MKS HPQ3, Руководство по оборудованию

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MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
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Overview
The HPQ3 is the latest innovation in RGA technology from MKS Instruments allowing operation far
beyond the 1e
-4 mbar of conventional RGA’s without the need for differential pumping.
The field proven analyser technology of the HPQ analyser coupled with the latest innovative
electronics technology derived from the Microvision2 family give data quality not previously seen in
this class of instrument. The resulting system is less complex, with reduced installation
requirements, offering a higher level of reliability at a substantially lower cost.
In addition, the HPQ3S uses application validated correction algorithms to compensate for the
sensitivity variation arising from ion-molecule interactions in the ion source at higher pressures.
This allows reliable data to be obtained for specific gas species including water, oxygen, nitrogen,
methane, helium and hydrogen in argon and other gas mixtures.
Features
Data acquisition through solid state, wide dynamic range, fast settling detector electronics.
Temperature stabilized critical components offering improved signal stability and drift.
Calibrations and configurations stored locally within the RGA.
Flexible I/O capability including a dedicated gauge port.
Further expandability of the I/O capabilities using add-in cards.
TCP/IP and ASCII protocol support
Operation
The HPQ3 is designed to be operated in several ways:
From a host computer
– an IBM compatible PC or MAC running the MKS Process Eye
Professional or EasyView software package.
PC or MAC using a web browser such as Internet Explorer or Safari.
Integration into existing systems controlling through the use of the ASCII protocol command set.