MKS HPQ3, Руководство по оборудованию

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MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
51
7.4.2 Fitting filaments
The fitting of filaments is simply the reversal of the procedure for removing them. Care should be
taken at all stages to ensure that no shorts are introduced and that the analyser is kept clean.
1. Note the design of the filament plate; it has different sized tabs to help orientate the plate
correctly into the cut-out sections of the ion-source as shown in the diagram below.
Using tweezers, carefully place filament plate onto the mounting posts. Be careful not to touch the
source cage with the filament.
2. Re-fit the two M2 x4 pan head screws through the filament plate and tighten securely. Do not
over tighten.
3. Re-fit each barrel connector in the same orientation as removed, sliding each barrel connector
over the connecting lead and filament post and while holding the barrel connector firmly with pliers,
tighten all screws.
Do not slide the barrel connector all the way down the filament post as you may short-circuit the
insulating feedthrough. Leave 1- 2mm of clearance.
4. Before re-fitting the analyser to your vacuum chamber, refer to page 31 for details on how to
check for any short circuits.
5. Replace the analyser into your vacuum housing and again check for shorts or grounding to the
outer vacuum housing.
You are now ready to pump down and continue the operation of your quadrupole.
Note the cut-outs
for orientation of
the filament plate