TL 4 Torr turn the Vac potentiometer clockwise until L0 4 Torr is displayed If the reading is 1 4 Torr or higher turn the Vac potentiometer cou...

Страница 24: ...uld be at least 6 Hz 150 msec conversion time A resolution of 12 bits is needed corresponding to 1 22 mV per bit The A D converter should have a differential input to prevent ground currents from affe...

Страница 25: ...high vacuum pump such as a diffusion or turbo pump if possible ion and cryo pumps are not recommended Leak testing can be done with a mechanical pump however cyclical variations in pressure may resul...

Страница 26: ...e page A 1 Theory of a Thermal Conductivity Sensor Since the Series 945 Pirani System s Sensor is such a gauge the voltage output depends upon the gas measured When used with gases other than nitrogen...

Страница 27: ...ermine the voltage pressure relationship for gases which are not shown in the graph or table you need to calibrate the Series 945 Pirani System with this gas This calibration requires a gas independen...

Страница 28: ...r too low No analog output voltage and no display No analog output voltage but set points functional Set point relay will not operate Display shows nc 1 Contaminated Sensor 2 Gas other than air is use...

Страница 29: ...utput Replace the Sensor if it becomes contaminated see Accessories p 24 Testing the Pirani Sensor This test is for function only Slight Sensor damage by contamination or rough handling can affect cal...

Страница 30: ...1 8 NPT M with Compression Seal Option 103150011 15 mm x 30 mm Tubing 103150016 18 mm x 30 mm Tubing 103150018 Power Cord 115 VAC 103150001 Seal Centering Ring Assemblies with Screen KF 16 SST Viton 1...

Страница 31: ...for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic che...

Страница 32: ...26 Digital Pirani vacuum Sensor System Notes...

Страница 33: ...loss and radiation but not eliminate these terms A Pirani sensor may be operated at constant current voltage or resistance equivalent to temperature at the sensor wire The Series 945 Pirani System s...

Страница 34: ...a fairly low output impedance it is best to measure the analog output signal with an instrument having at least 1 MW of input impedance Set Point Relays A reference voltage and op amp form a precisio...

Страница 35: ...A 3 Digital Pairani Vacuum Sensor System Notes...

Страница 36: ...A 4 Digital Pairani Vacuum Sensor System...

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