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MKS Instruments UK Ltd

HPQ3 Hardware Manual – SP101019.101 October 2012

Action to be taken in the event of human contact or spillage:

I hereby confirm that the only toxic or hazardous substances that the equipment specified above
has been in contact with are named above, that the information given is correct and that the
following actions have been taken:

1. The equipment has been securely packaged and labelled.

2. The carrier has been informed of the hazardous nature of the consignment if applicable.

Signed:

Title:

Date:

Phone No.:

Содержание HPQ3

Страница 1: ...HPQ3 S Hardware Manual HPQ3 Hardware Manual SP101019 101 October2012...

Страница 2: ...d Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel International 44 0 1270 251939 Fax International Email manual_info mksinst com MKS Products provided subject t...

Страница 3: ...21 2 9 Digital I O Connector 22 2 10 Ethernet 24 3 Analyser Installation 25 3 1 Unpacking 25 3 2 Inspecting the analyser 25 3 3 Installing the analyser 27 3 4 Checking the system pressure 27 3 5 Moun...

Страница 4: ...UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 4 8 Exploded Views 56 Analyser pin outs 56 9 Spare Parts 58 Filaments 58 Complete Ion source 58 10 Returning Your Unit for Service 59 Support Con...

Страница 5: ...lowing directives I hereby declare that the equipment named above has been designed to comply with the relevant sections of the above referenced specifications The unit complies with all essential req...

Страница 6: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 6 Signed J M Higgins General Manager 10th October 2009...

Страница 7: ...ule interactions in the ion source at higher pressures This allows reliable data to be obtained for specific gas species including water oxygen nitrogen methane helium and hydrogen in argon and other...

Страница 8: ...2 8 This manual focuses on HPQ3 hardware and should be used in conjunction with the relevant user interface manual during installation Any required network communications cards should be installed and...

Страница 9: ...plus 46mm over analyser connector to face of CF flange Weight 1 7 kg 24VDC Power Supply Dimensions 75mm wide x 45mm high x 146mm deep plus 30mm over strain relief Weight 0 6 kg Analyser Max Operating...

Страница 10: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 10...

Страница 11: ...earth conductor of the power cord must be connected to the power source protective earth terminal There are no operator replaceable parts within the 24VDC power supply unit or the HPQ3 unit 1 5 Conne...

Страница 12: ...holes which are not for operator use On the rear panel refers to a Read all instructions carefully before use b The control unit and signal ports are designed for connection to MKS accessories via MKS...

Страница 13: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 13 Allow a minimum clearance of 50mm all round Do not exceed the maximum operating ambient temperature...

Страница 14: ...required to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to all ot...

Страница 15: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 15...

Страница 16: ...st be returned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC and safety crit...

Страница 17: ...d HPQ3 Hardware Manual SP101019 101 October 2012 17 2 Rear Panel Connections The rear panel incorporates all the connections required by the HPQ3 RGA Details on these connectors and their use can be f...

Страница 18: ...y contact This is a low voltage 5V 1mA contact The contact should be closed for normal operation open to trip the filaments or if the protective equipment is switched off 2 Open collector TTL drive Th...

Страница 19: ...101019 101 October 2012 19 2 3 Emission Indicator The indicator is lit when a filament is active and within correct operating parameters 2 4 Multiplier Indicator N A 2 5 Power Indicator The indicator...

Страница 20: ...ased 2 7 Power A 2 pin D type connecter used to for the 24VDC power supply Pin Function Description 1 Gauge On Open collector output from gauge 2 No connection 3 24VDC Output 24VDC supply output fused...

Страница 21: ...h fused at 120mA fuses are self resetting NOTE The 120mA maximum load for the power supply outputs is shared between the Digital and Analogue connectors Pin Function Description 1 15V 15V supply outpu...

Страница 22: ...urable I O lines 3 3V power output fused at 120mA fuses are self resetting 15V power output fused at 120mA fuses are self resetting 24V power output fused at 120mA fuses are self resetting Note The to...

Страница 23: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 23 24 GND 25 24V 24V supply output fused at 120mA...

Страница 24: ...appropriate arrange the hardware software configuration so that an input Hi state is a safe condition This ensures that if a connection should be unplugged the system will go into a fail safe state d...

Страница 25: ...re has been obvious damage during shipment or if there are items listed on the packing slip as shipped which are not in the box immediately contact your local MKS sales service representative 3 2 Insp...

Страница 26: ...19 101 October 2012 26 Look at each lead from the flange to its termination point to ensure that it does not touch any other element of the analyser If any damage is noted contact your local MKS repre...

Страница 27: ...mber If your chamber does not meet the above criteria you should use a specially designed adapter so that the analyser may be mounted outside the chamber Please contact your local MKS representative f...

Страница 28: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 28...

Страница 29: ...efully insert the analyser into the vacuum chamber ensuring that you do not allow the leads to touch the walls of the vacuum chamber Make sure the gasket does not slip part way out of its slot as you...

Страница 30: ...h are easily damaged DO NOT force the HPQ3 unit on to the analyser When all of the pins are engaged push the HPQ3 firmly onto the analyser to ensure electrical continuity The last 3mm 1 8 is important...

Страница 31: ...s equipment connecting to the digital or analog ports Finally attach the line cord to the power supply The power supply will automatically set itself to operate with the local line voltage When power...

Страница 32: ...addresses by a process of arbitration between devices If a DHCP or BOOTP server is present on the network Auto IP will obtain an IP address from the server DHCP Short for Dynamic Host Configuration Pr...

Страница 33: ...is to be connected to a network where existing devices obtain their IP address automatically then no further configuration is required You can safely connect the HPQ3 to your network The HPQ3 is to be...

Страница 34: ...SP101019 101 October 2012 34 For details on how to assign a static IP address to the HPQ3 please see the guide on Page 26 You will need to be allocated an IP address for use by your IT Specialist or...

Страница 35: ...eed to use a dedicated cross over cable and power on the HPQ3 Next you need to check if your PC or MAC is configured for Auto IP most are by default Windows PC Start Connect To Show All Connections Cl...

Страница 36: ...ts UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 36 If your PC or MAC is not configured for Auto IP you can make the following changes to enable the function You will need to have Administrati...

Страница 37: ...the following options Obtain an IP address automatically Obtain DNS server address automatically Click OK MAC Apple Menu System Preferences Network Ethernet Configure Choose the option Using DHCP or...

Страница 38: ...tart the application After a few moments the following dialog appears displaying a list of all discovered MKS RGA s You can see that there is only one RGA displayed in the example yours may contain ma...

Страница 39: ...eed to ask for an IP address and Subnet from your IT Specialist if you are installing on a network This is done using the RGA Device Manager Application found on the supplied MKS Utilities CD This app...

Страница 40: ...see that Device Manager displays all the pertinent information on the RGA of particular interest are the Address and Type fields The Address field is the currently assigned IP address of the HPQ3 The...

Страница 41: ...UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 41 Right click the instrument and select Change IP Address You can see that the HPQ3 is configured to receive an IP address We must change this op...

Страница 42: ...instruct you on what to enter here otherwise leave it blank Once the relevant information has been entered click OK to store and commit the changes to the HPQ3 6 Baking The analyser may be baked up to...

Страница 43: ...to the collector 3 The detector This area of the quadrupole analyser is hidden inside the flanged housing Its function is simply to convert the filtered ion beam presented by the quadrupole filter in...

Страница 44: ...You should not attempt repair other than replacing the filaments or cleaning replacing the ion source Further servicing may be carried out on site or on an RTB basis Please contact your local MKS repr...

Страница 45: ...ect the other lead to pins 3 through 12 on the analyser feedthrough in turn Each one should give an open circuit Now move the meter lead from pin 2 to pin 3 and check to pins 4 to 12 Proceed around th...

Страница 46: ...the second meter lead to pin 4 Filament 1 You should read short circuit Next connect the second meter lead to pin 10 Filament 2 again your meter should indicate short circuit If either or both filame...

Страница 47: ...ing the analyser securely in an upright position a small bench vice is ideal pen and paper on which to make notes and sketches 7 4 1 Removing the filaments 1 Remove the analyser from the vacuum system...

Страница 48: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 48 Refer to the views on the following page...

Страница 49: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 49 Fig 1 Fig 2...

Страница 50: ...uation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits which will vary in colour but may be brown blue canary yello...

Страница 51: ...4 pan head screws through the filament plate and tighten securely Do not over tighten 3 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over the connectin...

Страница 52: ...a diameter and length to accommodate the analyser Put the measuring cylinder into the ultra sonic bath for 10 to 15 minutes Remove the analyser and allow any excess alcohol to drain off Keep the anal...

Страница 53: ...weler s screwdriver 2mm Pair of tweezers Small pair of smooth jawed needle nosed pliers Pair of clean cotton gloves Clean bench on which to work Ohmmeter Clean container in which to put small parts Pe...

Страница 54: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 54 Fig 1 Fig 2...

Страница 55: ...1019 101 October 2012 55 7 5 3 Refitting the ion source Refitting the ion source is simply the reversal of the procedure for removing it Care should be taken at all stages to ensure that no shorts are...

Страница 56: ...are Manual SP101019 101 October 2012 56 8 Exploded Views Analyser pin outs Pin 1 is easily identified as it is the only pin with a metalized contact running through it The pins are numbered clockwise...

Страница 57: ...ents UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 57 Pin Connection 1 Earth 2 Source plate 3 Not Used 4 Filament 1 5 Extraction plate 6 Not Used 7 RF 1 8 Filament common 9 Not Used 10 Filamen...

Страница 58: ...supplied in pairs either on a single plate or on two plates depending on the analyser Replacement ion sources are supplied complete with filaments Filaments Tungsten Thoriated Iridium Yttrium 842 070...

Страница 59: ...e serial numbers date of purchase and a fault description Fill in the relevant sections of the Health and Safety Returns Form below or we can provide you with a copy This form MUST accompany the instr...

Страница 60: ...MKS Instruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 60...

Страница 61: ...end to the appropriate MKS facility Please ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH...

Страница 62: ...nstruments UK Ltd HPQ3 Hardware Manual SP101019 101 October 2012 62 Customer return address if different from above Name Contact number Equipment returned Item 1 Serial No Item 2 Serial No Item 3 Seri...

Страница 63: ...ware Manual SP101019 101 October 2012 63 Please describe the system fault in detail Details of substances pumped or coming into contact with the returned equipment Chemical names Precautions to be tak...

Страница 64: ...toxic or hazardous substances that the equipment specified above has been in contact with are named above that the information given is correct and that the following actions have been taken 1 The eq...

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